Sapphire Substrate | Product List | Others | Official COSMOTEC Corporation

Plane orientation	C-plane
Finish	both-sided mirror polishing
size	□25mm
The thickness	0.5mm

Plane orientation	C-plane
Finish	both-sided mirror polishing
size	□10mm
The thickness	0.3mm

Plane orientation	R-plane
Finish	both-sided mirror polishing
size	□25mm
The thickness	1mm

Plane orientation	C-plane
Finish	single-sided mirror polishing
size	□10mm
The thickness	0.5mm

Plane orientation	C-plane
Finish	single-sided mirror polishing
size	Φ50.8mm
The thickness	0.43mm

Flange

sanitary
- 1.5S
- 1S
- 1S - 1.5S
- 2S
- 2.5S
- 3S
- 3.5S

Sanitary (NW)
- -
- 10
- 15
- 25
- 40
- 50
- 65
- 80

JIS10K

15A

20A

25A

32A

40A

50A

65A

type

LM

BNC/MHV

SHV-B

Thermocouple R/S Type

BNC/SHV

BNC

D-Sub

Thermocouple T type

Thermocouple type K

BNC/SMA

SMA

SHV

N

MHV

Thermocouple E type

Thermocouple J type

Thermocouple E/J type

T thermocouple/current inducti

K Thermocouple / cable termina

USB2.0 Female

USB3.0 Means

USB3.1 female

Thermocouple N Type

K thermocouple/High current

T Thermocouple/High current

standard

OMEGA Type

OMEGA ™ thermocouple type K

OMEGA™ Thermocouple C Type

OMEGA™ Thermocouple E Type

OMEGA™ Thermocouple J Type

OMEGA™ Thermocouple N Type

OMEGA™ Thermocouple R/S Type

Low voltage and medium current

High current

High voltage and low current

High-voltage and medium curren

High voltage and high current

Insulation flange

Optical fiber

Water-cooled terminal

Micro D-Sub (MIL-DTL-83513)

high voltage

Coaxial/High voltage

7/16

TRIAXIAL

double-ended

MS

マイクロドット

High Voltage RF

coaxial

Valve O-ring included

LAN

HDMI

Without valve section Viton®.

with panel mount

Without panel mount

高温

超高温

SUS

Tube / Fitting Size

1/16 inch

1/4 inch

1/8 inch

3/16 inch

5/16 inch

3/8 inch

5/8 inch

1/2 inch

3/4 inch

7/8 inch

1 inch

1-1/8 inch

1-1/4 inch

1-3/8 inch

1-1/2 inch

2 inch

2-1/2 inch

2-3/8 inch

2-4/3 inch

2-4/5 inch

3 inch

4 inch

5 inch

6 inch

6.4 inch

12.7 inch

1/16

1/8

1/4

3/8

1/2

3/4

2-3/4

2 mm

3 mm

4 mm

5 mm

6 mm

8 mm

10 mm

12 mm

12.7 mm

15 mm

16.4 mm

18 mm

19 mm

19.1 mm

21.7 mm

30 mm

31.75 mm

51 mm

59.5 mm

80 mm

103 mm

138 mm

20A

32A

50A

65A

80A

100A

3/8 inch・1/2 inch

1/4 inch・1/2 inch

1/2 inch・1/4 inch

1/8 inch・1/4 inch

1/4 inch・1/8 inch

Joint standard

VCR® M

VCR® F

Swagelok®

Tube end

VCR® M-VCR® F

VCR® F-VCR® M

Swagelok® and VCR® Female

Swagelok®・VCR® Male

RH7.5

ICF (tap)

