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Category 278Matter
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Subcategory 655Matter (581 ~600 )
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Flange material SUS 304 The inner surface processing Buff 400 (equivalent to Ra 1.0 RoHS2 corresponding ○ -
Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○ -
Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○ -
Flange material SUS 304 The inner surface processing Buff 400 (equivalent to Ra 1.0 RoHS2 corresponding ○ -
Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 The inner surface processing GBB Processing RoHS2 corresponding ○
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Fittings SUS 316 Flange material SUS 304 RoHS2 corresponding ○ -
Fittings SUS 316 Flange material SUS 304 RoHS2 corresponding ○ -
Fittings SUS 316 Flange material SUS 304 RoHS2 corresponding ○ -
Fittings SUS 316 Flange material SUS 304 RoHS2 corresponding ○
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Classification Peripheral components Vacuum and Air For vacuum RoHS2 corresponding ○ -
Connection type QD1KJBA magnet Samarium cobalt Long-life cathode None Baking possible temperature (the 100 ℃ Baking possible temperature (pow 350 ℃ The input power voltage 12±1％ V DC The input power current 250～700 mA Input power frequency 50/60 Hz The input power power 3～8.5 W Output power voltage +3500±20% Output power voltage (short circ Output 1: 0 to 5, output 2: 0 Output Power current 1000 mA Output power current (short circ 5 mA Output Power power 1.1 W max. Environmental Operating temperat 0～60 ℃ Environmental humidity range (no 0～80 ％ Analog output signal recommended >1 MΩ Bootable pressure 1.3x10<sup>-2</sup> -
shell A5052 + Ni plating Insulator PEEK® Maximum temperature 100℃ The lowest temperature -196℃ RoHS2 corresponding ○ Vacuum and Air For vacuum -
screw SUS Insulator PEEK® Maximum temperature 250℃ Leak rate <1.0x10<sup>-8</sup>Pa･㎥/sec RoHS2 corresponding ○ Vacuum and Air For vacuum
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Available pressure 0.12MPa ～10<sup>-6</sup> Pa Leak rate <1x10<sup>-7</sup>Pa･ℓ/sec The lowest temperature 10℃ Maximum temperature 150℃ Cycles until first service 2,000,000 (unheated and under The input power voltage 24 VDC (±10%) @0.5V pk-pk max. The input power power 80 W max. (operation of valve
