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 Feedthrough
                        Feedthrough
                     Isolator
                        Isolator
                     Viewport
                        Viewport
                     Vacuum Component
                        Vacuum Component
                     Vacuum Valve
                        Vacuum Valve
                     Motion Feedthroughs
                        Motion Feedthroughs
                     Others
                        Others
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| type | BNC | 
|---|---|
| Connection type | The atmosphere-side plug-fitti | 
| electrode | Kovar ® | 
| Flange material | SUS 304 | 
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 450℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| Classification | Flanged terminal | 
| type | Ground shield | 
| Impedance | 50 Ω | 
| Insulation resistance value | 10⁹ ohm | 
| frequency | 100 MHz | 
| Withstand voltage: DC | 1 kV | 
| Electric current / 1 pc. | 3 A | 
| RoHS2 corresponding | ○ | 
| type | BNC | 
|---|---|
| Connection type | The atmosphere-side plug-fitti | 
| electrode | Kovar ® | 
| Flange material | SUS 304 | 
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 450℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| Classification | Flanged terminal | 
| type | Ground shield | 
| Impedance | 50 Ω | 
| frequency | 100 MHz | 
| Insulation resistance value | 10⁹ ohm | 
| Withstand voltage: DC | 1 kV | 
| Electric current / 1 pc. | 3 A | 
| RoHS2 corresponding | ○ | 
| type | BNC | 
|---|---|
| Connection type | The atmosphere-side plug-fitti | 
| electrode | Kovar ® | 
| Flange material | SUS 304 | 
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 450℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| Classification | Flanged terminal | 
| type | Ground shield | 
| Impedance | 50 Ω | 
| frequency | 100 MHz | 
| Insulation resistance value | 10⁹ ohm | 
| Withstand voltage: DC | 5 kV | 
| Electric current / 1 pc. | 3 A | 
| RoHS2 corresponding | ○ | 
| type | BNC | 
|---|---|
| Connection type | The atmosphere-side plug-fitti | 
| electrode | Kovar ® | 
| Flange material | SUS 304 | 
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 450℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| Classification | Flanged terminal | 
| type | Floating shield | 
| Impedance | 50 Ω | 
| frequency | 100 MHz | 
| Insulation resistance value | 10⁹ ohm | 
| Withstand voltage: DC | 1 kV | 
| Electric current / 1 pc. | 3 A | 
| RoHS2 corresponding | ○ | 
| type | BNC | 
|---|---|
| Connection type | The atmosphere-side plug-fitti | 
| electrode | Kovar ® | 
| Flange material | SUS 304 | 
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 450℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| Classification | Flanged terminal | 
| type | Floating shield | 
| Impedance | 50 Ω | 
| frequency | 100 MHz | 
| Insulation resistance value | 10⁹ ohm | 
| Withstand voltage: DC | 1 kV | 
| Electric current / 1 pc. | 3 A | 
| RoHS2 corresponding | ○ | 
| type | BNC | 
|---|---|
| Connection type | Vacuum side and the atmosphere | 
| electrode | Kovar ® | 
| Flange material | SUS 304 | 
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 450℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| Classification | Flanged terminal | 
| type | Ground shield | 
| Impedance | 50 Ω | 
| frequency | 4000 MHz | 
| Insulation resistance value | 10⁹ ohm | 
| Withstand voltage: DC | 1 kV | 
| Electric current / 1 pc. | 3 A | 
| RoHS2 corresponding | ○ | 
| type | BNC | 
|---|---|
| Connection type | Vacuum side and the atmosphere | 
| electrode | Kovar ® | 
| Flange material | SUS 304 | 
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 450℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| Classification | Flanged terminal | 
| type | Floating shield | 
| Impedance | 50 Ω | 
| frequency | 4000 MHz | 
| Insulation resistance value | 10⁹ ohm | 
| Withstand voltage: DC | 1 kV | 
| Electric current / 1 pc. | 3 A | 
| RoHS2 corresponding | ○ | 
| Total current/1 terminal | 9.9 A | 
| type | SHV | 
|---|---|
| Connection type | The atmosphere-side plug-fitti | 
| electrode | Kovar ® | 
| Flange material | SUS 304 | 
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 450℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| Classification | Flanged terminal | 
| type | Ground shield | 
| Impedance | 50 Ω | 
| frequency | 100 MHz | 
| Insulation resistance value | 10⁹ ohm | 
| Withstand voltage: DC | 5 kV | 
| Electric current / 1 pc. | 3 A | 
| RoHS2 corresponding | ○ | 
| type | SHV | 
|---|---|
| Connection type | The atmosphere-side plug-fitti | 
| electrode | Kovar ® | 
| Flange material | SUS 304 | 
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 450℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| Classification | Flanged terminal | 
| type | Ground shield | 
| Impedance | 50 Ω | 
| frequency | 100 MHz | 
| Insulation resistance value | 10⁹ ohm | 
| Withstand voltage: DC | 10 kV | 
| Electric current / 1 pc. | 3 A | 
| RoHS2 corresponding | ○ | 
| type | SHV | 
|---|---|
| Connection type | The atmosphere-side plug-fitti | 
| electrode | Kovar ® | 
| Flange material | SUS 304 | 