ICF

RH6

VCR®

RH9

RH18

RH15

RH12

NW/KF

RH25

RH32

RH38

RH50

Tube adapter

PVC38

PVC25

PVC19

V®-Lok

UJR®female

UJR®

UJR®male

VCO

VCO®female

VCO®male

Taper screw

Taper screw F

Taper screw M

Parallel screws

Parallel screws F

Parallel screws M

NPT Female

NPT Male

Base flange / Port flange

ICF70 / ICF34

ICF114 / ICF34

ICF152 / ICF34

ICF203 / ICF34

ICF70 / NW16

ICF70 / TA1/4

ICF70 / SW1/4

ICF70 / FVCR1/4

ICF70 / MVCR1/4

Dimensions type

-

A

B

C

D

E

Male/Female

Male Type

Female Type

F/M

One side F, one side M

A

0.32

0.36

0.5

1.5

1.59

2

2.5

3.18

3.2

3.3

4.2

4.57

4.8

5

5.1

5.2

5.5

6.35

6.4

6.7

7.5

8

8.2

9

9.5

9.52

10

12

12.2

12.7

12.8

13.6

13.9

14

14.1

14.7

16

15

15.4

15.5

15.7

15.8

15.875

17

17.3

18

18.5

18.6

19

19.05

19.3

19.8

20

20.1

20.2

20.3

21

21.2

21.3

21.4

22

22.1

22.5

23

23.2

23.6

24

24.1

24.01

24.7

25

25.2

25.4

25.6

26

26.1

26.2

26.5

27.2

27.5

27.7

27.8

27.82

27.9

28

28.6

29

30

30.2

30.36

30.4

31.1

31.75

32

32.1

32.2

32.7

32.8

32.9

33

33.2

34

34.1

34.17

34.2

34.8

35.2

35.6

36

36.7

36.71

37.3

37.5

37.7

37.98

38

38.4

38.5

39.2

39.4

40

40.5

40.6

41

41.2

41.7

41.9

42

42.3

42.7

43.7

44

44.5

45.5

45.8

46

48

48.1

48.2

48.4

50

50.5

50.8

51.6

52

52.2

52.23

52.7

53.8

54

54.6

55

55.2

55.5

56

56.8

57

57.6

59

60

60.3

60.5

61

61.6

62.5

63

63.8

64

65

67.3

69

69.3

69.6

70

72.9

74

74.6

75

76.3

77.5

77.8

80

82

82.3

82.4

82.6

83

85.3

85.7

86

86.4

86.6

87

89.1

90

91

91.4

92

93

94

95

95.2

100

101.6

101.9

102

104.8

105

106

109

110

113.5

114

114.3

115.9

117

119

120

120.4

120.5

121

122

125.88

127

128

130

133

134

140

141

144.5

145

150

152

152.6

152.9

153

153.1

154

156

160

161

165

166.5

170

171

171.2

171.3

177.8

179

180

185

190

202.4

203

205

210

211

212.6

213

217.3

222

222.1

225

235

239

240

242

252

253

260.4

261

267.4

272

272.9

273.3

285

287

290

292

300

301

305

313

335

350

356

369

398

400

450

520

575

625

680

7/8-20UNEF-2A

l-1/8-18UNEF-2A

1-1/4-18UNEF-2A

l-3/8-18UNEF-2A

1-1/2-18UNEF-2A

1-3/4-18UNS-2A

7.7

10.4

178

31.8

57.2

69.9

0.65

9.6

15.9

377.3

377

2.75

120.6

158.7

29.2

180.1

165.1

-

42.2

379

277

82.8

152.8

212.8

8.5

35

46.2

48.3

6.1

4.6

7

9.65

22.4

28.7

72

116

320

41.0

54.0

69.0

0.52

17.05

48.5

370

450.1

425

510

101.8

77

183

255

31

310

361

123

81

162

107

148

188

306

237

39

43

53

346.4

428.8

316.5

B

0.52

0.5

2

4

1/4

3/8

1/2

3/4

1

2.2

4.3

4.7

7.1

11.9

11.1

17.86

14.3

0.36

0.72

5.1

0.4

0.9

1.0

1.4

1.5

1.6

1.7

1.74

1.8

2.3

2.4

2.9

3

3.2

3.4

3.6

4.35

4.5

5.8

4.8

5

5.3

6

6.4

6.6

7

7.4

7.5

7.52

7.6

7.62

8

8.7

8.72

9

9.52~

9.6

9.8

9.83

10

10.2

10.3

10.22

10.7

11

11.2

12

12.2

12.5

12.7

12.8

13

13.5

14

14.7

14.9

15

15.5

15.88

15.88~

15.9

16

16.3

17

17.05

17.2

17.3

17.5

17.78

17.8

18

19

19.1

19.8

19.9

20

20.2

20.6

21.1

21.4

21.95

22.1

22.2

22.23

22.4

22.5

23

23.5

23.8

24

24.2

25

25.2

25.4

25.5

25.7

26

26.2

26.3

27

27.6

27.7

28

28.5

29

29.4

29.7

30

30.2

31.6

31.8

32

32.1

32.9

33.3

33.5

33.8

34

34.8

34.9

34.93

35

35.2

35.3

35.5

36.2

36.7

37

37.1

37.3

38

38.5

38.8

38.9

39

39.5

39.7

40

41

41.1

41.2

41.3

41.28

41.5

42

42.4

42.8

42.9

43

44

46

46.2

47

47.6

47.8

48

48.3

48.5

49

50

51

52

52.2

52.3

53.57

53.9

54

54.5

54.9

55

56

57

58.5

59

59.92

60

60.2

60.7

61

61.5

61.8

61.9

62

63

63.6

64

65

66.27

66.6

67

67.3

68

68.3

69

69.44

70

70.2

70.3

72

72.62

72.9

73

74.3

74.6

75

76.5

77

78

78.97

80

81

82.5

82.6

83

83.1

84

85

86

87

88

89.5

91.6

94.84

96

97

98.3

99

99.3

100

101

101.8

102

103

104.37

105

108.3

110

111

112

113

114

116

119

120

120.6

120.7

121

125

127

135

136

136.8

147

148.5

149.1

149.2

150

151

152

152.6

152.7

153

154

155

161

162.2

166

170

171.3

171.5

173

175

177

196

197

197.1

198.5

200

202

203

203.2

204

207

210

211

212

213

213.3

215

216

217

222.3

222.5

223

232

235

236

247.7

250.8

254

254.2

254.5

255

256

257.5

269

260

261

263

264.7

268

272

273.2

276

285

289

300

305

314

314.5

319.6

322

323

350.5

351

376

401.5

425.5

452

475

504

524.5

555

579

-

29.9

39.1

67.6

153.2

213.2

29.5

56.5

165

115

171

371

66.5

2.62

82.3

128.5

130

95

0.77

140

48.6

90

141

72.4

85.1

104.1

151.8

215.3

266.1

60.5

74

93

198

46.3

92

139.5

50.3

38.4

63.8

101.9

3.175

1/8

15.8

62.3

89.7

267

320

231

183

42.7

218

296.8

318

396.8

22

36.5

46.5

95.5

148

209

147.5

208.5

33

251

301.8

64.5

23.9

43.1

107

311.1

392.9

146

C

3.18

2.5

5.8

1.58

4.76

1

1.2

1.7

2.6

3.1

3.3

3.8

4.57

0

0.5

0.7

2

2.3

2.7

3

3.2

3.5

4

4.2

5

5.1

5.5

5.6

5.9

6

6.1

6.35

6.4

6.5

6.6

6.7

6.9

7.1

7.2

7.5

7.6

7.7

7.94

8

8.1

8.2

8.5

8.9

9

9.2

9.5

9.52

9.53

9.6

9.7

10

10.16

10.2

10.5

10.7

10.8

11

11.5

11.8

11.7

12

12.1

12.2

12.4

12.5

12.7

12.8

13

13.4

13.5

13.8

13.9

14

14.2

14.3

15

15.3

15.5

15.7

15.8

15.9

16

16.2

16.4

16.5

17

17.1

17.2

17.3

17.4

17.5

17.6

17.8

18

18.2

18.3

18.5

18.8

19

19.05

19.1

19.4

19.5

20

20.5

20.8

21

21.4

21.5

21.7

22

22.2

22.5

22.88

23

24

23.3

23.8

24.7

24.8

25

24.9

25.4

45

26

26.2

27

27.2

27.5

27.7

27.94

28

28.5

28.6

29

30

30.1

31.5

31.8

31.9

32

32.1

33

34

34.1

34.3

34.9

35

35.58

36

37

37.3

37.5

38

38.1

38.5

39

40

40.5

40.6

41.2

41.4

41.5

42

42.7

43.1

43.2

43.7

44

44.5

44.8

45.2

45.7

47

47.4

47.5

48

48.2

48.26

48.6

48.9

49

49.5

49.8

50

50.3

50.8

51

51.5

52

52.2

52.7

53

53.5

53.7

54

55

54.8

55.1

55.5

55.6

56

56.4

57

57.4

57.6

57.9

58

59

59.9

60

60.1

60.5

60.8

61

61.5

62.5

63

63.1

63.2

63.5

63.8

64

65

66

66.3

67.3

67.5

68

68.3

69

69.1

69.3

70

70.5

70.6

71

71.1

71.9

73.6

73.7

74

75

75.1

75.3

75.5

75.7

76.2

76.3

76.5

76.6

77

78.3

78.7

79

80

80.5

81

81.3

81.5

82

82.6

83

83.1

83.8

84

85.1

85.3

86

86.5

86.9

87

89

88

88.9

89.1

89.4

90

90.3

91.4

91.5

94.6

95

100

101.6

101.9

102

102.1

102.2

102.6

104.6

105.2

105.5

106

107

108

108.2

109

109.5

110

114

114.3

114.6

115

116.5

116.8

117

117.1

118.8

119

119.3

122.5

125

126

127

128

128.5

130

130.5

131

134

135

137.4

136

139.8

141

140.1

150

151.5

152.9

152

152.4

153

153.5

155

161

166

165

165.2

165.5

170

173

176

175

190

181

200

203

203.5

203.7

213

215

218

216.3

216.8

220

250

225

254.5

260

261

267.4

72

269

320

357.5

409

460

510

560

T

-

99.5

122

174

98

96.5

96

19.3

86.4

95.5

97.5

100.5

43

41

148

50.2

73.9

35.6

8.8

70.1

70.4

25.5

203.2

197.2

254

209

53.2

61.8

73

8.3

7

3.175

19.6

2.8

4.7

2.4

64.5

85

76

92

91

305.6

324.4

406.9

43.5

56.5

83.5

305.3

104.7

32.3

213.2

13.3

145

151

C1

34.3

27.5

17.6

18

25

31

4.6

6.4

7.9

9.4

12.7

15.8

19.1

2.1

28.5

31.8

34.8

13

7

10

31.2

21.7

16

22

17

19

19.05

20

25.4

26

27.2

32

37

38

38.1

41

42.7

45

48.9

50.8

60.5

51

52

60.8

63.5

64

65

70

75

76.2

76.6

77

81

83

89.4

100

101.6

102

114.6

125

127

140.1

151

153

152.4

211

165.5

216.8

259

267.7

319.3

18.5

39.4

9

6

C2

225

-

