About 10,000 types of vacuum components in stock at all times.Business Hours: 9:00-18:00, excluding weekends and holidays
Feedthrough
Isolator
Viewport
Vacuum Component
Vacuum Valve
Motion Feedthroughs
Others
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Adjustable minimum leakage*1 | <6.7x10<sup>-9</sup>Pa・㎥/sec |
| Leakage when valve is fully clos | <6.7x10<sup>-11</sup>Pa・㎥/sec |
| Maximum temperature | 450℃ |
| body | SUS 304 |
| Seal / gasket material | WC Series Superabrasives/Cu Al |
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Adjustable minimum leakage*1 | <6.7x10<sup>-9</sup>Pa・㎥/sec |
| Leakage when valve is fully clos | <6.7x10<sup>-11</sup>Pa・㎥/sec |
| Maximum temperature | 450℃ |
| body | SUS 304 |
| Seal / gasket material | WC Series Superabrasives/Cu Al |
| ICF | 70 |
| Gas INLET side | Φ8 |