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Category 8Matter
Subcategory 659Matter (621 ~640 )
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Classification Peripheral components Total current/1 terminal Milli RoHS2 corresponding ○ -
Withstand voltage: DC 500 V Insulation resistance value 10⁹ ohm frequency 10 MHz Connection type BURNDY Flange material SUS 304 sleeve Kovar ® Insulator Alumina ceramic Maximum temperature 450℃ The lowest temperature -196℃ Leak rate <1.3x10<sup>-10</sup>Pa･㎥/sec RoHS2 corresponding ○ -
Flange material SUS304（NW only SUS316) Flexible / bellows SUS 316L life cycle 10000 cycle Bellows plate thickness 0.15 Maximum temperature 450℃ The lowest temperature -196℃ RoHS2 corresponding ○ -
type USB3.1 female Connection type USB Insulator Epoxy -
type D-Sub Connection type D-Sub(MIL-C-24308) electrode Kovar ® Flange material SUS 304 Insulator Glass Maximum temperature 200℃ Leak rate <1.0x10<sup>-8</sup>Pa･㎥/sec Electric current / 1 pc. 5 A Withstand voltage: DC 500 V
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Withstand voltage: DC 500 V Electric current / 1 pc. 5 A Cable sheathing Kapton ® conductor Ag-plated copper wire Insulator PEEK® Maximum temperature 250℃ Vacuum and Air For vacuum RoHS2 corresponding ○ -
Maximum temperature 80℃ Vacuum and Air For the atmosphere -
Flange material SUS 304L window barium fluoride (BaF2) Maximum temperature 120℃ The lowest temperature -45℃
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Maximum temperature 60℃ The lowest temperature 5℃ Available pressure Vacuum～0.9MPa(G) Orifice diameter Φ3mm Available gases Air and inert gas -
Available pressure Atmospheric pressure ~ 10<sup> Leak rate <5x10<sup>-7</sup>Pa･㎥/sec conductance 420 L/min (value in molecular Cycles until first service 30,000 or 1 year Available gases Atmosphere or gases (excluding Maximum temperature 40℃ The lowest temperature 10℃
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type High voltage and high current electrode Oxygen-free copper + Ni platin Flange material SUS 304 sleeve Kovar ® Insulator Alumina ceramic Maximum temperature 450℃ The lowest temperature -196℃ Leak rate <1.3x10<sup>-10</sup>Pa･㎥/sec Insulation resistance value 10⁹ ohm Withstand voltage: DC 5 kV Electric current / 1 pc. 110 A Feedthrough 5 kV / 110 A
