About 10,000 types of vacuum components in stock at all times.Business Hours: 9:00-18:00, excluding weekends and holidays
Feedthrough
Isolator
Viewport
Vacuum Component
Vacuum Valve
Motion Feedthroughs
Others
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Leak rate | <5x10<sup>-7</sup>Pa・㎥/sec |
| conductance | 420 L/min (value in molecular |
| Cycles until first service | 30,000 or 1 year |
| Available gases | Atmosphere or gases (excluding |
| Maximum temperature | 40℃ |
| The lowest temperature | 10℃ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| RoHS2 corresponding | ○ |
| Flange material | SUS 304 |
|---|---|
| Fittings | SUS 304 |
| Joint standard | NPT Male |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| RoHS2 corresponding | ○ |
| Flange material | SUS 304 |
|---|---|
| Tubes / Pipes | SUS 304 |
| RoHS2 corresponding | ○ |
| Joint standard | Tube end |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| Tubes / Pipes | SUS 304 |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| RoHS2 corresponding | ○ |
| Joint standard | VCR® M |
|---|---|
| Fittings | SUS 316 |
| Flange material | SUS 304 |
| RoHS2 corresponding | ○ |
| Joint standard | VCR® M |
|---|---|
| Fittings | SUS 316 |
| Flange material | SUS 304 |
| Tubes / Pipes | SUS 304 |
| RoHS2 corresponding | ○ |
| Joint standard | Taper screw M |
|---|---|
| Fittings | SUS 304 |
| Flange material | SUS 304 |
| RoHS2 corresponding | ○ |
| Main materials | Thermoplastic elastomer (TPE) |
|---|---|
| Maximum temperature | 80℃ |
| RoHS2 corresponding | ○ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Leakage when valve is fully clos | <6.7x10<sup>-11</sup>Pa・㎥/sec |
| Orifice diameter | Φ3.5 mm |
| Maximum temperature | 125℃ |
| Seal / gasket material | Viton ® |
| Shaft seal lubricant | Silicone grease for high vacuu |
| Valve body shaft | SUS 304 |
| valve | Brass (Ni plating) |
| handle | phenol resin |
| Main materials | SUS 304 |
|---|---|
| Leak rate | <5x10<sup>-9</sup>Pa・㎥/sec |
| O-ring | Viton ® |
| RoHS2 corresponding | ○ |