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  • Feedthrough Feedthrough
    Feedthrough
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    Isolator
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    Vacuum Valve
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    Motion Feedthroughs
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  1. Cosmotec for Vacuum Components
  2. Feedthrough
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stage　Product List Feedthrough 

Subcategory 2Matter (1 ~2 )

Products　40Matter (1 ~20 )

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  • ICF70 直線導入機 ストローク：25mm
    ICF70 straight line introduction machine Stroke: 25mm
    Product code :27583
    Model:ICF70LMF25A

    ▼Straight line feeder
    Bellows seal system
    Flange (ICF): 34, 70
    Minimum scale (mm): 0.05
    Bake heat resistance: 200°C
    Life expectancy: 10,000 cycles
    Motor compatible products are also available.

    ▼Rotary feeder
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Minimum graduation: ICF34 = 0.5°, ICF70 = 1°.
    Bake heat resistance: 200°C

    ▼Linear and rotary feeder (transfer rod)
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Bake heat resistance: 200°C

    ▼Others
    If you have any questions about our products, please feel free to contact us from the "Inquiry" button.

    For precision cleaning requests, please click here.

    Maximum temperature 120℃
    Leak rate <1.3x10<sup>-11</sup>Pa･㎥/sec
    Flange material SUS 304
    RoHS2 corresponding ○
    ICF 70
    C 10
    L1 50～75
    L2 152
    stroke 25 ｍｍ
    Feed rate 2mm/Rev
    Min. Scale 0.05mm
    Classification Manual
    operation Straight line only
    Maximum permissible thrust 20kg
    way bellows
    Inquiry for this product
  • ICF70 直線導入機 ストローク:40mm
    ICF70 straight line introduction machine Stroke: 40mm
    Product code :27445
    Model:ICF70LMF40

    ▼Straight line feeder
    Bellows seal system
    Flange (ICF): 34, 70
    Minimum scale (mm): 0.05
    Bake heat resistance: 200°C
    Life expectancy: 10,000 cycles
    Motor compatible products are also available.

    ▼Rotary feeder
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Minimum graduation: ICF34 = 0.5°, ICF70 = 1°.
    Bake heat resistance: 200°C

    ▼Linear and rotary feeder (transfer rod)
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Bake heat resistance: 200°C

    ▼Others
    If you have any questions about our products, please feel free to contact us from the "Inquiry" button.

    For precision cleaning requests, please click here.

    Maximum temperature 120℃
    Leak rate <1.3x10<sup>-11</sup>Pa･㎥/sec
    Flange material SUS 304
    RoHS2 corresponding ○
    ICF 70
    C 8
    L1 50～90
    L2 170
    stroke 40 ｍｍ
    Feed rate 1mm/Rev
    Min. Scale 0.05mm
    Classification Manual
    operation Straight line only
    Maximum permissible thrust 15kg
    way bellows
    Inquiry for this product
  • ICF70 直線導入機 ストローク：50mm
    ICF70 straight line introduction machine Stroke: 50mm
    Product code :27584
    Model:ICF70LMF50A

    ▼Straight line feeder
    Bellows seal system
    Flange (ICF): 34, 70
    Minimum scale (mm): 0.05
    Bake heat resistance: 200°C
    Life expectancy: 10,000 cycles
    Motor compatible products are also available.

    ▼Rotary feeder
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Minimum graduation: ICF34 = 0.5°, ICF70 = 1°.
    Bake heat resistance: 200°C

    ▼Linear and rotary feeder (transfer rod)
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Bake heat resistance: 200°C

    ▼Others
    If you have any questions about our products, please feel free to contact us from the "Inquiry" button.

    For precision cleaning requests, please click here.

