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ULVAC Exhaust Unit

アルバック社製　排気ユニット

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アルバック社製　排気ユニット
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Product code :50113 Model:VPT-060

Features
Completely dry exhaust unit
Compact size for installation in small spaces
Special KF40 flange on the intake port for this campaign.
Can be used with 100V outlet.

Suitable for a wide variety of vacuum applications
Semiconductor measurement under vacuum
Gas analysis
Vacuum furnace
Electron microscope pre-evacuation, etc.

Achievable pressure: 10-5 Pa level
Main pump: Turbo molecular pump 60 L/sec
Auxiliary pump: Diaphragm vacuum pump 20 L/min
Electricity requirement: Single phase 100 V 0.3 kVA
Mass: 18 kg
Maximum size: 340(W)×340(L)×368(H) mm

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50113
VPT-060
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ULVAC Exhaust Unit
Product code :50113    Model:VPT-060
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Shipping accepted on the day on orders until 17:00 Hours 9:00 to 18:00 except Saturdays, Sundays, and holidays
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