175

150

125

100

80

70

60

40

32

20

278

328

35

49

D

0.5

4.25

5.84

7.43

8.64

6.05

1.6

1.5

2.3

3.4

4.2

1.74

6.5

15.1

9.5

18.6

18.7

12.7

15.65

7.9

5.5

5.35

8.53

1

2

2.5

3

3.3

4

4.35

4.5

5.4

6

7

7.52

8

10

9.23

9.65

10.22

10.7

10.9

11.2

11.8

12

12.2

12.4

12.95

13

13.5

14

14.2

14.5

15

15.3

15.7

15.75

15.8

16

16.1

16.5

16.6

17

17.1

17.3

17.5

17.6

17.7

18

17.8

18.2

18.4

19

18.5

18.8

19.3

19.4

19.5

20

20.9

21

21.3

21.5

21.6

22

22.0

22.1

22.4

22.5

23

23.4

23.6

23.9

24

24.2

24.5

24.8

24.89

25

25.1

25.3

25.4

25.5

25.6

25.65

25.8

26

26.0

26.2

26.5

27

27.5

27.6

27.9

28

28.1

28.4

28.5

29

29.0

29.5

29.8

29.9

30

30.2

30.4

30.5

30.7

30.8

31

31.2

31.8

32

32.3

32.5

32.8

33

33.02

33.2

33.3

33.5

33.8

33.9

34

34.5

34.7

34.8

35

35.6

35.7

35.9

36

36.5

36.6

37

37.1

37.2

37.5

37.8

37.9

38

38.1

39

38.35

39.4

39.6

40

40.5

40.6

40.7

41

41.1

41.2

41.5

42

42.5

42.7

43

44

44.5

44.7

44.9

45

45.3

45.5

46

45.7

46.1

46.5

46.9

46.99

47

47.2

47.5

47.6

47.8

49

47.9

48

48.5

49.2

49.5

49.7

50

50.1

50.5

50.8

51

51.05

51.1

52

53

54

54.5

54.9

55

55.1

55.2

55.6

55.9

56

56.3

56.8

56.9

57

57.2

57.5

57.7

58

58.8

59

59.2

59.4

59.5

60

60.2

61

61.1

61.5

61.9

62

62.2

63.2

63.4

63.5

63.7

64

65

65.5

66.3

66.9

67

67.1

67.5

67.6

67.9

69

70

70.1

71

71.1

72

72.1

72.3

72.9

73

73.5

74.6

74.9

75

75.8

76

76.2

77

78

78.2

78.7

79.5

79.6

80

80.8

81.5

82

82.5

82.6

83.1

84.9

87.5

88.9

89

89.5

89.7

90

90.7

92.7

93.2

95.6

97.6

98.3

99.5

100

100.1

100.9

10.1.4

101.6

102

102.6

103.1

103.4

103.6

104.6

104.9

105.1

105.2

105.5

106.1

107.2

107.4

107.7

108

108.3

108.4

110

111

112

113

114

114.3

115

117

118

119

120 ～ 139

120

125

127

129

132

133

133.8

134

135

143

145

146.9

147

150

153

156.5

158.4

159

159.3

160

161 ～ 201

165

165.1

182.6

183

195

197

200.2

201

205

205.3

208.3

219.1

227 ～ 268

248

254

256

256.3

259.4

262

267

273

283

295

T1

66.5

74

102.5

151.5

105

107

106.5

60.9

130

95.5

130.5

128

97.5

95

23.2

36.7

14.9

66

103

41.6

130.8

155.2

204.7

70.3

14.4

17.2

52.2

97.4

7.5

13.8

15.4

54.3

148.2

148.1

197.2

250

12.5

63

69.8

62.5

73.2

61.2

34.1

-

9.4

46.8

10.8

29.4

3.9

60.5

15.5

31.5

79

84

16.3

35.8

106

D1

10.1

5.8

12.6

16.3

2.8

3.8

5.3

1.8

8

14.3

10.6

16.6

5

18.2

10.7

0

10.4

16.5

17.5

15.75

16.1

4

7

17.6

5.35

8.53

17.1

13.6

19

15.7

15.8

16

20.7

21

21.2

22

22.1

23

23.2

25.3

23.4

24

25

28.6

29.2

29.8

30.5

30.6

33.4

33.5

33.9

34

34.8

35

37

37.1

38

39

39.4

40

45

46.1

46.6

47

48

55

55.6

58.9

59.2

59.4

59.5

60.2

68.3

70

70.2

71

71.5

86

89

93.7

95.2

95.6

96.4

97

97.4

117

120.8

144

146.2

147

168

218

230

270

279

D2

21.7

26.5

36.3

39

48.5

-

40

48

47

38

37

Φ D1

95

25.4

41.4

41.9

76.2

41.7

63.5

25

42

70

100

148

190

4.75

79.3

Φ D2

-

19.1

31.8

63.5

50.8

14

27

56

75

122

135

19

Φ D3

15.4

29

58.5

76.5

101.5

136

-

50

16

34.8

35.1

69.9

59.1

0.75

2.36

39

19.1

Φ D4

80

90

58.5

105

120

76.5

145

160

185

210

235

16.4

30

59.5

14

31

34

60.5

70

79.5

104.5

114

140

152

203

253

103

138

77.95

1.57

3.175

3.18

Φ D5

-

34

70

114

152

203

253

Φ D6

26

40

80

100

162

185

-

Φ D7

-

12

27

60

75

132

135

E

0

6

16

1/4

3/8

1/2

1

3/4

2

3

4

5

10

8

1 inch

7.4

1.25

1.5

6.35

9.53

6.4

9.5

11.1

14.3

3.18

4.4

6.7

9.9

2.5

3.2

4.5

5.2

6.3

8.3

10.3

13

12

12.3

13.6

18.6

12.7

15

18

19

19.1

19.05

19.6

20

21.7

22

22.2

24.1

24.6

25.4

27.2

28.6

29.2

30

30.2

31.75

31.8

32

32.4

34.1

34.9

35

38.1

38

40

42

42.1

42.7

45

50.8

55

56.4

57

60

60.5

60.6

70

70.2

74

77

77.2

83

84.6

84.7

85.2

86

88.9

89

89.5

90

96.5

96.6

97

97.3

99.1

100

100.5

101.6

102.7

103.7

106.7

106.9

108

108.5

109.2

110

110.3

110.5

112

114.4

115.7

116.8

116.9

117

120

130

132

150

153

157

182

213.2

242

261

292

66.5

85

98

135

160

185

210

7/16 inch

9/16 inch

7/8 inch

1-1/8 inch

98.5

165.2

190.7

111.8

6mm

41.5

56

75

5.1

99.3

70.1

218

19.4

25.8

107

9.65

101

102

87

114

111

115

104

116

318

400

76.5

E1

20

40

17.5

16

15

14

12.5

12

-

E2

9

10

12

12.5

14

15

16

46.2

-

F

-

14.2

17.4

20.6

23.8

26.9

30.1

36.5

114.3

140

20.2

30

40

5

6

6.5

7

9

9.5

12

12.5

13

13.5

14

15

15.8

17.5

23

35

37.1

54.9

57.25

57.75

65.25

68.45

10

15.1

19.9

55

75

7.2

G

82.6

114

25.4

108

76.2

10.9

14.1

15

10

12.5

17.2

76

25

75

50

120.7

53

109.7

110.2

99

102.2

121

121.0

165

-

φ4.83

φ6.35

19

25.6

26.2

41.2

44

52.4

80

G1

34

44

50

65

70

80

83

95

102.7

110

130

153

160

185

213.2

241

261

291

341

396

446

504

554

609

400

318

G2

4.5

24

34

40

55

57.2

69.9

70

85

88.9

100

120

139.7

150

175

200.5

201

225

248.5

249

275

325

380

430

480

530

585

305

387.2

H

-

17.3

19.8

22.4

10.4

14.2

10.7

14.7

6

7.7

8.4

9

13

17

12.8

16.5

19.2

14

16

15.5

10.5

18.5

8.9

10

12

12.7

15

17.4

17.5

19.9

20

22

22.3

24.6

22.6

25

25.6

29

32

32.2

35

36

37

33

34.2

38

40

41

45.4

44

46

46.9

47

50

50.2

51

60

88

94

95

98

99

100

102

109

110

112

134

139

145

163

164

165

213

246

92

107

130

151

185

125

143

18

181

H1

19.9

18.5

10.4

14

15.7

10

18

10.5

16

17.4

17.5

20

8

30

15.5

40

50

55.1

-

55.6

57.6

59.2

65.6

67.6

69.2

70.9

74.7

76

76.3

78

79.5

80

80.9

84.7

85.1

86.3

89.5

91

95

95.1

95.8

97

100

105.8

106

116

12.7

12

22.6

24.6

27.1

33.8

29.3

21.6

H2

38

8

10

12

16

40

43

44

48

48.3

49

49.2

50

50.2

50.6

51

53

53.7

54

55.6

56

-

59

60

61

63

64

66

20.5

19

H3

30

40

50

I

2.5

2.6

19.2

31.2

42

J

-

1.6

2.4

15.8

22.4

31.8

44.5

21

23

30

33

47

48

59

68

77

80

83

92

98

107

114

118

127

139

144

154

162

167

183

227

245

275

294

K

35

49

61.5

80

90

109

134

160

220

268

-

31.3

32.9

3.96~1.57

5.16~2.39

211

25

L

2.3

2.5

2.4

3.15

10

13.2

12

12.5

13

15

15.5

16

17

17.8

18

18.2

18.3

18.65

18.8

19

19.05

19.1

19.8

20

20.3

20.5

20.6

21

21.15

21.336

22

23

23.1

23.5

23.836

24.6

24.8

25

25.1

25.4

25.6

25.8

26

26.8

26.924

27

27.3

27.5

27.6

27.7

28

28.124

28.448

28.5

28.7

29

29.2

29.3

29.4

29.424

30

29.5

30.8

30.948

31

31.5

31.75

31.8

32

32.7

33

33.3

33.35

33.4

33.5

33.9

34

34.2

34.3

34.8

34.9

35

35.3

35.4

35.5

35.6

35.8

35.9

36

36.1

36.5

36.536

36.6

36.8

37

37.1

37.4

37.5

37.6

37.8

38

38.1

38.2

38.3

38.4

38.5

38.6

38.8

38.9

39

39.1

39.3

39.5

39.6

39.8

39.9

39.036

40

40.1

40.3

40.5

40.6

40.9

41

41.1

41.2

41.28

41.3

41.4

41.6

41.8

41.9

42

42.1

42.2

42.3

42.4

42.5

42.7

42.9

43

43.186

43.2

43.3

43.4

43.5

43.6

43.7

43.8

43.9

44

44.2

44.386

44.5

44.7

45

44.8

45.2

45.3

45.512

45.686

45.7

46

46.2

46.3

46.4

46.712

46.736

46.8

47

47.2

47.3

47.386

47.5

47.6

47.63

47.7

47.8

48

48.2

48.5

48.7

49

49.2

49.386

49.5

49.7

49.6

49.8

49.9

50

50.1

50.4

50.6

50.5

50.8

51

51.5

51.736

51.8

52

52.3

52.5

52.8

53

53.3

54

54.1

54.2

54.3

54.6

54.8

55

55.1

55.2

55.4

55.5

55.8

56

57

58

(58)

