About 8,000 types of vacuum components in stock at all times.Business Hours： 9:00-18:00, excluding weekends and holidays
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(Hours 9:00 to 18:00 except Saturdays, Sundays, and holidays)
- Cosmotec for Vacuum Components
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- Exhaust unit made by ULVAC
Exhaust unit made by ULVAC
Features
Completely dry exhaust unit
Compact size for installation in small spaces
Special KF40 flange on the intake port for this campaign.
Can be used with 100V outlet.
Suitable for a wide variety of vacuum applications
Semiconductor measurement under vacuum
Gas analysis
Vacuum furnace
Electron microscope pre-evacuation, etc.
Achievable pressure: 10-5 Pa level
Main pump: Turbo molecular pump 60 L/sec
Auxiliary pump: Diaphragm vacuum pump 20 L/min
Electricity requirement: Single phase 100 V 0.3 kVA
Mass: 18 kg
Maximum size: 340(W)×340(L)×368(H) mm
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