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- Cosmotec for Vacuum Components
- Vacuum Component
Vacuum Component Product List Vacuum Component
Category 17Matter
Subcategory 308Matter (141 ~160 )
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Main materials SUS304(L type), SUS304L(Y,Z ty Flexible / bellows AM-350 Leakage rate (hood section) <1.0x10<sup>-10</sup>Pa･㎥/sec Leak rate (sheet leakage) <1.0x10<sup>-10</sup>Pa･㎥/sec RoHS2 corresponding ○ -
Flange material SUS 304 body SUS 316 Flexible / bellows SUS 321 handle Aluminum 2024-T4 Maximum temperature 150℃ Available pressure Atmospheric pressure ~ 10<sup> Leak rate <1.3x10<sup>-7</sup>Pa･㎥/sec RoHS2 corresponding ○ -
Leak rate <1x10<sup>-7</sup>Pa･ℓ/sec Available pressure 10<sup>-6</sup> Pa ～0.5Mpa - In opening direction ≤ 0.2 MPa - in closing direction ≤ 0.5 Mpa Differential pressure at opening ≤ 0.1 Mpa Cycles until first service 2,000,000 (unheated and under 使用可能温度（ボディ） 150 ℃ 使用可能温度（アクチュエーター） 120 ℃ 使用可能温度（ポジションインディケーター） 70 ℃ body SUS 316 プレート SUS 316 ベローズ SUS 316 Bonnet seal FKM(Viton®) ポジションインディケーター（接点 10 - 28V/DC, 1 - 50 mA -
Main materials SUS 304 Leak rate <5x10<sup>-9</sup>Pa･㎥/sec O-ring Viton ® RoHS2 corresponding ○ -
Available pressure Atmospheric pressure ~ 10<sup> Leakage when valve is fully clos <6.7x10<sup>-11</sup>Pa･㎥/sec Orifice diameter Φ3.5 mm Maximum temperature 125℃ Seal / gasket material Viton ® Shaft seal lubricant Silicone grease for high vacuu Valve body shaft SUS 304 valve Brass (Ni plating) handle phenol resin -
Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○
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Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○ -
Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○ -
Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○ -
Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○ -
Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○ -
Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○
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Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○ -
Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○ -
Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○ -
Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○ -
Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○ -
Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○
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Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 -
Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○