58.1

59

60

61

62

62.2

63

64

64.5

64.8

65

65.8

66

67

67.6

68

68.5

69

69.3

69.5

70

70.7

71

72

73.7

74

75

76

78

80

81

82

82.5

84

85

85.3

85.7

86

88

88.9

90

91

91.4

92

92.5

93

94

95

96

96.4

96.5

98

100

101

101.4

102

102.4

103.2

104.7

104

105

106

106.9

107

108

108.4

109.5

110

110.7

111

112

114

115

118.5

120

121

122

124

125

126

127

130

131

132

133.3

135

135.6

137

139.7

140

141

144

146

147

148

148.8

149

149.9

150

152

153

156

156.2

156.7

158

160

162

164

165

166

167

168

170

174.6

175

176

178

180

182

190

196

199

199.2

200

202

203

205

206

210

216

220

221

222

225

229

230

236

240

246

250

252

270

276

280

296

300

304

334

356

400

406

416

420

500

508

600

610

750

900

914

990

1000

1500

2000

2500

3000

4000

4500

5000

10000

~30.25

~49.22

103～111

106～109

111～114

120～139

122〜141

128.4~148.2

128〜147

152 m

161～201

167.5~198.5

167〜198

190.5~235.5

190〜235

227～268

706

23.8

24

44.4

101.6

120.6

158.7

82.3

128.5

165.1

177.8

209.8

273.3

104.9

177.7

51.7

62.5

21.5

76.2

-

75.5~82.5

213

177

145

212

11.5

1.85

45.9

123

103

108～111

100~110

97~107

117~134

143~167

132~146

134~148

164~189

209~243

76.5

119

138

186

134

480

97

L1

74

92

72

4

4.5

91.4

85.3

41

52.5

40

50

15

45

16

10

20

31

49

14

0.85

21.6

84

25

36.8

37.5

48

52

54

55

57.8

58.2

60

62

63

64.1

64.5

65

67.3

70

75

80

82

85

86

90

95

96.5

98

100

102

103

104.1

105

109.2

107

110

111

113

115

116

117

120

121.9

122

123

124

125

126

130

131

132

133

135

137

138

140

145

147

150

148

149.4

151

153

154

155

156.7

157

159

159.9

160

162.6

165

167

166

170

172

173.4

179.4

180

190

200

204

206

210

220

348

353

357

363

365

367

370

373

380

381

382

383

387

388

390

397

398

400

401

403

407

417

420

423.4

429.4

430

440

450

454

456

460

470

598

603

607

613

615

617

620

623

630

631

632

633

637

638

640

647

648

650

651

653

657

667

670

673.4

679.4

680

690

700

704

706

710

720

848

853

857

863

865

867

870

873

880

881

882

883

887

888

897

890

898

900

901

903

907

917

920

923.4

929.4

930

940

950

954

956

960

970

1348

1353

1357

1363

1365

1367

1370

1373

1380

1381

1382

1383

1387

1388

1390

1397

1398

1400

1401

1403

1407

1420

1423.4

1429.4

1430

1440

1450

1454

1460

1470

1848

1853

1856

1857

1863

1865

1867

1870

1873

1880

1881

1882

1883

1887

1888

1890

1897

1898

1900

1901

1903

1907

1917

1920

1923.4

1929.4

1930

1940

1950

1954

1960

1970

2348

2353

2357

2363

2365

2367

2370

2373

2380

2381

2382

2383

2387

2388

2390

2397

2398

2400

2401

2403

2407

2417

2420

2423.4

2429.4

2430

2440

2450

2454

2460

2470

2848

2857

2853

2863

2865

2867

2870

2873

2880

2881

2882

2883

2887

2888

2890

2897

2898

2900

2901

2903

2907

2917

2920

2923.4

2929

2929.4

293

2940

2950

2954

2960

2970

30～70

50～120

40～62

50～130

50～90

50～170

50～350

50～150

50～250

50～450

50～550

185

50～75

50～100

60～360

80～580

80～780

47.7

54.2

L2

73.2

69

94

73

56

81

80.9

72

91

87

55

65

10

20

38

40

48

51.4

52

52.4

54

54.2

56.4

56.8

57

57.3

59

59.4

60

61

61.2

63

64

64.1

66

66.5

67

71.1

71.7

73.5

74

75

76.3

78.3

80

50.8

76.2

79.3

80.2

83.4

82

84

85

85.8

88

88.6

86

90.8

88.9

91.6

92.5

92.6

95

95.4

95.7

97.4

97.5

98.4

101

101.6

102.5

103

103.6

105

108

106

110

127

135

140

147

190

-

96

98.3

103.1

103.9

109

114

117.3

193

195

264

50

70

79

89

90

93

100

104

168

198

261

268

284

287

291

160

170

180

200

54.5

77

78

112

102

121

196

202

266

274

210

270

92

186

194

175

253

190.5

447.2

333

625

654

120

115

126

156

206

136

182

138

150

125

184

152

107.5

150.5

300

500

700

861

51

L3

-

100.5 ～ 108.5

105.5 ～ 113.5

108.5 ～ 116.5

117 ～ 125

118 ～ 126

120.5 ～ 128.5

125.5 ～ 133.5

137 ～ 145

138 ～ 147

63 ～ 71

71 ～ 79

88.5 ～ 96.5

M

38

44

-

45

50

64

68

24.2

26.6

29

31.3

33.7

36.9

43.3

14.27

19.05

20.62

M4

M6

M8

M (depth)

6-M4(7.5)

6-M6(12.7)

8-M8(17.5)

16-M8(9)

6-M4(10)

6-M4(6)

6-M4(8)

6-M4(9)

6-M6(10)

6-M6(8)

8-M8(10)

16-M8(10)

16-M8(20)

20-M8(10)

20-M8(22)

6-M5(8)

4-M5(8)

8-M8(11)

16-M8(12)

8-M8(12)

20-M8(12)

N

23.01

29.36

32.56

35.71

38.91

45.26

55

58

60

66

70

81

85

99

105

111

112

120

128

155

160

165

180

185

192

196

205

210

235

250

256

300

310

350

355

360

-

P

3.1

3.7

R

23.01

26.97

29.36

31.75

34.92

39.67

95.3

114.3

152.4

48

56

72.4

73

R min.

-

98

S

30.18

34.92

38.1

41.28

44.45

50.8

3.5

5

T

15.5

3.05

3.73

0.5

0.8

9.2

9.9

9.3

10.3

3.5

3.53

3.9

3.2

5.1

5.3

17.3

11.9

5

7

9

2

3

4

6

7.5

8

10

12

12.7

13

15

16

17

17.4

17.5

18.5

18

19.1

20

21

22

23.9

24

25

25.9

28

28.5

36

3.6

7.6

22.7

29.5

32

14

-

20.6

19.8

3.1

20.1

2.85

24.7

T (glass thickness)

3.5

1

1.5

1.6

1.7

2

2.5

2.8

3

3.3

4

4.5

5

5.5

6

6.4

6.5

7

8

9.4

11

12

13

15

16

22

25

30

40

45

50

2.2

3.2

2.4

3.8

1+7

2.5+7

3+7

4+7

6+7

6.5+7

9.5

8+7

T1

2.5

22

3

7

8.5

4

5

5.3

5.6

6

7.5

8

8.4

9.5

10

11

11.5

12

12.5

12.7

13.5

19

21

24

25

4.45

17.5

20

9

2.2

2.3

6.5

0

10.7

7.6

9.4

12.4

T2

-

8

10

12

21

1.5

2

2.5

3

5.7

6

6.6

7

7.5

7.9

8.7

11

12.7

17.5

20

22

25

3.1

5

12.4

4.8

0

V (effective diameter)

31

62.8

35.6

15.2

22.9

47.8

24.1

10.9

36

15

49

6

6.5

7

9.5

10

12

15.7

16

17

20

24

30

32

33

35

37

38

40

45

50.3

55

60

63

64

65

68

68.3

70

78

83

89

90

91

93

98

98.6

99

100

102

127

130

136

136.7

47.5

137

144.5

145

148

150

152

153

197

197.6

198

152.4

112

34.8

60.2

X

-

20

25

30

38

40

45

50

52

60

63

65

70

80

82

86

88

90

98

105

108

110

118

135

138

167

178

208

210

254

P.C.D

8

10

14

15

16

18

20

21

22

23

24

25

26

27

29

31

35

37

43

19

30

26.1

29.1

33.1

35.8

39.4

38.1

22.4

19.1

28

32

13

42.3

48

48.9

50

58.7

60

62

72.4

70

82.55

85

92.1

92.2

100

102.4

110

120

125

130.2

130.3

135

145

160

181

185

200

210

231.8

260

270

284

310

320

325.4

370

420

480

535

585

640

VF:85＿ICF:58.7

VF:100＿ICF:58.7

VG:85＿ICF:58.7

VG:100＿ICF:58.7

Large-diameter: 70_ small diam

Large-diameter: 85_ small diam

Large-diameter: 85_ small diam

Large-diameter: 100_ small dia

Large-diameter: 100_ small dia

Large-diameter: 100_ small dia

-

90

96

75

105

41.3

Large caliber:120 ___Small cal

Large caliber:120 ___Small cal

Large caliber:120 ___Small cal

Large caliber:120 ___Small cal

Large caliber:135 ___Small cal

Large caliber:135 ___Small cal

Large caliber:135 ___Small cal

Large caliber:135 ___Small cal

Large caliber:135 ___Small cal

Large caliber:160 ___Small cal

Large caliber:160___Small cali

Large caliber:160 ___Small cal

Large caliber:160 ___Small cal

Large caliber:160 ___Small cal

Large caliber:185 ___Small cal

Large caliber:185 ___Small cal

Large caliber:185 ___Small cal

Large caliber:185 ___Small cal

Large caliber:185 ___Small cal

Large caliber:185 ___Small cal

Large caliber:210 ___Small cal

Large caliber:210 ___Small cal

Large caliber:210 ___ Small ca

Large caliber:210 ___Small cal

Large caliber:210 ___Small cal

Large caliber:210_Small calibe

Large caliber:210_Small calibe

14.2

395

480.1

Air hole

Without air holes

Yes side groove

There is a center hole

Yes (Washer)

None (Washer)

Hole diameter(depth)

φ8

φ8.4

φ4.4

VF bolt: Φ10_ICF bolt: M6 (10)

VG bolt:Φ10_ICF bolt: M6 (10)

φ5.5

φ2.2

VF bolt:M8_ICF bolt:M6(depth 8

VG bolt:M8_ICF bolt:M6(depth:8

φ4.3

φ5.3

φ10.5

φ6.73

φ4.5

φ6

φ6.8

φ7

φ8.5

φ9

φ10

φ11

φ12

φ15

φ19

M4

M6

M8

Large-diameter bolt: M8 (10) _

Large-diameter bolt: Φ10 Kiri

M5

M10

Large diameter bolt: M10(12)_

Large diameter bolt: M12(12)_

大口径ボルト:M10(10)＿小口径ボルト:M8(10)

φ8.43

-

φ14

Number of holes

-

32

VF bolt: 4_ICF Bolt: 6

VG bolt: 4_ICF Bolt: 6

10

30

4

6

8

12

16

20

24

Large-diameter bolt: 4_ small-

Large diameter bolt: 8_Small d

大口径ボルト:8＿小口径ボルト:4

Connection type

SHV Connectors

BNC connector

MHV Connectors

BNC Connector/Plug

SHV Connector/Plug

SMA plug

For the air-side plug-fitting

The atmosphere-side plug-fitti

For the vacuum side plug fitti

Vacuum side and the atmosphere

MHV Connector/Plug

SHV plug

N plug

MHV plug

BNC plug

LM plug

BNC/SHV Plug

BNC/MHV plug

BNC/SMA plug

LAN

HDMI

USB

microdot plug

RH18/PVC19

BURNDY

QD1KJBA

MS

OMEGA™

MS（MIL-C5015）

MS (Mil-C-26482)

Micro D-Sub (MIL-DTL-83513)

D-Sub(MIL-C-24308)

