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- Cosmotec for Vacuum Components
- Vacuum Valve
Vacuum Valve Product List Vacuum Valve
Category 9Matter
Subcategory 11Matter (1 ~11 )
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Leak rate <1.3x10<sup>-10</sup>Pa･㎥/sec Maximum temperature 150°C (body), 80°C (overall) type Valve O-ring included body SUS 304 -
Maximum temperature 200°C (body), 80°C (overall) Available pressure 600 kpa~ 1.33x10-5 kpa Leak rate <1.0x10<sup>-9</sup>Pa･㎥/sec Main materials SUS 316 (double-acting), SUS31 Surface Material SUS 316 (double-acting), SUS31 Seal / gasket material PTFE The inner surface processing Ra ≤ 0.8μm -
Main materials SUS304(L type), SUS304L(Y,Z ty Flexible / bellows AM-350 Leakage rate (hood section) <1.0x10<sup>-10</sup>Pa･㎥/sec Leak rate (sheet leakage) <1.0x10<sup>-10</sup>Pa･㎥/sec RoHS2 corresponding ○ -
Flange material SUS 304 body SUS 316 Flexible / bellows SUS 321 handle Aluminum 2024-T4 Maximum temperature 150℃ Available pressure Atmospheric pressure ~ 10<sup> Leak rate <1.3x10<sup>-7</sup>Pa･㎥/sec RoHS2 corresponding ○ -
Available pressure Atmospheric pressure ~ 10<sup> Adjustable minimum leakage*1 <6.7x10<sup>-9</sup>Pa･㎥/sec Leakage when valve is fully clos <6.7x10<sup>-11</sup>Pa･㎥/sec Maximum temperature 450℃ body SUS 304 Seal / gasket material WC Series Superabrasives/Cu Al -
Main materials SUS 304 Leak rate <5x10<sup>-9</sup>Pa･㎥/sec O-ring Viton ® RoHS2 corresponding ○
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Available pressure Atmospheric pressure ~ 10<sup> Leakage when valve is fully clos <6.7x10<sup>-11</sup>Pa･㎥/sec Orifice diameter Φ3.5 mm Maximum temperature 125℃ Seal / gasket material Viton ® Shaft seal lubricant Silicone grease for high vacuu Valve body shaft SUS 304 valve Brass (Ni plating) handle phenol resin -
Available pressure 0.12MPa ～10<sup>-6</sup> Pa Leak rate <1x10<sup>-7</sup>Pa･ℓ/sec The lowest temperature 10℃ Maximum temperature 150℃ Cycles until first service 2,000,000 (unheated and under The input power voltage 24 VDC (±10%) @0.5V pk-pk max. The input power power 80 W max. (operation of valve -
Available pressure Atmospheric pressure ~ 10<sup> Leak rate <5x10<sup>-7</sup>Pa･㎥/sec conductance 420 L/min (value in molecular Cycles until first service 30,000 or 1 year Available gases Atmosphere or gases (excluding Maximum temperature 40℃ The lowest temperature 10℃ -
Maximum temperature 60℃ The lowest temperature 5℃ Available pressure Vacuum～0.9MPa(G) Orifice diameter Φ3mm Available gases Air and inert gas
