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Category 8Matter
Subcategory 634Matter (601 ~620 )
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Available pressure 0.12MPa ～10<sup>-6</sup> Pa Leak rate <1x10<sup>-7</sup>Pa･ℓ/sec The lowest temperature 10℃ Maximum temperature 150℃ Cycles until first service 2,000,000 (unheated and under The input power voltage 24 VDC (±10%) @0.5V pk-pk max. The input power power 80 W max. (operation of valve -
Leak rate <1.3x10<sup>-10</sup>Pa･㎥/sec Maximum temperature 150°C (body), 80°C (overall) type Valve O-ring included body SUS 304 -
type High voltage and high current electrode Oxygen-free copper Flange material SUS 304 sleeve Kovar ® Insulator Alumina ceramic Maximum temperature 450℃ The lowest temperature -196℃ Leak rate <1.3x10<sup>-10</sup>Pa･㎥/sec Insulation resistance value 10⁹ ohm Withstand voltage: DC 5 kV Electric current / 1 pc. 110 A Feedthrough 5 kV / 110 A
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Leak rate <1x10<sup>-7</sup>Pa･ℓ/sec Available pressure 10<sup>-6</sup> Pa ～0.5Mpa - In opening direction ≤ 0.2 MPa - in closing direction ≤ 0.5 Mpa Differential pressure at opening ≤ 0.1 Mpa Cycles until first service 2,000,000 (unheated and under 使用可能温度（ボディ） 150 ℃ 使用可能温度（アクチュエーター） 120 ℃ 使用可能温度（ポジションインディケーター） 70 ℃ body SUS 316 プレート SUS 316 ベローズ SUS 316 Bonnet seal FKM(Viton®) ポジションインディケーター（接点 10 - 28V/DC, 1 - 50 mA -
type High voltage and high current electrode Oxygen-free copper Flange material SUS 304 sleeve Kovar ® Insulator Alumina ceramic Maximum temperature 450℃ The lowest temperature -196℃ Leak rate <1.3x10<sup>-10</sup>Pa･㎥/sec Insulation resistance value 10⁹ ohm Withstand voltage: DC 6 kV Electric current / 1 pc. 145 A Feedthrough 6 kV / 145 A -
Flange material SUS 304 The inner surface processing Machined (Ra3.2 equivalent) RoHS2 corresponding ○ -
Flange material SUS 304 The inner surface processing Machined (Ra3.2 equivalent) RoHS2 corresponding ○ -
Main materials Aluminum/polycarbonate O-ring FPM Available pressure 13.3 Pa mass 3.0 Kg capacity 3.3 L -
The inner surface processing GBB Processing RoHS2 corresponding ○
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Available pressure Atmospheric pressure ~ 10<sup> Leakage when valve is fully clos <6.7x10<sup>-11</sup>Pa･㎥/sec Orifice diameter Φ3.5 mm Maximum temperature 125℃ Seal / gasket material Viton ® Shaft seal lubricant Silicone grease for high vacuu Valve body shaft SUS 304 valve Brass (Ni plating) handle phenol resin -
Available pressure Atmospheric pressure ~ 10<sup> Adjustable minimum leakage*1 <6.7x10<sup>-9</sup>Pa･㎥/sec Leakage when valve is fully clos <6.7x10<sup>-11</sup>Pa･㎥/sec Maximum temperature 450℃ body SUS 304 Seal / gasket material WC Series Superabrasives/Cu Al -
Material SUS 304 The inner surface processing GBB Processing RoHS2 corresponding ○ -
Material SUS 304 The inner surface processing GBB Processing RoHS2 corresponding ○
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Flange material SUS 304 The inner surface processing Buff 400 (equivalent to Ra 1.0 RoHS2 corresponding ○ -
The inner ring SUS 304 Seal / gasket material Viton ® Maximum temperature 150℃ The lowest temperature -20℃ RoHS2 corresponding ○