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 450℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| Classification | Flanged terminal | 
| type | Ground shield | 
| Impedance | 50 Ω | 
| frequency | 100 MHz | 
| Insulation resistance value | 10⁹ ohm | 
| Withstand voltage: DC | 20 kV | 
| Electric current / 1 pc. | 3 A | 
| RoHS2 corresponding | ○ | 
| type | SHV | 
|---|---|
| Connection type | The atmosphere-side plug-fitti | 
| electrode | Kovar ® | 
| Flange material | SUS 304 | 
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 450℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| Classification | Flanged terminal | 
| type | Floating shield | 
| Impedance | 50 Ω | 
| frequency | 100 MHz | 
| Insulation resistance value | 10⁹ ohm | 
| Withstand voltage: DC | 5 kV | 
| Electric current / 1 pc. | 3 A | 
| RoHS2 corresponding | ○ | 
| type | SHV | 
|---|---|
| Connection type | Vacuum side and the atmosphere | 
| electrode | Kovar ® | 
| Flange material | SUS 304 | 
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 450℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| Classification | Flanged terminal | 
| type | Ground shield | 
| Impedance | 50 Ω | 
| frequency | 100 MHz | 
| Insulation resistance value | 10⁹ ohm | 
| Withstand voltage: DC | 5 kV | 
| Electric current / 1 pc. | 3 A | 
| RoHS2 corresponding | ○ | 
| type | SHV | 
|---|---|
| Connection type | Vacuum side and the atmosphere | 
| electrode | Kovar ® | 
| Flange material | SUS 304 | 
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 450℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| Classification | Flanged terminal | 
| type | Floating shield | 
| Impedance | 50 Ω | 
| frequency | 100 MHz | 
| Insulation resistance value | 10⁹ ohm | 
| Withstand voltage: DC | 5 kV | 
| Electric current / 1 pc. | 3 A | 
| RoHS2 corresponding | ○ | 
| type | MHV | 
|---|---|
| Connection type | The atmosphere-side plug-fitti | 
| electrode | Kovar ® | 
| Flange material | SUS 304 | 
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 450℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| Classification | Flanged terminal | 
| type | Ground shield | 
| Impedance | 50 Ω | 
| frequency | 100 MHz | 
| Insulation resistance value | 10⁹ ohm | 
| Withstand voltage: DC | 5 kV | 
| Electric current / 1 pc. | 3 A | 
| RoHS2 corresponding | ○ | 
| type | MHV | 
|---|---|
| Connection type | The atmosphere-side plug-fitti | 
| electrode | Kovar ® | 
| Flange material | SUS 304 | 
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 450℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| Classification | Flanged terminal | 
| type | Floating shield | 
| Impedance | 50 Ω | 
| frequency | 100 MHz | 
| Insulation resistance value | 10⁹ ohm | 
| Withstand voltage: DC | 5 kV | 
| Electric current / 1 pc. | 3 A | 
| RoHS2 corresponding | ○ | 
| type | MHV | 
|---|---|
| Connection type | Vacuum side and the atmosphere | 
| electrode | Kovar ® | 
| Flange material | SUS 304 | 
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 450℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| Classification | Flanged terminal | 
| type | Ground shield | 
| Impedance | 50 Ω | 
| frequency | 100 MHz | 
| Insulation resistance value | 10⁹ ohm | 
| Withstand voltage: DC | 5 kV | 
| Electric current / 1 pc. | 3 A | 
| RoHS2 corresponding | ○ | 
| type | MHV | 
|---|---|
| Connection type | Vacuum side and the atmosphere | 
| electrode | Kovar ® | 
| Flange material | SUS 304 | 
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 450℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| Classification | Flanged terminal | 
| type | Floating shield | 
| Impedance | 50 Ω | 
| frequency | 100 MHz | 
| Insulation resistance value | 10⁹ ohm | 
| Withstand voltage: DC | 5 kV | 
| Electric current / 1 pc. | 3 A | 
| RoHS2 corresponding | ○ | 
| type | N | 
|---|---|
| Connection type | The atmosphere-side plug-fitti | 
| electrode | Kovar ® | 
| Flange material | SUS 304 | 
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 450℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| Classification | Flanged terminal | 
| type | Ground shield | 
| Impedance | 50 Ω | 
| frequency | 200 MHz | 
| Insulation resistance value | 10⁹ ohm | 
| Withstand voltage: DC | 3 kV | 
| Electric current / 1 pc. | 5 A | 
| RoHS2 corresponding | ○ | 
| type | N | 
|---|---|
| Connection type | The atmosphere-side plug-fitti | 
| electrode | Kovar ® | 
| Flange material | SUS 304 | 
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 450℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| Classification | Flanged terminal | 
| type | Ground shield | 
| Impedance | 50 Ω | 
| frequency | 200 MHz | 
| Insulation resistance value | 10⁹ ohm | 
| Withstand voltage: DC | 3 kV | 
| Electric current / 1 pc. | 5 A | 
| RoHS2 corresponding | ○ | 
| type | N | 
|---|---|
| Connection type | The atmosphere-side plug-fitti | 
| electrode | Kovar ® | 
| Flange material | SUS 304 | 
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 450℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| Classification | Flanged terminal | 
| type | Floating shield | 
| Impedance | 50 Ω | 
| frequency | 200 MHz | 
| Insulation resistance value | 10⁹ ohm | 
| Withstand voltage: DC | 3 kV | 
| Electric current / 1 pc. | 5 A | 
| RoHS2 corresponding | ○ |