About 10,000 types of vacuum components in stock at all times.Business Hours: 9:00-18:00, excluding weekends and holidays
Feedthrough
Isolator
Viewport
Vacuum Component
Vacuum Valve
Motion Feedthroughs
Others
| O-ring | Viton ® |
|---|---|
| The inner ring | SUS 304 |
| Maximum temperature | 150℃ |
| The lowest temperature | -20℃ |
| RoHS2 corresponding | ○ |
| O-ring | Viton ® |
|---|---|
| The inner ring | SUS 304 |
| Maximum temperature | 150℃ |
| The lowest temperature | -20℃ |
| RoHS2 corresponding | ○ |
| The inner ring | SUS 304 |
|---|---|
| Seal / gasket material | Viton ® |
| Maximum temperature | 150℃ |
| The lowest temperature | -20℃ |
| RoHS2 corresponding | ○ |
| Flange material | SUS 304 |
|---|---|
| The inner surface processing | Buff 400 (equivalent to Ra 1.0 |
| RoHS2 corresponding | ○ |
| Flange material | SUS 304 |
|---|---|
| The inner surface processing | Buff 400 (equivalent to Ra 1.0 |
| RoHS2 corresponding | ○ |
| Flange material | SUS 304 |
|---|---|
| The inner surface processing | Buff 400 (equivalent to Ra 1.0 |
| RoHS2 corresponding | ○ |
| Available pressure | 0.12MPa ~10<sup>-6</sup> Pa |
|---|---|
| Leak rate | <1x10<sup>-7</sup>Pa・ℓ/sec |
| The lowest temperature | 10℃ |
| Maximum temperature | 150℃ |
| Cycles until first service | 2,000,000 (unheated and under |
| The input power voltage | 24 VDC (±10%) @0.5V pk-pk max. |
| The input power power | 80 W max. (operation of valve |