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  1. Cosmotec for Vacuum Components
  2. Vacuum Component
  3. ICF standards
  4. linear induction machine
  5. ICF70 Linear and rotary feeder Stroke: 300mm
  1. Cosmotec for Vacuum Components
  2. Vacuum Component
  3. Feedthrough
  4. ICF70 Linear and rotary feeder Stroke: 300mm

ICF70 Linear and rotary feeder Stroke: 300mm

ICF70 直線・回転導入機 ストローク:300mm

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ICF70 直線・回転導入機 ストローク:300mm
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Product code :27524 Model:ICF70LRMF300

▼Straight line feeder
Bellows seal system
Flange (ICF): 34, 70
Minimum scale (mm): 0.05
Bake heat resistance: 200°C
Life expectancy: 10,000 cycles
Motor compatible products are also available.

▼Rotary feeder
Bellows seal or magnetic coupling are available.
Flange (ICF): 34, 70
Minimum graduation: ICF34 = 0.5°, ICF70 = 1°.
Bake heat resistance: 200°C

▼Linear and rotary feeder (transfer rod)
Bellows seal or magnetic coupling are available.
Flange (ICF): 34, 70
Bake heat resistance: 200°C

▼Others
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Basic Information
Maximum temperature 120℃
Leak rate <1.3x10-11Pa･㎥/sec
Flange material SUS 304
RoHS2 corresponding ○
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Model
 ICF C L1 L2 stroke Feed rate Classification operation Maximum permissible thrust way
Stock & Delivery
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27524
ICF70LRMF300
70 10 50～350 654 300mm - Manual Straight line, rotation 5kg bellows
ICF70 直線・回転導入機 ストローク:300mm admin.label.item.size_image
ICF C L1 L2 stroke Feed rate Classification operation Maximum permissible thrust way
70 10 50～350 654 300mm - Manual Straight line, rotation 5kg bellows
ICF70 Linear and rotary feeder Stroke: 300mm
Product code :27524    Model:ICF70LRMF300
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ICF70 直線・回転導入機 ストローク:300mm admin.label.item.catalog_image
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