    Maximum temperature 120℃
    Leak rate <1.3x10<sup>-11</sup>Pa･㎥/sec
    Flange material SUS 304
    RoHS2 corresponding ○
    ICF 70
    C 10
    L1 50～100
    L2 190
    stroke 50 mm
    Feed rate 2mm/Rev
    Min. Scale 0.05mm
    Classification Manual
    operation Straight line only
    Maximum permissible thrust 20kg
    way bellows
    Inquiry for this product
  • ICF70 直線導入機 ストローク:70mm
    ICF70 Straight line introduction machine Stroke: 70mm
    Product code :27446
    Model:ICF70LMF70

    ▼Straight line feeder
    Bellows seal system
    Flange (ICF): 34, 70
    Minimum scale (mm): 0.05
    Bake heat resistance: 200°C
    Life expectancy: 10,000 cycles
    Motor compatible products are also available.

    ▼Rotary feeder
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Minimum graduation: ICF34 = 0.5°, ICF70 = 1°.
    Bake heat resistance: 200°C

    ▼Linear and rotary feeder (transfer rod)
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Bake heat resistance: 200°C

    ▼Others
    If you have any questions about our products, please feel free to contact us from the "Inquiry" button.

    For precision cleaning requests, please click here.

    Maximum temperature 120℃
    Leak rate <1.3x10<sup>-11</sup>Pa･㎥/sec
    Flange material SUS 304
    RoHS2 corresponding ○
    ICF 70
    C 8
    L1 50～120
    L2 253
    stroke 70 ｍｍ
    Feed rate 1mm/Rev
    Classification Manual
    operation Straight line only
    Maximum permissible thrust 15kg
    way bellows
    Inquiry for this product
  • ICF70 直線導入機 ストローク:100mm
    ICF70 Straight line introduction machine Stroke: 100mm
    Product code :27447
    Model:ICF70LMF100

    ▼Straight line feeder
    Bellows seal system
    Flange (ICF): 34, 70
    Minimum scale (mm): 0.05
    Bake heat resistance: 200°C
    Life expectancy: 10,000 cycles
    Motor compatible products are also available.

    ▼Rotary feeder
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Minimum graduation: ICF34 = 0.5°, ICF70 = 1°.
    Bake heat resistance: 200°C

    ▼Linear and rotary feeder (transfer rod)
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Bake heat resistance: 200°C

    ▼Others
    If you have any questions about our products, please feel free to contact us from the "Inquiry" button.

    For precision cleaning requests, please click here.

    Maximum temperature 120℃
    Leak rate <1.3x10<sup>-11</sup>Pa･㎥/sec
    Flange material SUS 304
    RoHS2 corresponding ○
    ICF 70
    C 8
    L1 50～150
    L2 333
    stroke 100 ｍｍ
    Feed rate 1mm/Rev
    Min. Scale 0.05mm
    Classification Manual
    operation Straight line only
    Maximum permissible thrust 15kg
    way bellows
    Inquiry for this product
  • ICF70 直線導入機 モータ駆動/ベローズ方式 オート
    ICF70 Straight line introduction machine Motor-driven/bellows type Auto
    Product code :27444
    Model:ICF70LMFA80

    ▼Straight line feeder
    Bellows seal system
    Flange (ICF): 34, 70
    Minimum scale (mm): 0.05
    Bake heat resistance: 200°C
    Life expectancy: 10,000 cycles
    Motor compatible products are also available.

    ▼Rotary feeder
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Minimum graduation: ICF34 = 0.5°, ICF70 = 1°.
    Bake heat resistance: 200°C

    ▼Linear and rotary feeder (transfer rod)
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Bake heat resistance: 200°C

    ▼Others
    If you have any questions about our products, please feel free to contact us from the "Inquiry" button.

    For precision cleaning requests, please click here.

    Maximum temperature 120℃
    Leak rate <1.3x10<sup>-11</sup>Pa･㎥/sec
    Flange material SUS 304
    RoHS2 corresponding ○
    ICF 70
    C 6
    L1 50～130
    L2 447.2
    stroke 80 ｍｍ
    Feed rate 1mm/Rev(0.02μm/pulse)
    Min. Scale 0.00002mm/pulse
    Classification motor
    operation Straight line only
    Maximum permissible thrust 15kg
    way bellows
    Inquiry for this product
  • ICF34 回転導入機 ベローズ式
    ICF34 Rotary Introducer Bellows Type
    Product code :27588
    Model:ICF34BRMF50

    ▼Straight line feeder
    Bellows seal system
    Flange (ICF): 34, 70
    Minimum scale (mm): 0.05
    Bake heat resistance: 200°C
    Life expectancy: 10,000 cycles
    Motor compatible products are also available.