5 kV - 3 A5 kV - 22 A

3 kV - 35 A silicon plug conne

5 kV - 110 A oxygen-free coppe

5 kV - 110 A silicon plug conn

3 kV - 35 A free copper (+ Ni

RH25/PVC25

RH38/PVC38

SMA905

FC/PC

USB2.0

USB3.0

USB3.1

Metal - Metal

Glass - Glass

BNC plug/SHV connector

BNC connector/SHV plug

BNC connector/SHV connector

BNC plug/SMA plug

BNC connector/SMA connector

BNC connector/SMA plug

BNC plug/SMA connector

type

BNC cable

MHV cable

N cable

SHV cable

SMA cable

Ground shield

Spring washer

ﾌﾗﾝｼﾞ12ﾎﾟｲﾝﾄ頭ﾎﾞﾙﾄ

Floating shield

Grooved Low Head bolt

Grooved Nabeatama bolt

Grooved cheese head bolt

Grooved fill Stars head bolt

Set screw

Cross hole with low head bolt

Cross hole with Nabeatama bolt

Flat washer

Hexagon nut

Hexagon socket head shoulder b

Hexagon socket low head bolt

Hexagon socket head button bol

Hexagon socket head bolt

Rokkakuatama bolt

LM cable

Crimp

push-on

barrel

Classification

100

O-ring

Peripheral components

nut

Flanged terminal

bolt

Washer

For glass-to-glass connection

For glass-to-metal connection

For metal-to-metal connection

For both glass and metal

pin

Socket

Manual

Pneumatic (single-acting)

Pneumatic (double-acting)

in general

one touch

motor

both side VF

both side VG

one side VF/VG

The contents of goods

Plug and socket contacts inclu

Assembled set

Only flanged terminal

O-ring only

With center ring

white

Colors: white, black, gray, gr

The number of terminals

14

15

-

1

2

3

4

5

6

7

8

9

10

11

12

13

The number of electrode

1

2

3

1(Coax)+4

4

5

6

7

8

8(4+4)

9

10

11

12

12(8+4)

13

14

15

16(8+8)

16

17

18

18(9+9)

19

20

21

22

24

24(9+15)

25

30

30(15+15)

31

32

37

40

40(15+25)

41

48

50

50(25+25)

51

72(9x8)

74

74(37+37)

100

100(50+50)

Total number of electrodes

18

24

30

27

16

8

12

40

50

72

74

100

Pairs of Thermocouple

3

1

2

4

6

7

5

10

11

15

24

12

Feedthrough

3 kV / 35 A

5 kV / 110 A

5 kV / 124 A

5 kV / 145 A

5 kV / 22 A

5 kV / 3 A

5 kV / 73 A

5 kV / 476 A

5 kV / 808 A

6 kV / 145 A

8 kV

10 kV

10 kV / 22 A

10 kV / 73 A

10 kV / 124 A

10 kV / 145 A

10 kV / 476 A

10 kV / 808 A

25 kV / 3 A

25 kV / 50 A

30kV / 3A

30 kV / 50 A

Graded index

Step-index

Step-Index,MultimodeFiber Opti

Electric current / 1 pc.

2 A

Milli

6.5 A

4.8 A

3.6 A

1 A

3 A

6.7 A

5 A

7 A

7.5 A

8 A

9 A

10 A

11 A

12A

13 A

14.2 A

15 A

14.7 A

16.5 A

20 A

22 A

23 A

25 A

26 A

28 A

30 A

33 A

35 A

40 A

50 A

55 A

56 A

60 A

70 A

73 A

75 A

92 A

100 A

110 A

124 A

145 A

150 A

476 A

600 A

800 A

808 A

1000 A

N/A

Total current/1 terminal

14.6

9A

15A

30A

9.9 A

10.7 A

11.4 A

12.8 A

13.2 A

13.3 A

14.4 A

14.5 A

18 A

22.2 A

28.8 A

33.1 A

38 A

44 A

44.5 A

48 A

60 A

96 A

Milli

Withstand voltage: DC

13 V

25 V

20 V

15 V

Milli

30 V

150 V

300 V

500 V

600 V

700 V

1 kV

750 V

1.5 kV

1.8 kV

2 kV

2.3 kV

3 kV

2.5 kV

5 kV

2.7 kV

2.8 kV

2.8 kV (reference)

6 kV

7.5 kV

8 kV

10 kV

12 kV

13 kV

14 kV

20 kV

24 kV

25 kV

30 kV

35 kV

40 kV

60 kV

65 kV

100kV

Insulation resistance value

-

10⁹ ohm

frequency

10 MHz

100 MHz

200 MHz

1300 MHz

4000 MHz

6500 MHz

-

15 GHz (reference value)

7.5 GHz

Frequency: GHz

15

Impedance

non-contact

50 Ω

Core diameter (μm)

62.5

65

100

200

400

600

1000

-

125/9

125/50

125

Fiber

石英

Fiber type

UV/VIS

VIS/NIR

Wavelength: nm

200 ～ 800

400 ～ 2200

850 & 1300

1300

Transmission loss: dB

<-1dB below

-0.8 ～ -2.0

≦3.0 dB (for 850), ≧0.8 dB (fo

Applicable wire size

2.2 MAX

1.7 MAX.

3.5 MAX.

0.8 MAX.

0.8 MAX.(#20)

0.9 MAX.

1.0 MAX.

1.1 MAX.

1.3 MAX.

1.4 MAX.

1.5 MAX.

1.6 MAX.

1.8 MAX.

2.4 MAX.

3 MAX.

3.4 MAX.

6.6 MAX.

AWG #

14

20

21

22

22 / 24

24

26

28

32

Wire / cable diameter

(K type) 0.5sq (current introd

(K type) φ0.32 (current introd

0.5sq

(K type) φ0.32 (current induct

φ 0.32

φ 0.36

φ 0.65

NA (Numerical Aperture)

0.22±0.02 or 24.8°

0.27±0.02

0.22 ± 0.02

Connection diameter (φ)

1/4 inch

3/8 inch

1/8 inch

1/2 inch

3/4 inch

1/1 inch

1-1/4inch

1-1/2inch

2inch

2 mm

3 mm

4 mm

5 mm

6 mm

8 mm

10 mm

12 mm

15 mm

18 mm

14～27

11～23

17～32

19～38

21～38

21～45

27～51

33～57

40～64

50～66

68～86

87～113

Fixed bending radius (R)

10

15

25

30

35

60

90

50

70

80

40

100

120

170

220

240

300

350

Apply pipe outer diameter

6.35

9.5

12.7

17.3

19.1

27.2

34

38

41

42.7

48.6

60.5

63.5

76.3

89.1

101.6

114.3

139.8

153

165.2

203

216.3

267.4

318.5

355.6

406.4

457.2

508

558.8

15.8

254

69.9

305

Applicable Bolt

M8X25L

M4X12L

M4X15L

M6X22L

M8X30L

M8X35L

M5X18L

The number of ports

1

2

3

4

5

6

7

8

Quantity

25

1

2

5

10

100

100g (about 1100 pieces)

100g (about 140 pieces)

100g (about 2550 pieces)

100g (about 280 pieces)

100g (about 500)

20

300 pcs (50 pcs x 6 types)

450g

Screw call

M4

M5

M6

M8

M10

M12

M16

O-ring standard

V100

V120

V150

V175

V225

V24

V275

V325

V34

V380

V40

V430

V480

V530

V55

V585

V70

V85

-

Bellows plate thickness

0.1

0.15

Operating range

56-64

59-70

-

51.7～54.3

52.4～55.6

52.2～57.8

53.4～56.6

53.7～56.3

54.4～57.6

53.3～58.7

54.2～59.8

55.2～60.8

55.3～60.7

55.4～58.6

56.2～61.8

58.2～63.8

58.3～63.7

58.4～61.6

59.2～64.8

59.3～64.7

53.2～58.8

59.4～62.6

60.2～65.8

61.7～64.3

63.3～68.7

62.3～67.7

63.7～66.3

67-73

62.2～67.8

66.3～71.7

74-90

78-100

85-100

85-109

88-112

89-111

90-120

91-118

92-128

95-124

95-125

96-111

96-124

100-130

110-150

110-140

101-129

119.5～126.5

Spring constant (N / mm)

-

2.4

2.6

3.5

3.6

3.8

3.9

4

4.7

4.8

5.2

5.3

6

6.2

6.9

9.2

9.8

11.9

26.2

31.8

41.1

47.8

60.5

The number of tube

1

2

Fixed/Rotatable

blank

Blank tap

pierced

Perforated tap

Fixed/rotating

rotation

fix

Double-sided fixation

one-sided rotation

Main materials

SUS 304L

nylon

stainless steel

glass-ceramic

MoS2 + mineral oil

PTFE

SUS 304

SUS 316L

Aluminum

Alumina ceramic

Gum

Steatite ceramic

Nitrile

Polyurethane

Soft vinyl chloride

Thermoplastic elastomer (TPE)

Aluminum/polycarbonate

SUS 316 (double-acting), SUS31

SUS304(L type), SUS304L(Y,Z ty

O-ring

Viton ®

FPM

screw

SUS

electrode

SUS 304

Alumel ®

Chromel ® / alumel ®

Chromel ® / alumel ® / oxygen-

Kovar ®

Copper / constantan ®

Beryllium copper alloy

Oxygen-free copper

Oxygen-free copper + Ni platin

SUS 316L

beryllium copper

molybdenum (Mo)

Stainless steel (gold plated)

