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ULVAC Products Product List Others
Subcategory 4Matter (1 ~4 )
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Main materials Aluminum/polycarbonate O-ring FPM Available pressure 13.3 Pa mass 3.0 Kg capacity 3.3 L
Products 8Matter (1 ~8 )
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Product code :50113
Model:VPT-060Features
Completely dry exhaust unit
Compact size for installation in small spaces
Special KF40 flange on the intake port for this campaign.
Can be used with 100V outlet.
Suitable for a wide variety of vacuum applications
Semiconductor measurement under vacuum
Gas analysis
Vacuum furnace
Electron microscope pre-evacuation, etc.
Achievable pressure: 10-5 Pa level
Main pump: Turbo molecular pump 60 L/sec
Auxiliary pump: Diaphragm vacuum pump 20 L/min
Electricity requirement: Single phase 100 V 0.3 kVA
Mass: 18 kg
Maximum size: 340(W)×340(L)×368(H) mm
Details
Explanation videoISO-K 63 -
Product code :50120
Model:VDE-3Standards/Dimensions:
Features:
Can be used from low to medium vacuum.
Clear visibility for easy viewing of the inside.
Versatile use with 4 connection ports.
Two valve sets are standard.
Locking function provides peace of mind.
Metal base provides high sealing performance and high strength.
Base: 4 ports (2 sealing plugs, 2 hose ports φ9 x 2 included)
Internal dimensions: Bottom φ165 x Top φ145 x Height 175
Maximum dimensions; W225 x L213 x H235Main materials Aluminum/polycarbonate O-ring FPM Available pressure 13.3 Pa mass 3.0 Kg capacity 3.3 L -
Product code :50036
Model:DAP-15RoHS Compliance ○ Run Exhaust Speed 15(50Hz)/18(60Hz) Attained pressure 39.9×10³ Motor output 40 mass 3.6 Intake/exhaust port O.D.φ9×I.D.φ5 (Rc 1/4) Ambient temperature 7～40 -
Product code :50031
Model:DAU-20RoHS Compliance ○ Run Exhaust Speed 20(50Hz)/23(60Hz) Attained pressure 2.0×10² Motor output 80 mass 7.5 Intake/exhaust port O.D.φ10×I.D.φ6 (Rc 1/8) Ambient temperature 5～40
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Product code :50015
Model:DTC-41RoHS Compliance ○ Run Exhaust Speed 40(50Hz)/46(60Hz) Attained pressure 1.0×10³ Motor output 100 mass 10.3 Intake/exhaust port O.D.φ10×I.D.φ6 (G 1/4) Ambient temperature 0～40 -
Product code :50033
Model:DA-60DRoHS Compliance ○ Run Exhaust Speed 60(50Hz)/72(60Hz) Attained pressure 3.32×10³ Motor output 200 mass 19 Intake/exhaust port O.D.φ14×I.D.φ9 (G 3/8) Ambient temperature 7～40 -
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