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Feedthrough
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| type | High Voltage RF |
|---|---|
| electrode | Oxygen-free copper |
| Flange material | SUS 304 |
| Insulator | Alumina ceramic |
| Maximum temperature | 450℃ |
| The lowest temperature | -100℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| Withstand voltage: DC | 8 kV |
| Electric current / 1 pc. | N/A |
| Feedthrough | 8 kV |
| type | High Voltage RF |
|---|---|
| electrode | Oxygen-free copper |
| Flange material | SUS 304 |
| Insulator | Alumina ceramic |
| Maximum temperature | 450℃ |
| The lowest temperature | -100℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| Withstand voltage: DC | 10 kV |
| Electric current / 1 pc. | N/A |
| Feedthrough | 10 kV |
| type | Water-cooled terminal |
|---|---|
| Flange material | SUS 304 |
| Insulator | Alumina ceramic |
| Maximum temperature | 450℃ |
| The lowest temperature | -196℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| Insulation resistance value | 10⁹ ohm |
| type | Low voltage and medium current |
|---|---|
| electrode | molybdenum (Mo) |
| Flange material | SUS 304 |
| Maximum temperature | 450℃ |
| The lowest temperature | -100℃ |
| Leak rate | <1x10<sup>-8</sup>Pa・㎥/sec |
| Withstand voltage: DC | 700 V |
| Electric current / 1 pc. | 28 A |
| Connection type | MS |
| type | High-voltage and medium curren |
|---|---|
| electrode | Oxygen-free copper |
| Flange material | SUS 304 |
| sleeve | Kovar ® |
| Insulator | Alumina ceramic |
| Maximum temperature | 450℃ |
| The lowest temperature | -196℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| Insulation resistance value | 10⁹ ohm |
| Withstand voltage: DC | 3 kV |
| Electric current / 1 pc. | 35 A |
| Feedthrough | 3 kV / 35 A |
| type | High-voltage and medium curren |
|---|---|
| electrode | Oxygen-free copper + Ni platin |
| Flange material | SUS 304 |
| sleeve | Kovar ® |
| Insulator | Alumina ceramic |
| Maximum temperature | 450℃ |
| The lowest temperature | -196℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| Insulation resistance value | 10⁹ ohm |
| Withstand voltage: DC | 3 kV |
| Electric current / 1 pc. | 35 A |
| Feedthrough | 3 kV / 35 A |
| type | High-voltage and medium curren |
|---|---|
| electrode | Oxygen-free copper |
| Flange material | SUS 304 |
| sleeve | Kovar ® |
| Insulator | Alumina ceramic |
| Maximum temperature | 450℃ |
| The lowest temperature | -196℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| Insulation resistance value | 10⁹ ohm |
| Withstand voltage: DC | 3 kV |
| Electric current / 1 pc. | 35 A |
| Feedthrough | 3 kV / 35 A |
| type | High voltage and high current |
|---|---|
| electrode | Oxygen-free copper |
| Flange material | SUS 304 |
| sleeve | Kovar ® |
| Insulator | Alumina ceramic |
| Maximum temperature | 450℃ |
| The lowest temperature | -196℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| Insulation resistance value | 10⁹ ohm |
| Withstand voltage: DC | 5 kV |
| Electric current / 1 pc. | 110 A |
| Feedthrough | 5 kV / 110 A |
| type | High voltage and high current |
|---|---|
| electrode | Oxygen-free copper + Ni platin |
| Flange material | SUS 304 |
| sleeve | Kovar ® |
| Insulator | Alumina ceramic |
| Maximum temperature | 450℃ |
| The lowest temperature | -196℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| Insulation resistance value | 10⁹ ohm |
| Withstand voltage: DC | 5 kV |
| Electric current / 1 pc. | 110 A |
| Feedthrough | 5 kV / 110 A |
| type | High voltage and high current |
|---|---|
| electrode | Oxygen-free copper |
| Flange material | SUS 304 |
| sleeve | Kovar ® |
| Insulator | Alumina ceramic |
| Maximum temperature | 450℃ |
| The lowest temperature | -196℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| Insulation resistance value | 10⁹ ohm |