Tungsten-rhenium alloys

Clomel® / Constantan®

Iron / Constantan®

Platinum Rhodium Alloy

Platinum Rhodium Alloy / Plati

Nike Rosil / Nike Rosil

stainless steel

contact

Copper Alloy + Silver Plating

beryllium copper

(K type) Chromel ®, alumel ® (

Alumel ®

Chromel ®

Chromel ®, alumel ®

Constantin ®

銅

Beryllium copper + gold-plated

Phosphor bronze + nickel-plate

Copper, constantan ®

Copper alloy + gold-plated

brass

Iron

Beryllium copper + rhodium pla

Cable sheathing

NONE

(K type) glass (current lead)

PEEK®

Kapton ®

Glass

Steatite ceramic

Teflon ®

vinyl

polyethylene

polyimide

FEP

ETFE

PTFE

FTPE

conductor

-

Ag

Silver-plated soft copper wire

stainless steel wire

Silver wire

(K type) Chromel ®, alumel ® (

(K type) Chromel ®, alumel ®Ag

Ag-plated copper wire

Ni plating annealed copper wir

Chromel ®, alumel ®

Tin-plated copper wire

Copper, constantan ®

Copper wire

Copper covered steel wire

Soft copper wire

copper wire

Alumel

The outer ring

SUS 304

SUS 316L

Aluminum

Teflon ®

The inner ring

SUS 304

SUS 316L

Aluminum

Teflon ®

Seal / gasket material

Oxygen-free copper

Oxygen-free copper + gold-plat

Oxygen-free copper + silver-pl

Oxygen-free copper + annealed

Aluminum

nickel

CALREZ® 1050

Aluminum A1050

Viton ®

Kalrez ®4079

Aluminum A5052

SUS

SUS + Viton

SUS + Nitrile

FEP

Nitrile

SUS + Carlez®4079

PTFE

WC Series Superabrasives/Cu Al

FKM

Mesh size

#70(Wire diameter:0.14, Cleara

#8 (Wire diameter: 0.57, Clear

#8 (Wire diameter: 0.6, Cleara

#10 (Wire diameter: 0.5, Clear

#50 (Wire diameter: 0.18, Clea

#100(Wire diameter:0.1, Cleara

#150 (Wire diameter:0.06, Clea

Fittings

SUS 304

SUS 316

SUS 316L

Flange material

SUS 304

SUS 304L

SUS 316

SUS 316L

SUS 329

SUS（1.4462）

SUS（329J3L）

SUS316L/SUS304(CeFlX®/ICF)

acrylic

Aluminum（A5052)

SUS316LN

aluminum (Al)

Duran® borosilicate glass

Duran® (borosilicate glass)

Teflon ® (GRP)

Titanium

Quartz

Hastelloy C22

SUS304（NW only SUS316)

SUS304(L type), SUS314L(Others

shell

Aluminum Alloy + Zinc Plating

Brass + Silver Plating

ABS resin + nickel-plated / st

ABS resin + nickel base chromi

SUS 303

SUS 304

SUS 304+ gold-plated

Aluminum alloy

Glass fiber filled nylon

Brass + chrome plating

Brass + nickel-plated

SUS 304+Gold plating / SUS 304

A5052 + Ni plating

brass

Bush

Synthetic rubber

body

SUS 304

SUS 304L

SUS 316

aluminum (Al)

Flexible / bellows

SUS

AM-350

SUS 316L

SUS 321

Teflon ®

Hastelloy C22

blade

-

PEEK®

SUS 304

PVC

window

sapphire

石英

Flint glass only

Borosilicate glass

Borosilicate glass + lead glas

Tempered glass

Synthetic quartz

Calcium fluoride

Magnesium fluoride

Fused quartz

germanium

Zinc selenide

SUS（Blank

barium fluoride (BaF2)

Finish

single-sided mirror polishing

Optical

standard

both-sided mirror polishing

BA tube

EP tube

Bonnet seal

Viton ®

FKM(Viton®)

FKM

oxygen-free copper

handle

Aluminum 2024-T4

phenol resin

Tubes / Pipes

SUS

SUS 304

SUS 316

SUS 316L

Oxygen-free copper

Hastelloy C22

Link

FEP

FRP

Aluminum

Forged aluminum + Teflon ® coa

stainless

Forged aluminum

strap

SUS 316L

stainless

Steel nickel plate

Knob / nut

FRP

FRP (knob)

NW80 ~ 125FRP (knob) NW160 ~ 2

stainless

Stainless steel (nut)

Stainless steel (bolt)

Clamping screw

NW80 ~ 125 stainless NW160 ~ 2

SUS 316L

stainless

Stainless / M5

Stainless / M6

Clamping bolt

FRP

Aluminum

stainless

The color of the link

黒色

茶色

白色

knob color

黒色

茶色

white

cap

Kovar ®

sleeve

SUS 304

SUS 430

Aluminum

Kovar ®

Polyimide

SUS304L

SUS 329

70-30 CuNi

SUS04

Insulator

Epoxy

FEP

PBT resin UL (94V-0)

PE

PEEK®

PTFE

TFE

XLPE

Alumina ceramic

Glass

Glass filled phenolic resin (U

Glass filled phenolic resin (U

Glass filled phenolic resin (U

Glass filled phenolic resin (U

Glass filled phenolic resin (U

Glass filled phenolic resin (U

ceramic

Borosilicate glass

Synthetic resins

Molded silicon

Plug: PTFE, Cable: XPE

The inner surface processing

電解研磨

Buff 400 (equivalent to Ra 1.0

Machined (Ra3.2 equivalent)

GBB Processing

Ra ≤ 0.8μm

Ra0.3~0.4μm

nashi (Pyrus pyrifolia, esp. v

Ra 3.0-1.6μm (double acting),

Fiber

石英

magnet

Samarium cobalt

mass

78

120

159

170

175

220

330

430

590

850

1000

-

3.0 Kg

The lowest temperature

-270℃

-271℃

-269℃

-180℃

-100℃

-250℃

-200℃

-196℃

-195℃

-75℃

-65℃

-55℃

-50℃

-45℃

-40℃

-30℃

-20℃

-10℃

-5℃

10℃

60℃

65℃

100℃

105℃

125℃

150℃

200℃

250℃

260℃

280℃

300℃

315℃

350℃

450℃

1000℃

-

Maximum temperature

-271℃

-50℃

-45℃

-40℃

-55℃

-30℃

-20℃

-10℃

0℃

60℃

65℃

80℃

85℃

100℃

-65℃

-75℃

-196℃

-200℃

-270℃

105℃

125℃

130℃

140℃

150℃

150°C (body), 80°C (overall)

165℃

200℃

200°C (body), 80°C (overall)

250℃

300℃

260℃

280℃

315℃

350℃

400℃

450℃

1000℃

70℃

120℃

Use temperature (Supplement)

80

(Guaranteed value) 150 ℃ (desi

It is within 12 hours allowed

To within 5 hours allowed up t

Reference-voltage value (MPa)

1.5

2.3

2.7

3.4

5.3

6.1

8.2

1

0.4

-0.1～0.4

-0.1～0.3

-0.1～0.2

Available pressure

600 kpa~ 1.33x10-5 kpa

0.12MPa ～10-6 Pa

10-6 Pa ～0.5Mpa

13.3 Pa

Atmospheric pressure ~ 10

10^-2 Pa～10^-6 Pa

10-9 Pa

Atmospheric pressure ~ 10

Atmospheric pressure ~ 10

Atmospheric pressure ~ 10

Atmospheric pressure ~ 10

Atmospheric pressure ~ 10

Leak rate

<1.3x10-10Pa･㎥/sec

<1.3x10-4Pa･㎥/sec

<1.3x10-7Pa･ℓ/sec

<1.3x10-7Pa･㎥/sec

<1.3x10-9Pa･㎥/sec

<5.5x10-9Pa･㎥/sec

<1.0x10-8Pa･㎥/sec

<2x10-9Pa･㎥/sec

<1x10-8Pa･㎥/sec

<5x10-9Pa･㎥/sec

<1x10-7Pa･ℓ/sec

<1x10-8Pa･㎥/sec

<1.3x10-8mbar･l/sec

<1.3x10-11Pa･㎥/sec

<1.0x10-9Pa･㎥/sec

Recommended plate thickness

-

6~22

Recommended hole diameter

25±0.2

-

Corresponding seal

Aluminum / oxygen-free copper

Elastomer seal

Elastomeric seal / metal seal

Elastomer seal only

Dedicated elastomeric seal

Number of links

3

4

5

6

7

10

-

Expansion and contraction of the

-

6

7

10

17

18

20

Tightening torque

1 Nm±20%

1.5 Nm±20%

2 Nm±20%

2.5 Nm±20%

3.5 Nm±20%

4 Nm±20%

5 Nm±20%

7 Nm±20%

9.5 Nm±20%

12 Nm±20%

Tightening torque - elastomer

1 Nm±20%

1.5 Nm±20%

2 Nm±20%

2.5 Nm±20%

3.5 Nm±20%

4 Nm±20%

5 Nm±20%

7 Nm±20%

9.5 Nm±20%

12 Nm±20%

-

Tightening torque - Aluminum

-

6 Nm±20%

2 Nm±20%

2.5 Nm±20%

3 Nm±20%

4.5 Nm±20%

9 Nm±20%

18 Nm±20%

27 Nm±20%

36 Nm±20%

Tightening torque - metal

2.5 Nm±20%

3 Nm±20%

4.5 Nm±20%

5 Nm±20%

8.5 Nm±20%

10 Nm±20%

12.5 Nm±20%

18 Nm±20%

24 Nm±20%

30 Nm±20%

-

Tightening torque - oxygen-free

-

10 Nm±20%

3.5 Nm±20%

5 Nm±20%

6 Nm±20%

8.5 Nm±20%

18 Nm±20%

36 Nm±20%

54 Nm±20%

72 Nm±20%

84 Nm±20%

Tightening torque - nickel

6 Nm±20%

8 Nm±20%

10 Nm±20%

14 Nm±20%

30 Nm±20%

60 Nm±20%

90 Nm±20%

120 Nm±20%

140 Nm±20%

-

18 Nm±20%

Bolt size

M6

# 8-32 (ICF34 tap hole)

M10

M14

M8

Expansion and contraction of the

5

6

8

-

Bending angle [± °]

