About 10,000 types of vacuum components in stock at all times.Business Hours： 9:00-18:00, excluding weekends and holidays

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Product Category
  • Feedthrough Feedthrough
    Feedthrough
  • Isolator Isolator
    Isolator
  • Viewport Viewport
    Viewport
  • Vacuum Component Vacuum Component
    Vacuum Component
  • Vacuum Valve Vacuum Valve
    Vacuum Valve
  • Motion Feedthroughs Motion Feedthroughs
    Motion Feedthroughs
  • Others Others
    Others
Contact Us
Shipping accepted on the day on orders until 17:00
(Hours 9:00 to 18:00 except Saturdays, Sundays, and holidays)
  1. Cosmotec for Vacuum Components
  2. Feedthrough
  3. stage
  4. stage

stage

stage

▼Stages
ICF flange standard movable stages
Type: XY axis, XYZ axis, linear stage
Moving parts are bellows-sealed
Bake heat resistance: up to 200°C

▼Others
If you have any questions about our products, please feel free to contact us by clicking the "Inquiry" button.

For precision cleaning requests, please click here.

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Basic Information
Main materials SUS 304
Inquiry for this subcategory

We have 12 type candidate

※ Please click on the product code or model for more information.

front.product.product_code
Model
 ICF X axis Y axis Z axis stroke Repeatability life cycle Inner diameter
Stock & Delivery
front.product.price
front.product.tax_included2
27566
ICF70XY5S
70 ±5 ±5 - - 0.1 mm or less 100 times 38.5
27567
ICF114XY7.5S
114 ±7.5 ±7.5 - - 0.1 mm or less 100 times 49.5
27568
ICF70XY5HP
70 ±5 ±5 - - 0.01 mm or less 5000 times 35
27569
ICF114XY7.5HP
114 ±7.5 ±7.5 - - 0.05 mm or less 10000 cycle 50
27570
ICF114XY12.5HP
114 ±12.5 ±12.5 - - 0.05 mm or less 10000 cycle 60
27571
ICF152XY12.5HP
152 ±12.5 ±12.5 - - 0.05 mm or less 5000 times 95
27572
ICF203XY12.5HP
203 ±12.5 ±12.5 - - 0.01 mm or less 10000 cycle 95
27573
ICF152XYZ12.5S
152 / 70 / 34 ±12.5 ±12.5 ±50 - XY: 0.01 mm or less, Z: 0.1 m 10000 cycle 36
27574
ICF34LS25
34 - - - 25 ｍｍ 0.2 mm or less - 15
27575
ICF34LS50
34 - - - 50 mm 0.2 mm or less - 15
27576
ICF70LS25
70 - - - 25 ｍｍ 0.2 mm or less - 36
27577
ICF70LS50
70 - - - 50 mm 0.2 mm or less - 36
ICF X axis Y axis Z axis stroke Repeatability life cycle Inner diameter
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Shipping accepted on the day on orders until 17:00 Hours 9:00 to 18:00 except Saturdays, Sundays, and holidays
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