About 10,000 types of vacuum components in stock at all times.Business Hours: 9:00-18:00, excluding weekends and holidays
Feedthrough
Isolator
Viewport
Vacuum Component
Vacuum Valve
Motion Feedthroughs
Others
| Flange material | SUS 304 |
|---|---|
| window | Borosilicate glass |
| Maximum temperature | 350℃ |
| Leak rate | <1.0x10<sup>-8</sup>Pa・㎥/sec |
| RoHS2 corresponding | ○ |
| Flange material | SUS 304 |
|---|---|
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Leak rate | <1.3x10<sup>-7</sup>Pa・ℓ/sec |
| RoHS2 corresponding | ○ |
| Flange material | SUS(329J3L) |
|---|---|
| window | Borosilicate glass |
| Maximum temperature | 280℃ |
| The lowest temperature | -20℃ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Leak rate | <1.3x10<sup>-9</sup>Pa・㎥/sec |
| RoHS2 corresponding | ○ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Corresponding seal | Dedicated elastomeric seal |
| Pressurization | ○ |
| Non-magnetic | ○ |
| chemical resistance | ◎ |
| Clean Room | ○ |
| Insulation | ○ |
| RoHS2 corresponding | ○ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Corresponding seal | Dedicated elastomeric seal |
| Pressurization | ○ |
| Non-magnetic | ○ |
| chemical resistance | ◎ |
| Clean Room | ○ |
| Insulation | ○ |
| RoHS2 corresponding | ○ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Corresponding seal | Dedicated elastomeric seal |
| Pressurization | ○ |
| Non-magnetic | ○ |
| chemical resistance | ◎ |
| Clean Room | ○ |
| Insulation | ○ |
| RoHS2 corresponding | ○ |