About 10,000 types of vacuum components in stock at all times.Business Hours: 9:00-18:00, excluding weekends and holidays
Feedthrough
Isolator
Viewport
Vacuum Component
Vacuum Valve
Motion Feedthroughs
Others
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
|---|---|
| Maximum temperature | 150°C (body), 80°C (overall) |
| type | Valve O-ring included |
| body | SUS 304 |
| Available pressure | 0.12MPa ~10<sup>-6</sup> Pa |
|---|---|
| Leak rate | <1x10<sup>-7</sup>Pa・ℓ/sec |
| The lowest temperature | 10℃ |
| Maximum temperature | 150℃ |
| Cycles until first service | 2,000,000 (unheated and under |
| The input power voltage | 24 VDC (±10%) @0.5V pk-pk max. |
| The input power power | 80 W max. (operation of valve |
| Maximum temperature | 200°C (body), 80°C (overall) |
|---|---|
| Available pressure | 600 kpa~ 1.33x10-5 kpa |
| Leak rate | <1.0x10<sup>-9</sup>Pa・㎥/sec |
| Main materials | SUS 316 (double-acting), SUS31 |
| Surface Material | SUS 316 (double-acting), SUS31 |
| Seal / gasket material | PTFE |
| The inner surface processing | Ra ≤ 0.8μm |
| The lowest temperature | -180℃ |
|---|---|
| Maximum temperature | 400℃ |
| Tubes / Pipes | SUS |
|---|---|
| Glass | Borosilicate glass |
| The lowest temperature | -180℃ |
| Maximum temperature | 400℃ |
| The lowest temperature | -180℃ |
|---|---|
| Maximum temperature | 400℃ |
| Tubes / Pipes | SUS |
|---|---|
| Glass | Borosilicate glass |
| The lowest temperature | -180℃ |
| Maximum temperature | 400℃ |
| The lowest temperature | -180℃ |
|---|---|
| Maximum temperature | 400℃ |
| The lowest temperature | -180℃ |
|---|---|
| Maximum temperature | 450℃ |
| Tubes / Pipes | SUS |
|---|---|
| Glass | Borosilicate glass |
| The lowest temperature | -180℃ |
| Maximum temperature | 400℃ |
| Main materials | Aluminum/polycarbonate |
|---|---|
| O-ring | FPM |
| Available pressure | 13.3 Pa |
| mass | 3.0 Kg |
| capacity | 3.3 L |
| Flange material | SUS 304 |
|---|---|
| Tubes / Pipes | SUS 304 |
| RoHS2 corresponding | ○ |
| Flange material | SUS 304 |
|---|---|
| Tubes / Pipes | SUS 316L |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| Tubes / Pipes | SUS 316L |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| Tubes / Pipes | SUS 316L |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| Tubes / Pipes | SUS 316L |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| Tubes / Pipes | SUS 316L |
| RoHS2 corresponding | ○ |