    ▼Rotary feeder
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Minimum graduation: ICF34 = 0.5°, ICF70 = 1°.
    Bake heat resistance: 200°C

    ▼Linear and rotary feeder (transfer rod)
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Bake heat resistance: 200°C

    ▼Others
    If you have any questions about our products, please feel free to contact us from the "Inquiry" button.

    For precision cleaning requests, please click here.

    Maximum temperature 120℃
    Leak rate <1.3x10<sup>-11</sup>Pa･㎥/sec
    Flange material SUS 304
    RoHS2 corresponding ○
    ICF 34
    C 6
    L1 50
    L2 85
    Min. Scale 0.5°
    Classification Manual
    operation Rotation only
    Maximum permissible thrust Straight line/rotation 10kg
    way bellows
    Inquiry for this product
  • ICF70 回転導入機 ベローズ式
    ICF70 Rotating Introducer Bellows Type
    Product code :27589
    Model:ICF70BRMF50

    ▼Straight line feeder
    Bellows seal system
    Flange (ICF): 34, 70
    Minimum scale (mm): 0.05
    Bake heat resistance: 200°C
    Life expectancy: 10,000 cycles
    Motor compatible products are also available.

    ▼Rotary feeder
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Minimum graduation: ICF34 = 0.5°, ICF70 = 1°.
    Bake heat resistance: 200°C

    ▼Linear and rotary feeder (transfer rod)
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Bake heat resistance: 200°C

    ▼Others
    If you have any questions about our products, please feel free to contact us from the "Inquiry" button.

    For precision cleaning requests, please click here.

    Maximum temperature 120℃
    Leak rate <1.3x10<sup>-11</sup>Pa･㎥/sec
    Flange material SUS 304
    RoHS2 corresponding ○
    ICF 70
    C 10
    L1 50
    L2 125
    Min. Scale 5°
    Classification Manual
    operation Rotation only
    way bellows
    Inquiry for this product
  • ICF34 回転導入機 マグネット式
    ICF34 Rotary induction machine, magnetic type
    Product code :27585
    Model:ICF34MRMF50

    ▼Straight line feeder
    Bellows seal system
    Flange (ICF): 34, 70
    Minimum scale (mm): 0.05
    Bake heat resistance: 200°C
    Life expectancy: 10,000 cycles
    Motor compatible products are also available.

    ▼Rotary feeder
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Minimum graduation: ICF34 = 0.5°, ICF70 = 1°.
    Bake heat resistance: 200°C

    ▼Linear and rotary feeder (transfer rod)
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Bake heat resistance: 200°C

    ▼Others
    If you have any questions about our products, please feel free to contact us from the "Inquiry" button.

    For precision cleaning requests, please click here.

    Maximum temperature 120℃
    Leak rate <1.3x10<sup>-11</sup>Pa･㎥/sec
    Flange material SUS 304
    RoHS2 corresponding ○
    ICF 34
    C 6
    L1 50
    L2 127
    Min. Scale -
    Classification Manual
    operation Rotation only
    Maximum permissible thrust 7.5kg (12kg for deconditioning
    way magnet
    Inquiry for this product
  • ICF70 回転導入機 マグネット式
    ICF70 Rotary Motion Feedthrough Magnet Type
    Product code :27586
    Model:ICF70MRMF50

    ▼Straight line feeder
    Bellows seal system
    Flange (ICF): 34, 70
    Minimum scale (mm): 0.05
    Bake heat resistance: 200°C
    Life expectancy: 10,000 cycles
    Motor compatible products are also available.

    ▼Rotary feeder
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Minimum graduation: ICF34 = 0.5°, ICF70 = 1°.
    Bake heat resistance: 200°C

    ▼Linear and rotary feeder (transfer rod)
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Bake heat resistance: 200°C

    ▼Others
    If you have any questions about our products, please feel free to contact us from the "Inquiry" button.

