About 10,000 types of vacuum components in stock at all times.Business Hours: 9:00-18:00, excluding weekends and holidays
Feedthrough
Isolator
Viewport
Vacuum Component
Vacuum Valve
Motion Feedthroughs
Others
| Flange material | SUS 304 |
|---|---|
| window | Borosilicate glass |
| Maximum temperature | 350℃ |
| Leak rate | <1.0x10<sup>-8</sup>Pa・㎥/sec |
| RoHS2 corresponding | ○ |
| strap | stainless |
|---|---|
| Clamping screw | stainless |
| Clamping bolt | stainless |
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Corresponding seal | Elastomer seal only |
| Pressurization | ○ |
| Non-magnetic | ○ |
| Clean Room | ○ |
| Insulation | ○ |
| RoHS2 corresponding | ○ |
| Flange material | SUS 304 |
|---|---|
| body | SUS 316 |
| Flexible / bellows | SUS 321 |
| handle | Aluminum 2024-T4 |
| Maximum temperature | 150℃ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Leak rate | <1.3x10<sup>-7</sup>Pa・㎥/sec |
| RoHS2 corresponding | ○ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Adjustable minimum leakage*1 | <6.7x10<sup>-9</sup>Pa・㎥/sec |
| Leakage when valve is fully clos | <6.7x10<sup>-11</sup>Pa・㎥/sec |
| Maximum temperature | 450℃ |
| body | SUS 304 |
| Seal / gasket material | WC Series Superabrasives/Cu Al |
| Flange material | SUS 304 |
|---|---|
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Leak rate | <1.3x10<sup>-7</sup>Pa・ℓ/sec |
| RoHS2 corresponding | ○ |
| Seal / gasket material | Viton ® |
|---|---|
| body | SUS 304 |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| Tubes / Pipes | SUS 304 |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| Tubes / Pipes | SUS 304 |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| Tubes / Pipes | SUS 304 |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| Tubes / Pipes | SUS 304 |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| Tubes / Pipes | SUS 304 |
| RoHS2 corresponding | ○ |
| Flange material | SUS 304 |
|---|---|
| Tubes / Pipes | SUS 304 |
| RoHS2 corresponding | ○ |
| Flange material | SUS304(NW only SUS316) |
|---|---|
| Flexible / bellows | SUS 316L |
| life cycle | 10000 cycle |
| Bellows plate thickness | 0.15 |
| Maximum temperature | 450℃ |
| The lowest temperature | -196℃ |
| RoHS2 corresponding | ○ |
| Seal / gasket material | Viton ® |
|---|---|
| body | SUS 304 |
| RoHS2 corresponding | ○ |
| Seal / gasket material | Viton ® |
|---|---|
| body | SUS 304 |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| Tubes / Pipes | SUS 304 |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| Tubes / Pipes | SUS 304 |
| RoHS2 corresponding | ○ |