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- Cosmotec for Vacuum Components
- Vacuum Component
- Vacuum Components NW / KF standard
Vacuum Components NW / KF standard Product List Vacuum Component
Category 16Matter
Subcategory 106Matter (81 ~100 )
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Flange material SUS 304 window Borosilicate glass Maximum temperature 350℃ Leak rate <1.0x10<sup>-8</sup>Pa･㎥/sec RoHS2 corresponding ○ -
window Synthetic quartz Maximum temperature 200℃ The lowest temperature -100℃ RoHS2 corresponding ○ -
Available pressure Atmospheric pressure ~ 10<sup> Corresponding seal Dedicated elastomeric seal Pressurization NW63 following ○, NW80 more ✖︎ Non-magnetic ○ chemical resistance ◎ Clean Room ○ Insulation ○ RoHS2 corresponding ○ -
window Magnesium fluoride Maximum temperature 200℃ The lowest temperature -100℃ -
window Zinc selenide Maximum temperature 200℃ The lowest temperature -100℃ AR coating ○
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Main materials SUS304(L type), SUS304L(Y,Z ty Flexible / bellows AM-350 Leakage rate (hood section) <1.0x10<sup>-10</sup>Pa･㎥/sec Leak rate (sheet leakage) <1.0x10<sup>-10</sup>Pa･㎥/sec RoHS2 corresponding ○ -
Flange material SUS 304 body SUS 316 Flexible / bellows SUS 321 handle Aluminum 2024-T4 Maximum temperature 150℃ Available pressure Atmospheric pressure ~ 10<sup> Leak rate <1.3x10<sup>-7</sup>Pa･㎥/sec RoHS2 corresponding ○ -
Leak rate <1x10<sup>-7</sup>Pa･ℓ/sec Available pressure 10<sup>-6</sup> Pa ～0.5Mpa - In opening direction ≤ 0.2 MPa - in closing direction ≤ 0.5 Mpa Differential pressure at opening ≤ 0.1 Mpa Cycles until first service 2,000,000 (unheated and under 使用可能温度（ボディ） 150 ℃ 使用可能温度（アクチュエーター） 120 ℃ 使用可能温度（ポジションインディケーター） 70 ℃ body SUS 316 プレート SUS 316 ベローズ SUS 316 Bonnet seal FKM(Viton®) ポジションインディケーター（接点 10 - 28V/DC, 1 - 50 mA -
Leak rate <1.3x10<sup>-10</sup>Pa･㎥/sec Maximum temperature 150°C (body), 80°C (overall) type Valve O-ring included body SUS 304 -
Available pressure 0.12MPa ～10<sup>-6</sup> Pa Leak rate <1x10<sup>-7</sup>Pa･ℓ/sec The lowest temperature 10℃ Maximum temperature 150℃ Cycles until first service 2,000,000 (unheated and under The input power voltage 24 VDC (±10%) @0.5V pk-pk max. The input power power 80 W max. (operation of valve -
Maximum temperature 200°C (body), 80°C (overall) Available pressure 600 kpa~ 1.33x10-5 kpa Leak rate <1.0x10<sup>-9</sup>Pa･㎥/sec Main materials SUS 316 (double-acting), SUS31 Surface Material SUS 316 (double-acting), SUS31 Seal / gasket material PTFE The inner surface processing Ra ≤ 0.8μm
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Maximum temperature 120℃ Leak rate <1.3x10<sup>-11</sup>Pa･㎥/sec Flange material SUS 304 RoHS2 corresponding ○ -
Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○ -
Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○ -
Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○ -
Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○
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Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○ -
Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○