    For precision cleaning requests, please click here.

    Maximum temperature 120℃
    Leak rate <1.3x10<sup>-11</sup>Pa･㎥/sec
    Flange material SUS 304
    RoHS2 corresponding ○
    ICF 70
    C 15
    L1 50
    L2 107.5
    Min. Scale -
    Classification Manual
    operation Rotation only
    Maximum permissible thrust 30kg (35kg for deconditioning)
    way magnet
    Inquiry for this product
  • ICF70 回転導入機 マグネット式 高トルクタイプ
    ICF70 Rotary Motion Feedthrough Magnet High Torque Type
    Product code :27587
    Model:ICF70MRMF50HT

    ▼Straight line feeder
    Bellows seal system
    Flange (ICF): 34, 70
    Minimum scale (mm): 0.05
    Bake heat resistance: 200°C
    Life expectancy: 10,000 cycles
    Motor compatible products are also available.

    ▼Rotary feeder
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Minimum graduation: ICF34 = 0.5°, ICF70 = 1°.
    Bake heat resistance: 200°C

    ▼Linear and rotary feeder (transfer rod)
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Bake heat resistance: 200°C

    ▼Others
    If you have any questions about our products, please feel free to contact us from the "Inquiry" button.

    For precision cleaning requests, please click here.

    Maximum temperature 120℃
    Leak rate <1.3x10<sup>-11</sup>Pa･㎥/sec
    Flange material SUS 304
    RoHS2 corresponding ○
    ICF 70
    C 15
    L1 50
    L2 150.5
    Min. Scale -
    Classification Manual
    operation Rotation only
    Maximum permissible thrust 60kg (70kg de-tuning)
    way magnet
    Inquiry for this product
  • ICF34 直線・回転導入機 ストローク:100mm
    ICF34 Linear and rotary feeder Stroke: 100mm
    Product code :27517
    Model:ICF34LRMF100

    ▼Straight line feeder
    Bellows seal system
    Flange (ICF): 34, 70
    Minimum scale (mm): 0.05
    Bake heat resistance: 200°C
    Life expectancy: 10,000 cycles
    Motor compatible products are also available.

    ▼Rotary feeder
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Minimum graduation: ICF34 = 0.5°, ICF70 = 1°.
    Bake heat resistance: 200°C

    ▼Linear and rotary feeder (transfer rod)
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Bake heat resistance: 200°C

    ▼Others
    If you have any questions about our products, please feel free to contact us from the "Inquiry" button.

    For precision cleaning requests, please click here.

    Maximum temperature 120℃
    Leak rate <1.3x10<sup>-11</sup>Pa･㎥/sec
    Flange material SUS 304
    RoHS2 corresponding ○
    ICF 34
    C 6
    L1 50～150
    L2 625
    stroke 100 ｍｍ
    Min. Scale 5°
    Classification Manual
    operation Straight line, rotation
    Maximum permissible thrust 3kg
    way magnet
    Inquiry for this product
  • ICF34 直線・回転導入機 ストローク:200mm
    ICF34 Linear and rotary feeder Stroke: 200mm
    Product code :27518
    Model:ICF34LRMF200

    ▼Straight line feeder
    Bellows seal system
    Flange (ICF): 34, 70
    Minimum scale (mm): 0.05
    Bake heat resistance: 200°C
    Life expectancy: 10,000 cycles
    Motor compatible products are also available.

    ▼Rotary feeder
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Minimum graduation: ICF34 = 0.5°, ICF70 = 1°.
    Bake heat resistance: 200°C

    ▼Linear and rotary feeder (transfer rod)
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Bake heat resistance: 200°C

    ▼Others
    If you have any questions about our products, please feel free to contact us from the "Inquiry" button.

    For precision cleaning requests, please click here.