-

20

25

30

METHOD tightening

NW80 ~ 125 fingertight NW160 ~

Torque Wrench

Torque wrench (for a nominal 1

Hand tighten

Hand tightening / torque wrenc

Pressurization

△

○

NW63 following ○, NW80 more ✖︎

-

Non-magnetic

○

Radiation resistance

○

chemical resistance

△

○

◎

NW80～125△/NW160～250○

Clean Room

△

○

◎

NW80～125○/NW160～250△

Insulation

○

Classification (ion pump)

AC adapter

Ion pump

set

mobile battery

One-touch cable

Power / display unit

-

Exhaust rate (L / sec)

0.5(窒素)

1(窒素)

2(窒素)

3(窒素)

4(窒素)

5(窒素)

0.5

1

2

3

4

5

6(窒素)

Long-life cathode

Yes

None

Ion pump body

12E5LTR

4E3L

4E3LT

9E4L

B-0861T

B-0862M

B-0862T

C-1625M

C-1765M

-

Power / display unit

-

C-1766D

C-1766Q

D-0585

HVPS-625N

R-1800

AC adapter

C-0887

C-0888

-

Baking possible temperature (the

100 ℃

Baking possible temperature (pow

350 ℃

The input power voltage

-

100/240 V AC

12±0.1％ V DC

14～20 V DC

24 VDC (±10%) @0.5V pk-pk max.

The input power current

-

250～700 mA

45～200 mA

450 mA

500 mA

Input power frequency

50/60 Hz

-

The input power power

-

0.6～2.5 W

3～8.5 W

80 W max. (operation of valve

Battery backup for the input pow

-

12±5% V DC

Battery backup for input power c

-

30～150 mA

Battery backup for the input pow

-

0.25～2 W

Output power voltage

+3500±20%

12 V DC

15 V DC

-

Output power voltage (short circ

-

0 to 5 and 8 V DC

Output 1: 0 to 5, output 2: 0

Output Power current

1000 mA

800 mA

-

Output power current (short circ

-

1 mA

5 mA

Output Power power

0.6 W max.

1.1 W max.

-

Environmental Operating temperat

-

0～60 ℃

Environmental humidity range (no

0～80 ％

-

Analog output signal recommended

-

>1 MΩ

>100 KΩ

Bootable pressure

1.3x10-2

-

Minimum order

30

25

37

40

50

60

70

80

90

100 pcs.

110

120

130

140

150

180

200

280

360個

420

Processing method

Nickel coat

Silver chromate coat

Nothing

Precision cleaned

Tungsten Court

Nickel coat

Pre-baking

Gold-coated

Silver-coated

電解研磨

Molybdenum disulfide coat

Inch / mm

inch

Miri

-

size

1/2-13

1/4-20

1/4-28

3/8-16

3/8-24

1/2

1/4

3/8

5/16

#10

#10-24

#10-32

#2

#2-56

#4

#4-40

#5

#5-40

#6

#6-32

#8

#8-32

5/16-18

5/16-24

M10

M12

M16

M2

M2.5

M3

M4

M5

M6

M8

-

Material

-

SUS 304

Fluororubber, acrylic, etc.

oxygen-free copper

nylon

SUS 18-8

SUS 18-8 RAW

SUS 303

SUS 316

SUS A2

SUS A2 RAW

SUS A4

SUS A4 RAW

Inside diameter (mm)

0.7366

1.0668

1.2446

1.4224

1.778

2.0574

2.1

2.2

2.2606

2.3876

2.5654

2.6

2.7

2.8448

2.8956

2.921

3.0734

3.1

3.2

3.2512

3.6322

3.683

3.7592

4.1

4.2926

4.3

4.3434

4.4196

4.445

4.4704

4.953

5.1

5.1308

5.2324

5.2832

5.3

5.9436

6.0198

6.0706

6.1

6.4

6.477

6.6802

7.5184

7.5946

7.6454

8.1

8.3312

8.4

8.4

8.5

9.1186

9.1948

9.2456

9.906

9.9822

10.2

10.4648

10.5

10.6934

10.7696

10.8204

12.065

12.2

12.2936

12.3698

12.4206

13.0

13.081

13.2842

13.6398

13.8684

13.9446

13.9954

15.24

15.4686

15.5448

15.8

15.5956

16.8148

17.0434

17.1196

17.1704

18.415

18.6436

18.7198

18.7706

19.9898

20.2184

20.2946

20.3454

21.59

21.8186

21.8948

21.9456

23.1648

23.3934

23.4696

23.5204

24.765

24.9936

25.0698

25.1206

26.3398

26.5684

26.6446

26.6954

27.94

28.1686

28.2448

28.2956

29.5148

29.7434

29.8196

29.8704

31.115

31.3436

31.4198

31.4706

32.6898

32.9184

32.9946

33.0454

34.29

34.5186

34.5948

34.6456

36.0934

36.1696

37.465

37.6936

37.7698

37.8206

39.3446

40.64

40.8686

40.9448

40.9956

42.5196

43.815

44.0436

44.1198

44.1706

45.6946

46.99

47.2186

47.2948

47.3456

48.895

50.165

50.3936

50.4698

50.5206

52.07

53.34

53.5686

53.6448

53.6956

55.245

56.515

56.7436

56.8198

56.8706

58.42

59.69

59.9186

59.9948

60.0456

61.595

62.865

63.0936

63.1698

63.2206

64.77

66.04

66.2686

66.3448

66.3956

67.945

69.215

69.4436

69.5198

69.5706

71.12

72.39

72.6186

72.6948

72.7456

75.565

75.7936

75.8698

75.9206

78.74

78.9686

81.915

82.1436

82.2198

82.2706

85.09

85.3186

88.265

88.4936

88.5698

88.6206

91.44

91.6686

94.615

94.8436

94.9198

94.9706

97.79

98.0186

100.965

101.1936

101.2698

101.3206

104.14

104.3686

107.315

107.5436

107.6198

107.6706

110.49

110.7186

113.665

113.8936

113.9698

114.0206

116.84

117.0686

120.015

120.2436

120.3198

120.3706

123.19

123.4186

126.365

126.5936

126.6698

126.7206

129.54

129.7686

132.715

132.9436

133.0198

133.0706

135.89

136.1186

139.065

139.2936

139.3698

142.24

142.4686

145.415

145.6436

145.7198

148.59

148.8186

151.765

151.9936

152.0698

158.115

158.3436

158.4198

164.465

164.6936

164.7698

170.815

171.0436

171.1198

177.165

177.3936

177.4698

183.515

183.7436

183.8198

189.865

190.0936

190.1698

196.215

196.4436

196.5198

202.565

202.7936

202.8698

208.915

209.1436

209.2198

215.265

215.4936

215.5698

221.615

221.8436

221.9198

227.965

228.1936

228.2698

234.315

234.5436

234.6198

240.665

240.8936

240.9698

247.015

247.2436

247.3198

253.365

253.5936

266.065

266.2936

278.765

278.9936

291.465

291.6936

304.165

304.3936

316.865

329.565

329.7936

342.265

354.965

355.1936

367.665

380.365

380.5936

393.065

405.257

417.957

430.657

443.357

456.057

468.757

481.457

494.157

506.857

532.257

557.657

582.676

608.076

633.476

658.876

-

34.8

22.1

47.5

15

23

36

50

The outer diameter (mm)

2.3876

3.5814

3.7846

4.3688

4.4

4.7752

5.0

5.1

5.1562

5.3086

5.5626

6.0

6.0452

6.2

6.35

6.7818

7.0

7.1374

7.4422

7.6

7.7216

7.9502

8.4836

8.7376

8.9916

9.0

9.2

9.5

9.525

10.0

10.3124

11.0

11.1252

11.8

11.8872

12.0

12.4206

12.7

14.2748

14.3002

14.8

14.8844

15.875

16.0

17.3482

17.4752

18.1

19.05

20.0

20.6502

21.1

22.1742

22.225

23.8252

24.0

25.4

27.0002

28.575

30.1752

31.75

33.3502

34.925

36.5252

38.1

39.7002

41.275

42.8752

44.45

46.0502

47.625

49.2252

50.8

52.4002

53.975

55.5752

57.15

58.7502

60.325

61.9252

63.5

65.1002

66.675

68.2752

69.85

70

71.4502

73.025

74.6252

76.2

77.8002

79.375

80.9752

82.55

85.725

87.3252

88.9

92.075

93.6752

95.25

98.425

100.0252

101.6

104.775

106.3752

107.95

111.125

112.7252

114.3

117.475

119.0752

120.65

123.825

125.4252

127

130.175

131.7752

133.35

136.525

138.1252

139.7

142.875

144.4752

146.05

149.225

150.8252

152.4

155.575

157.1752

158.75

161.925

163.5252

165.1

168.275

169.8752

171.45

174.625

176.2252

177.8

180.975

182.5752

184.15

187.325

188.9252

190.5

193.675

195.2752

196.85

200.025

201.6252

203.2

206.375

207.9752

209.55

212.725

214.3252

215.9

219.075

220.6752

222.25

225.425

227.0252

228.6

231.775

233.3752

234.95

238.125

239.7252

241.3

244.475

246.0752

247.65

250.825

252.4252

254

257.175

260.35

263.525

266.7

273.05

276.225

279.4

285.75

288.925

292.1

298.45

301.625

304.8

311.15

314.325

317.5

330.2

336.55

339.725

342.9

355.6

361.95

365.125

368.3

381

387.35

390.525

393.7

406.4

412.75

415.925

419.1

431.8

438.15

441.325

444.5

457.2

463.55

466.725

469.9

482.6

492.125

495.3

508

517.525

520.7

542.925

546.1

568.325

571.5

593.725

596.9

619.125

622.3

644.525

647.7

669.925

673.1

-

Length (mm)

