About 10,000 types of vacuum components in stock at all times.Business Hours： 9:00-18:00, excluding weekends and holidays
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(Hours 9:00 to 18:00 except Saturdays, Sundays, and holidays)
(Hours 9:00 to 18:00 except Saturdays, Sundays, and holidays)
- Cosmotec for Vacuum Components
- Vacuum Component
Vacuum Component Product List Vacuum Component
Category 16Matter
Subcategory 413Matter (321 ~340 )
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Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○ -
Main materials Thermoplastic elastomer (TPE) Maximum temperature 80℃ RoHS2 corresponding ○ -
Main materials SUS 304 Leak rate <5x10<sup>-9</sup>Pa･㎥/sec O-ring Viton ® RoHS2 corresponding ○ -
Available pressure Atmospheric pressure ~ 10<sup> Leakage when valve is fully clos <6.7x10<sup>-11</sup>Pa･㎥/sec Orifice diameter Φ3.5 mm Maximum temperature 125℃ Seal / gasket material Viton ® Shaft seal lubricant Silicone grease for high vacuu Valve body shaft SUS 304 valve Brass (Ni plating) handle phenol resin
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window Magnesium fluoride Maximum temperature 200℃ The lowest temperature -100℃ -
Flange material SUS 304 window Calcium fluoride Maximum temperature 200℃ The lowest temperature -100℃ RoHS2 corresponding ○ -
Flange material SUS 304 window germanium Maximum temperature 200℃ The lowest temperature -100℃ -
window Synthetic quartz Maximum temperature 200℃ The lowest temperature -100℃ RoHS2 corresponding ○ -
window Zinc selenide Maximum temperature 200℃ The lowest temperature -100℃ AR coating ○
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Available pressure Atmospheric pressure ~ 10<sup> Corresponding seal Dedicated elastomeric seal Non-magnetic ○ chemical resistance ◎ Clean Room ○ Insulation ○ RoHS2 corresponding ○ -
Flange material SUS 304 body SUS 316 Flexible / bellows SUS 321 handle Aluminum 2024-T4 Maximum temperature 150℃ Available pressure Atmospheric pressure ~ 10<sup> Leak rate <1.3x10<sup>-7</sup>Pa･㎥/sec RoHS2 corresponding ○ -
Leak rate <1.3x10<sup>-10</sup>Pa･㎥/sec Maximum temperature 150°C (body), 80°C (overall) type Valve O-ring included body SUS 304 -
Maximum temperature 200°C (body), 80°C (overall) Available pressure 600 kpa~ 1.33x10-5 kpa Leak rate <1.0x10<sup>-9</sup>Pa･㎥/sec Main materials SUS 316 (double-acting), SUS31 Surface Material SUS 316 (double-acting), SUS31 Seal / gasket material PTFE The inner surface processing Ra ≤ 0.8μm -
Seal / gasket material Viton ® body SUS 304 RoHS2 corresponding ○
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The lowest temperature -180℃ Maximum temperature 400℃