    Maximum temperature 120℃
    Leak rate <1.3x10<sup>-11</sup>Pa･㎥/sec
    Flange material SUS 304
    RoHS2 corresponding ○
    ICF 34
    C 6
    L1 50～250
    L2 625
    stroke 200 mm
    Min. Scale 5°
    Classification Manual
    operation Straight line, rotation
    Maximum permissible thrust 3kg
    way magnet
    Inquiry for this product
  • ICF34 直線・回転導入機 ストローク:300mm
    ICF34 Linear and rotary feeder Stroke: 300mm
    Product code :27519
    Model:ICF34LRMF300

    ▼Straight line feeder
    Bellows seal system
    Flange (ICF): 34, 70
    Minimum scale (mm): 0.05
    Bake heat resistance: 200°C
    Life expectancy: 10,000 cycles
    Motor compatible products are also available.

    ▼Rotary feeder
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Minimum graduation: ICF34 = 0.5°, ICF70 = 1°.
    Bake heat resistance: 200°C

    ▼Linear and rotary feeder (transfer rod)
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Bake heat resistance: 200°C

    ▼Others
    If you have any questions about our products, please feel free to contact us from the "Inquiry" button.

    For precision cleaning requests, please click here.

    Maximum temperature 120℃
    Leak rate <1.3x10<sup>-11</sup>Pa･㎥/sec
    Flange material SUS 304
    RoHS2 corresponding ○
    ICF 34
    C 6
    L1 50～350
    L2 625
    stroke 300mm
    Classification Manual
    operation Straight line, rotation
    Maximum permissible thrust 3kg
    way magnet
    Inquiry for this product
  • ICF34 直線・回転導入機 マグネット式 ストローク：300mm
    ICF34 Linear and rotary induction machine, magnetic, stroke: 300 mm
    Product code :27578
    Model:ICF34LRMF300A

    ▼Straight line feeder
    Bellows seal system
    Flange (ICF): 34, 70
    Minimum scale (mm): 0.05
    Bake heat resistance: 200°C
    Life expectancy: 10,000 cycles
    Motor compatible products are also available.

    ▼Rotary feeder
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Minimum graduation: ICF34 = 0.5°, ICF70 = 1°.
    Bake heat resistance: 200°C

    ▼Linear and rotary feeder (transfer rod)
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Bake heat resistance: 200°C

    ▼Others
    If you have any questions about our products, please feel free to contact us from the "Inquiry" button.

    For precision cleaning requests, please click here.

    Maximum temperature 120℃
    Leak rate <1.3x10<sup>-11</sup>Pa･㎥/sec
    Flange material SUS 304
    RoHS2 corresponding ○
    ICF 34
    C 8
    L1 60～360
    L2 300
    stroke 300mm
    Min. Scale -
    Classification Manual
    operation Straight line, rotation
    Maximum permissible thrust Straight travel 2kg / Rotation
    way magnet
    Inquiry for this product
  • ICF34 直線・回転導入機 ストローク:400mm
    ICF34 Linear and rotary feeder Stroke: 400mm
    Product code :27520
    Model:ICF34LRMF400

    ▼Straight line feeder
    Bellows seal system
    Flange (ICF): 34, 70
    Minimum scale (mm): 0.05
    Bake heat resistance: 200°C
    Life expectancy: 10,000 cycles
    Motor compatible products are also available.

    ▼Rotary feeder
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Minimum graduation: ICF34 = 0.5°, ICF70 = 1°.
    Bake heat resistance: 200°C

    ▼Linear and rotary feeder (transfer rod)
    Bellows seal or magnetic coupling are available.
    Flange (ICF): 34, 70
    Bake heat resistance: 200°C

    ▼Others
    If you have any questions about our products, please feel free to contact us from the "Inquiry" button.

    For precision cleaning requests, please click here.

    Maximum temperature 120℃
    Leak rate <1.3x10<sup>-11</sup>Pa･㎥/sec
    Flange material SUS 304
    RoHS2 corresponding ○
    ICF 34
    C 6
    L1 50～450
    L2 625
    stroke 400mm
    Min. Scale 5°
    Classification Manual
    operation Straight line, rotation
    Maximum permissible thrust 3kg
    way magnet
    Inquiry for this product

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Shipping accepted on the day on orders until 17:00 Hours 9:00 to 18:00 except Saturdays, Sundays, and holidays
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