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| Flange material | SUS 304 |
|---|---|
| The inner surface processing | Buff 400 (equivalent to Ra 1.0 |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| Tubes / Pipes | SUS 304 |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| Tubes / Pipes | SUS 304 |
| RoHS2 corresponding | ○ |
| Flange material | SUS 304 |
|---|---|
| The inner surface processing | Buff 400 (equivalent to Ra 1.0 |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| Tubes / Pipes | SUS 304 |
| The inner surface processing | GBB Processing |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| RoHS2 corresponding | ○ |
| Classification | Peripheral components |
|---|---|
| Vacuum and Air | For vacuum |
| RoHS2 corresponding | ○ |
| Connection type | QD1KJBA |
|---|---|
| magnet | Samarium cobalt |
| Long-life cathode | None |
| Baking possible temperature (the | 100 ℃ |
| Baking possible temperature (pow | 350 ℃ |
| The input power voltage | 12±1% V DC |
| The input power current | 250~700 mA |
| Input power frequency | 50/60 Hz |
| The input power power | 3~8.5 W |
| Output power voltage | +3500±20% |
| Output power voltage (short circ | Output 1: 0 to 5, output 2: 0 |
| Output Power current | 1000 mA |
| Output power current (short circ | 5 mA |
| Output Power power | 1.1 W max. |
| Environmental Operating temperat | 0~60 ℃ |
| Environmental humidity range (no | 0~80 % |
| Analog output signal recommended | >1 MΩ |
| Bootable pressure | 1.3x10<sup>-2</sup> |
| shell | A5052 + Ni plating |
|---|---|
| Insulator | PEEK® |
| Maximum temperature | 100℃ |
| The lowest temperature | -196℃ |
| RoHS2 corresponding | ○ |
| Vacuum and Air | For vacuum |
| screw | SUS |
|---|---|
| Insulator | PEEK® |
| Maximum temperature | 250℃ |
| Leak rate | <1.0x10<sup>-8</sup>Pa・㎥/sec |
| RoHS2 corresponding | ○ |
| Vacuum and Air | For vacuum |
| Available pressure | 0.12MPa ~10<sup>-6</sup> Pa |
|---|---|
| Leak rate | <1x10<sup>-7</sup>Pa・ℓ/sec |
| The lowest temperature | 10℃ |
| Maximum temperature | 150℃ |
| Cycles until first service | 2,000,000 (unheated and under |
| The input power voltage | 24 VDC (±10%) @0.5V pk-pk max. |
| The input power power | 80 W max. (operation of valve |