2.1167

3.175

4

4.7625

5

6

6.35

7.9375

8

9.525

10

11.1125

12

12.7

14

14.2875

15.875

16

17.4625

18

19.05

20

22

22.225

25

25.4

26.9875

28

28.575

30

31.75

32

34.925

35

38.1

40

41.275

44.45

45

50

50.8

53

57.15

58

60

63.5

64

65

69.85

1000

-

LEAD

8

16

18

20

22

24

28

32

44

-

Plane orientation

C-plane

R-plane

-

size

□10mm

□25mm

13mm×5m

250mm×250mm

L size

M10用

M12用

M16用

M6用

M8用

M size

S size

Φ50.8mm

-

8mm×5m

The thickness

0.3mm

0.43mm

0.5mm

1mm

-

12.7mm

0.038 mm

0.025 mm

Name

真空用

Ceramic paste

For the atmosphere

Contents: 2.2g

Contents: 25g

Contents: 50g

Wire stripper

Crimp tool

Drawing tool

-

Sales volume

100 Units

in units of 10

CeFiX® flange

Usable

Usage prohibited

-

NW flange

Usable

Usage prohibited

-

RoHS Compliance

○

RoHS2 corresponding

○

Bending radius

15.2mm ※ flat direction only

22mm

9.6mm

3 kV

14mm

4mm

0.66

7.1mm

6.35mm

80mm

100mm

150mm

VFVG

VF/VG 20

VF/VG 25

VF/VG 40

VF/VG 50

VF/VG 80

VF/VG 100

VF/VG 125

VF/VG 150

VF/VG 200

VF/VG 250

mode

Single-mode

Multi-mode

connector

SMA905

Lead equivalent (mmPb)

1.5

Thermal expansion coefficient (/

80✕10-7(30~380℃)

Softening point (℃)

585

Flexural strength (MPa)

25

Young's modulus (GPa)

63

Poisson's ratio

0.24

Knoop hardness

370

Refractive index (Na-D line)

1.71

Bolt hole spacing

□ 53.6 x 37.6

□ 53.6 x 82.1

□ 64.6 x 49.1

□ 64.6 x 74.1

□ 79.6 x 46.6

□ 79.6 x 75.6

□ 99.6 x 45.6

□ 99.6 x 80.6

□ 99.6 x 93.6

Bolt Anakei

5.5

Corresponding laser

UV

DUV

EUV (excimer)

UV/VIS

VIS/NIR

AR coated:365～780nm

Withstand voltage

3 kV

3 kVAC / 10 kVDC

150V

6 kV

10 kVAC / 30kVDC

8 kV

AR coating

○

Glass

Borosilicate glass

Fiber diameter (μm)

125/9

125/50

Repeated bending radius (R)

75

45

-

130

190

200

240

250

330

390

ICF (tap)

34

plug/connector

One side only

both sides

Conductor resistance (20 ° C. ·

37.2Ω/km～500MΩ/km

58.6 Ω/km

49.8Ω/km

38.3Ω/km

Withstand voltage (AC)

3000 V (spark) / 1000 V (1 min

600 V

3 kV

1000 V

2000 V

Withstand voltage (VC)

2 kV

10 kV

12 kV

700 V

Vacuum and Air

For the atmosphere

For vacuum

70

70

95

60

60

50

50

Φ6-10

Φ6-10

A (O.D)

33

48

26

18

21

24

30

36

42

50

60

75

100

B (I.D)

19

25

38

6

7.5

9

12

15

18

32

50

shape

A

B

Staight

Angled

single

double

45°

90°

standard

nipple type

Pin

socket

There is a step

"No.

outer

inner

L type

Y type

Z type

Current value (per unit)

(Reference value) Constantan:

Reference value】Almer: 6.5A /C

3A

Color

navy blue:For SVC16,SVC16-A14,

wine red:For PVC16,PVC16CH,PVC

light blue:For SVC16CHA/ALA,SV

silver:For SVC24CU

White, black, gray, green, bro

white

purpose

SVC16,SVC16-A14,SVC16-L18用

PVC16,PVC16CH,PVC16AL

SVC16CHA/ALA,SVC16CU/CT

SVC24CU

base plate

gauge port

Gage Port/Wilson Seal

Socket Contact Crimping Tool

Tool for inserting socket cont

Tool for crimping socket conta

Tool for removing socket conta

Socket contact fixing jig incl

ISO

63

80

100

160

200

250

terminal processing

One side: Y-Terminal On

One side: Socket Contact

One side: Plug

None

One side: socket contact

One side: insert One side: lef

One side: Crimp terminal One s

One side: M2 crimp terminal On

One side: M3 crimp terminal On

片側：M4圧着端子　片側：なし

pin diameter

1.4 mm

2.4 mm

2.3 mm

1.3 mm

1.33 mm

3.5 mm

1.6 mm

3.9 mm

6.4 mm

19.1 mm

1/4 inch

M16

M24

Dielectric strength

10 kV / mm

Screw size

#4-40 UNC-5/16

#4-40 UNC

Electrode*

OFHC / Al-Ni-Co alloy

幅

457 mm

609 mm

accessory

nut (as in nut and bolt)

Shape of Fittings

90° elbow

45° elbow

Tee

3way elbow

Surface Material

SUS316L

SUS 316 (double-acting), SUS31

DN（内径）

22

33

40

47.5

50

80

100

Cycles until first service

2,000,000 (unheated and under

50,000

200,000 (unheated and under

M1

M4

M6

M8

M10

M2

M8

M10

Φ10

Inner diameter

1/4inch

3/8inch

1/2inch

3/4inch

1/1inch

1-1/2inch

2 inch

15

35

36

38.5

49.5

60

70

95

Input Power

1 W or less

Leakage rate (hood section)

<2x10-9Pa･㎥/sec

<2x10-9mbar-L/sec

<2.7x10-7Pa･l/sec

<1.0x10-10Pa･㎥/sec

Leak rate (sheet leakage)

<2x10-9Pa･㎥/sec

<2x10-9mbar-L/sec

<2.7x10-6Pa･l/sec

<1.0x10-10Pa･㎥/sec

Thru or Tap

Through

tapped

- In opening direction

≤ 0.2 MPa

≤ 0.12 MPa

- in closing direction

≤ 0.5 Mpa

Differential pressure at opening

≤ 0.1 Mpa

使用可能温度（ボディ）

150 ℃

使用可能温度（アクチュエーター）

120 ℃

150 ℃

使用可能温度（ポジションインディケーター）

70 ℃

60 ℃

プレート

SUS 316

ベローズ

SUS 316

ポジションインディケーター（接点

10 - 28V/DC, 1 - 50 mA

40mA:24VDC , 20mA 110/220VAC

capacity

3.3 L

conductance

5 l/s

12 l/s

33 l/s

54 l/s

Interface

RS232+Analog Output

Logic

RS485

power option

Basic

SPS

Number of sensors

1

2

Adjustable minimum leakage*1

<6.7x10-9Pa･㎥/sec

Leakage when valve is fully clos

<6.7x10-11Pa･㎥/sec

Gas INLET side

Φ8

Orifice diameter

Φ3.5 mm

Shaft seal lubricant

Silicone grease for high vacuu

Valve body shaft

SUS 304

valve

Brass (Ni plating)

Conductance [L/S].

4

26

29

12.8

41.8

71.9

5

12

33

54

Bolt type

cap bolt

Hexagon Head Bolts

Hex Bolt/Cap Bolt

チューブ外径：チューブ内径

1/2 inch

3/8 inch

1/4 inch

1/8 inch

-

継手サイズ

1/2 inch

3/8 inch

1/4 inch

1/8 inch

-

end

M2

M3

M4

M5

Double-Ended Tubes

One side tube

bilateral fitting

Body & Mesh

SUS 304

SUS 316L

Softness (degree of softness)

NLGI Grade: 3-4

torque limit

NONE

YES

life cycle

10000 cycle

100 times

5000 times

stroke

25 ｍｍ

40 ｍｍ

22 mm

50 mm

70 ｍｍ

80 ｍｍ

100 ｍｍ

200 mm

300mm

400mm

500 mm

700 mm

Feed rate

1mm/Rev(0.02μm/pulse)

1mm/Rev

2mm/Rev

Maximum permissible thrust

Straight travel 2kg / Rotation

5kg

Straight travel 7kg / Rotation

7.5kg (12kg for deconditioning

12kg

15kg

20kg

30kg (35kg for deconditioning)

60kg (70kg de-tuning)

operation

Straight line only

Rotation only

Straight line, rotation

X axis

±5

±7.5

±12.5

Z axis

±50

Y axis

±5

±7.5

±12.5

Fixed voltage/temp

150 V / 125 ℃

way

bellows

magnet

Repeatability

0.1 mm or less

0.01 mm or less

XY: 0.01 mm or less, Z: 0.1 m

0.05 mm or less

0.2 mm or less

Amount of movement

X・Y±7.5mm、Z±5mm

X・Y±12.5mm

X・Y±5mm

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