| Withstand voltage: DC | 5 kV |
| Electric current / 1 pc. | 110 A |
| Feedthrough | 5 kV / 110 A |
| type | High voltage and high current |
|---|---|
| Feedthrough | 5 kV / 110 A |
| Electric current / 1 pc. | 110 A |
| Withstand voltage: DC | 5 kV |
| Insulation resistance value | 10⁹ ohm |
| electrode | Oxygen-free copper |
| Flange material | SUS 304 |
| sleeve | Kovar ® |
| Insulator | Alumina ceramic |
| Maximum temperature | 450℃ |
| The lowest temperature | -196℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| type | High voltage and high current |
|---|---|
| electrode | Oxygen-free copper + Ni platin |
| Flange material | SUS 304 |
| sleeve | Kovar ® |
| Insulator | Alumina ceramic |
| Maximum temperature | 450℃ |
| The lowest temperature | -196℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| Insulation resistance value | 10⁹ ohm |
| Withstand voltage: DC | 5 kV |
| Electric current / 1 pc. | 110 A |
| Feedthrough | 5 kV / 110 A |
| Flange material | SUS 304 |
|---|---|
| sleeve | Kovar ® |
| Insulator | Alumina ceramic |
| Maximum temperature | 450℃ |
| The lowest temperature | -196℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| Insulation resistance value | 10⁹ ohm |
| Withstand voltage: DC | 5 kV |
| Flange material | SUS 304 |
|---|---|
| sleeve | Kovar ® |
| Insulator | Alumina ceramic |
| Maximum temperature | 450℃ |
| The lowest temperature | -196℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| Insulation resistance value | 10⁹ ohm |
| Withstand voltage: DC | 5 kV |
| The number of electrode | 1 |
| Flange material | SUS 304 |
|---|---|
| sleeve | Kovar ® |
| Insulator | Alumina ceramic |
| Maximum temperature | 450℃ |
| The lowest temperature | -196℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| Insulation resistance value | 10⁹ ohm |
| Withstand voltage: DC | 5 kV |
| The number of electrode | 1 |
| type | High-voltage and medium curren |
|---|---|
| electrode | Oxygen-free copper |
| Flange material | SUS 304 |
| sleeve | SUS 430 |
| Insulator | Alumina ceramic |
| Maximum temperature | 450℃ |
| The lowest temperature | -196℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| Insulation resistance value | 10⁹ ohm |
| Withstand voltage: DC | 5 kV |
| Electric current / 1 pc. | 22 A |
| Feedthrough | 5 kV / 22 A |
| type | High voltage and low current |
|---|---|
| electrode | SUS 304 |
| Flange material | SUS 304 |
| sleeve | SUS 430 |
| Insulator | Alumina ceramic |
| Maximum temperature | 450℃ |
| The lowest temperature | -196℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| Insulation resistance value | 10⁹ ohm |
| Withstand voltage: DC | 5 kV |
| Electric current / 1 pc. | 3 A |
| Feedthrough | 5 kV / 3 A |
| type | High voltage and high current |
|---|---|
| electrode | Oxygen-free copper |
| Flange material | SUS 304 |
| sleeve | Kovar ® |
| Insulator | Alumina ceramic |
| Maximum temperature | 450℃ |
| The lowest temperature | -196℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| Insulation resistance value | 10⁹ ohm |
| Withstand voltage: DC | 6 kV |
| Electric current / 1 pc. | 145 A |
| Feedthrough | 6 kV / 145 A |
| Flange material | SUS 304 |
|---|---|
| sleeve | Kovar ® |
| Insulator | Alumina ceramic |
| Maximum temperature | 450℃ |
| The lowest temperature | -196℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| Insulation resistance value | 10⁹ ohm |
| Withstand voltage: DC | 10 kV |
| The number of electrode | 1 |
| Flange material | SUS 304 |
|---|---|
| sleeve | Kovar ® |
| Insulator | Alumina ceramic |
| Maximum temperature | 450℃ |
| The lowest temperature | -196℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| Insulation resistance value | 10⁹ ohm |
| Withstand voltage: DC | 10 kV |
| The number of electrode | 1 |