About 10,000 types of vacuum components in stock at all times.Business Hours: 9:00-18:00, excluding weekends and holidays
Available pressure | Atmospheric pressure ~ 10<sup> |
---|---|
Leak rate | <5x10<sup>-7</sup>Pa・㎥/sec |
conductance | 420 L/min (value in molecular |
Cycles until first service | 30,000 or 1 year |
Available gases | Atmosphere or gases (excluding |
Maximum temperature | 40℃ |
The lowest temperature | 10℃ |
▼Isolated valve
Prevents backflow when oil rotary pump is stopped
Mainly used by attaching to the pump intake
▼Specifications
When the pump is stopped, this valve automatically seals the exhaust side and vents the pump side to the atmosphere. Prevents backflow of pump oil into the exhausted system side.
The valve opens and closes using the vacuum force generated on the pump side. The valve is closed when the pump is not running.
The valve is operated by interlocking the electric power supply to the attached solenoid valve with the electric motor of the pump.
▼How to use
Connect the vertical flange to the chamber and the side flange to the oil rotary pump (the valve will not operate if the installation direction is different).
Synchronize with the energized operation of the pump when connecting
▼Caution
Please install a separate fuse in the electrical circuit for protection.
Use within the range of rated voltage (±10%).
Use connectors that are compatible with the rated voltage when wiring the valve.
The above diagram is an example of a circuit that synchronizes the energized operation of the valve and pump and protects the solenoid valve of the valve from surge voltage generated in the main circuit of the pump motor. If necessary, install a surge killer or similar device in the main circuit of the motor to reduce surge voltage.
Available pressure | Atmospheric pressure ~ 10<sup> |
---|---|
Leak rate | <5x10<sup>-7</sup>Pa・㎥/sec |
conductance | 420 L/min (value in molecular |
Cycles until first service | 30,000 or 1 year |
Available gases | Atmosphere or gases (excluding |
Maximum temperature | 40℃ |
The lowest temperature | 10℃ |
NW/KF | 25 |
Fixed voltage/temp | 100 V |
▼Isolated valve
Prevents backflow when oil rotary pump is stopped
Mainly used by attaching to the pump intake
▼Specifications
When the pump is stopped, this valve automatically seals the exhaust side and vents the pump side to the atmosphere. Prevents backflow of pump oil into the exhausted system side.
The valve opens and closes using the vacuum force generated on the pump side. The valve is closed when the pump is not running.
The valve is operated by interlocking the electric power supply to the attached solenoid valve with the electric motor of the pump.
▼How to use
Connect the vertical flange to the chamber and the side flange to the oil rotary pump (the valve will not operate if the installation direction is different).
Synchronize with the energized operation of the pump when connecting
▼Caution
Please install a separate fuse in the electrical circuit for protection.
Use within the range of rated voltage (±10%).
Use connectors that are compatible with the rated voltage when wiring the valve.
The above diagram is an example of a circuit that synchronizes the energized operation of the valve and pump and protects the solenoid valve of the valve from surge voltage generated in the main circuit of the pump motor. If necessary, install a surge killer or similar device in the main circuit of the motor to reduce surge voltage.
Available pressure | Atmospheric pressure ~ 10<sup> |
---|---|
Leak rate | <5x10<sup>-7</sup>Pa・㎥/sec |
conductance | 420 L/min (value in molecular |
Cycles until first service | 30,000 or 1 year |
Available gases | Atmosphere or gases (excluding |
Maximum temperature | 40℃ |
The lowest temperature | 10℃ |
NW/KF | 25 |
Fixed voltage/temp | 200 V |