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ULVAC Products Product List Others
Subcategory 2Matter (1 ~2 )
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Main materials Aluminum/polycarbonate O-ring FPM Available pressure 13.3 Pa mass 3.0 Kg capacity 3.3 L
Products 2Matter (1 ~2 )
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Product code :50113
Model:VPT-060Features
Completely dry exhaust unit
Compact size for installation in small spaces
Special KF40 flange on the intake port for this campaign.
Can be used with 100V outlet.
Suitable for a wide variety of vacuum applications
Semiconductor measurement under vacuum
Gas analysis
Vacuum furnace
Electron microscope pre-evacuation, etc.
Achievable pressure: 10-5 Pa level
Main pump: Turbo molecular pump 60 L/sec
Auxiliary pump: Diaphragm vacuum pump 20 L/min
Electricity requirement: Single phase 100 V 0.3 kVA
Mass: 18 kg
Maximum size: 340(W)×340(L)×368(H) mmISO-K 63 -
Product code :50120
Model:VDE-3Standards/Dimensions:
Features:
Can be used from low to medium vacuum.
Clear visibility for easy viewing of the inside.
Versatile use with 4 connection ports.
Two valve sets are standard.
Locking function provides peace of mind.
Metal base provides high sealing performance and high strength.
Base: 4 ports (2 sealing plugs, 2 hose ports φ9 x 2 included)
Internal dimensions: Bottom φ165 x Top φ145 x Height 175
Maximum dimensions; W225 x L213 x H235Main materials Aluminum/polycarbonate O-ring FPM Available pressure 13.3 Pa mass 3.0 Kg capacity 3.3 L
