About 8,000 types of vacuum components in stock at all times.Business Hours: 9:00-18:00, excluding weekends and holidays
Flange material | SUS 316 |
---|---|
Flexible / bellows | SUS 316L |
blade | SUS 304 |
RoHS2 corresponding | ○ |
Flange material | SUS 304 |
---|---|
window | Borosilicate glass |
Maximum temperature | 350℃ |
Leak rate | <1.0x10<sup>-8</sup>Pa・㎥/sec |
RoHS2 corresponding | ○ |
window | Synthetic quartz |
---|---|
Maximum temperature | 200℃ |
The lowest temperature | -100℃ |
RoHS2 corresponding | ○ |
Available pressure | Atmospheric pressure ~ 10<sup> |
---|---|
Corresponding seal | Dedicated elastomeric seal |
Pressurization | NW63 following ○, NW80 more ✖︎ |
Non-magnetic | ○ |
chemical resistance | ◎ |
Clean Room | ○ |
Insulation | ○ |
RoHS2 corresponding | ○ |
window | Magnesium fluoride |
---|---|
Maximum temperature | 200℃ |
The lowest temperature | -100℃ |
window | Zinc selenide |
---|---|
Maximum temperature | 200℃ |
The lowest temperature | -100℃ |
AR coating | ○ |
Main materials | SUS304(L type), SUS304L(Y,Z ty |
---|---|
Flexible / bellows | AM-350 |
Leakage rate (hood section) | <1.0x10<sup>-10</sup>Pa・㎥/sec |
Leak rate (sheet leakage) | <1.0x10<sup>-10</sup>Pa・㎥/sec |
RoHS2 corresponding | ○ |
Flange material | SUS 304 |
---|---|
body | SUS 316 |
Flexible / bellows | SUS 321 |
handle | Aluminum 2024-T4 |
Maximum temperature | 150℃ |
Available pressure | Atmospheric pressure ~ 10<sup> |
Leak rate | <1.3x10<sup>-7</sup>Pa・㎥/sec |
RoHS2 corresponding | ○ |
Leak rate | <1x10<sup>-7</sup>Pa・ℓ/sec |
---|---|
Available pressure | 10<sup>-6</sup> Pa ~0.5Mpa |
- In opening direction | ≤ 0.2 MPa |
- in closing direction | ≤ 0.5 Mpa |
Differential pressure at opening | ≤ 0.1 Mpa |
Cycles until first service | 2,000,000 (unheated and under |
使用可能温度(ボディ) | 150 ℃ |
使用可能温度(アクチュエーター) | 120 ℃ |
使用可能温度(ポジションインディケーター) | 70 ℃ |
body | SUS 316 |
プレート | SUS 316 |
ベローズ | SUS 316 |
Bonnet seal | FKM(Viton®) |
ポジションインディケーター(接点 | 10 - 28V/DC, 1 - 50 mA |
Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
---|---|
Maximum temperature | 150°C (body), 80°C (overall) |
type | Valve O-ring included |
body | SUS 304 |
Available pressure | 0.12MPa ~10<sup>-6</sup> Pa |
---|---|
Leak rate | <1x10<sup>-7</sup>Pa・ℓ/sec |
The lowest temperature | 10℃ |
Maximum temperature | 150℃ |
Cycles until first service | 2,000,000 (unheated and under |
The input power voltage | 24 VDC (±10%) @0.5V pk-pk max. |
The input power power | 80 W max. (operation of valve |
Maximum temperature | 200°C (body), 80°C (overall) |
---|---|
Available pressure | 600 kpa~ 1.33x10-5 kpa |
Leak rate | <1.0x10<sup>-9</sup>Pa・㎥/sec |
Main materials | SUS 316 (double-acting), SUS31 |
Surface Material | SUS 316 (double-acting), SUS31 |
Seal / gasket material | PTFE |
The inner surface processing | Ra ≤ 0.8μm |
Flange material | SUS 304 |
---|---|
Tubes / Pipes | SUS 304 |
RoHS2 corresponding | ○ |
Fittings | SUS 316 |
---|---|
Flange material | SUS 304 |
Tubes / Pipes | SUS 304 |
RoHS2 corresponding | ○ |
Fittings | SUS 316 |
---|---|
Flange material | SUS 304 |
Tubes / Pipes | SUS 304 |
RoHS2 corresponding | ○ |
Fittings | SUS 316 |
---|---|
Flange material | SUS 304 |
Tubes / Pipes | SUS 304 |
RoHS2 corresponding | ○ |
Fittings | SUS 316 |
---|---|
Flange material | SUS 304 |
Tubes / Pipes | SUS 304 |
RoHS2 corresponding | ○ |