About 10,000 types of vacuum components in stock at all times.Business Hours： 9:00-18:00, excluding weekends and holidays

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  • Feedthrough Feedthrough
    Feedthrough
  • Isolator Isolator
    Isolator
  • Viewport Viewport
    Viewport
  • Vacuum Component Vacuum Component
    Vacuum Component
  • Vacuum Valve Vacuum Valve
    Vacuum Valve
  • Motion Feedthroughs Motion Feedthroughs
    Motion Feedthroughs
  • Others Others
    Others
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Shipping accepted on the day on orders until 17:00
(Hours 9:00 to 18:00 except Saturdays, Sundays, and holidays)
  1. Cosmotec for Vacuum Components
  2. Feedthrough
  3. stage
  4. Straight line feeder/straight line and rotary feed
  1. Cosmotec for Vacuum Components
  2. Feedthrough
  3. Straight line/and rotary feeder
  4. Straight line feeder/straight line and rotary feed

Straight line feeder/straight line and rotary feed

Straight line feeder/straight line and rotary feed

▼Straight line feeder
Bellows seal system
Flange (ICF): 34, 70
Minimum scale (mm): 0.05
Bake heat resistance: 200°C
Life expectancy: 10,000 cycles
Motor compatible products are also available.

▼Rotary feeder
Bellows seal or magnetic coupling are available.
Flange (ICF): 34, 70
Minimum graduation: ICF34 = 0.5°, ICF70 = 1°.
Bake heat resistance: 200°C

▼Linear and rotary feeder (transfer rod)
Bellows seal or magnetic coupling are available.
Flange (ICF): 34, 70
Bake heat resistance: 200°C

▼Others
If you have any questions about our products, please feel free to contact us from the "Inquiry" button.

For precision cleaning requests, please click here.

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Basic Information
Maximum temperature 120℃
Leak rate <1.3x10-11Pa･㎥/sec
Flange material SUS 304
RoHS2 corresponding ○
Inquiry for this subcategory

We have 29 type candidate

※ Please click on the product code or model for more information.

front.product.product_code
Model
 ICF C L1 L2 stroke Feed rate Classification operation Maximum permissible thrust way
Stock & Delivery
front.product.price
front.product.tax_included2
27449
ICF34LMFM22
34 6 40～62 190.5 22 mm 1mm/Rev Manual Straight line only 15kg bellows
27581
ICF34LMF25A
34 6 50～75 138 25 ｍｍ 1mm/Rev Manual Straight line only 12kg bellows
27448
ICF34LMF40
34 6 30～70 175 40 ｍｍ 1mm/Rev Manual Straight line only 15kg bellows
27582
ICF34LMF50A
34 6 50～100 184 50 mm 1mm/Rev Manual Straight line only 12kg bellows
27583
ICF70LMF25A
70 10 50～75 152 25 ｍｍ 2mm/Rev Manual Straight line only 20kg bellows
27445
ICF70LMF40
70 8 50～90 170 40 ｍｍ 1mm/Rev Manual Straight line only 15kg bellows
27584
ICF70LMF50A
70 10 50～100 190 50 mm 2mm/Rev Manual Straight line only 20kg bellows
27446
ICF70LMF70
70 8 50～120 253 70 ｍｍ 1mm/Rev Manual Straight line only 15kg bellows
27447
ICF70LMF100
70 8 50～150 333 100 ｍｍ 1mm/Rev Manual Straight line only 15kg bellows
27444
ICF70LMFA80
70 6 50～130 447.2 80 ｍｍ 1mm/Rev(0.02μm/pulse) motor Straight line only 15kg bellows
27588
ICF34BRMF50
34 6 50 85 - - Manual Rotation only Straight line/rotation 10kg bellows
27589
ICF70BRMF50
70 10 50 125 - - Manual Rotation only - bellows
27585
ICF34MRMF50
34 6 50 127 - - Manual Rotation only 7.5kg (12kg for deconditioning magnet
27586
ICF70MRMF50
70 15 50 107.5 - - Manual Rotation only 30kg (35kg for deconditioning) magnet
27587
ICF70MRMF50HT
70 15 50 150.5 - - Manual Rotation only 60kg (70kg de-tuning) magnet
27517
ICF34LRMF100
34 6 50～150 625 100 ｍｍ - Manual Straight line, rotation 3kg magnet
27518
ICF34LRMF200
34 6 50～250 625 200 mm - Manual Straight line, rotation 3kg magnet
27519
ICF34LRMF300
34 6 50～350 625 300mm - Manual Straight line, rotation 3kg magnet
27578
ICF34LRMF300A
34 8 60～360 300 300mm - Manual Straight line, rotation Straight travel 2kg / Rotation magnet
27520
ICF34LRMF400
34 6 50～450 625 400mm - Manual Straight line, rotation 3kg magnet
27521
ICF34LRMF500
34 6 50～550 625 500 mm - Manual Straight line, rotation 3kg magnet
27522
ICF70LRMF100
70 10 50～150 654 100 ｍｍ - Manual Straight line, rotation 直進/回転5kg magnet
27523
ICF70LRMF200
70 10 50～250 654 200 mm - Manual Straight line, rotation 直進/回転5kg magnet
27524
ICF70LRMF300
70 10 50～350 654 300mm - Manual Straight line, rotation 直進/回転5kg magnet
27525
ICF70LRMF400
70 10 50～450 654 400mm - Manual Straight line, rotation 直進/回転5kg magnet
27526
ICF70LRMF500
70 10 50～550 654 500 mm - Manual Straight line, rotation 直進/回転5kg magnet
28020
ICF70LRMF500SA
70 10 50～550 654 500 mm - Manual Straight line, rotation 直進/回転5kg magnet
27579
ICF70LRMF500A
70 13.8 80～580 500 500 mm - Manual Straight line, rotation 直進/回転5kg magnet
27580
ICF114LRMF700A
114 17.3 80～780 861 700 mm - Manual Straight line, rotation Straight travel 7kg / Rotation magnet
ICF C L1 L2 stroke Feed rate Classification operation Maximum permissible thrust way
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Shipping accepted on the day on orders until 17:00 Hours 9:00 to 18:00 except Saturdays, Sundays, and holidays
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