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| type | Insulation flange |
|---|---|
| sleeve | Kovar ® |
| Insulator | Alumina ceramic |
| Maximum temperature | 300℃ |
| The lowest temperature | -196℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| RoHS2 corresponding | ○ |
| Flange material | SUS 304 |
|---|---|
| window | Borosilicate glass |
| Maximum temperature | 350℃ |
| Leak rate | <1.0x10<sup>-8</sup>Pa・㎥/sec |
| RoHS2 corresponding | ○ |
| Flange material | SUS 304 |
|---|---|
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Leak rate | <1.3x10<sup>-7</sup>Pa・ℓ/sec |
| RoHS2 corresponding | ○ |
| Flange material | SUS(329J3L) |
|---|---|
| window | Borosilicate glass |
| Maximum temperature | 280℃ |
| The lowest temperature | -20℃ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Leak rate | <1.3x10<sup>-9</sup>Pa・㎥/sec |
| RoHS2 corresponding | ○ |
| window | Synthetic quartz |
|---|---|
| Maximum temperature | 200℃ |
| The lowest temperature | -100℃ |
| RoHS2 corresponding | ○ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Corresponding seal | Dedicated elastomeric seal |
| Pressurization | NW63 following ○, NW80 more ✖︎ |
| Non-magnetic | ○ |
| chemical resistance | ◎ |
| Clean Room | ○ |
| Insulation | ○ |
| RoHS2 corresponding | ○ |
| window | Magnesium fluoride |
|---|---|
| Maximum temperature | 200℃ |
| The lowest temperature | -100℃ |
| Flange material | SUS 304 |
|---|---|
| window | Calcium fluoride |
| Maximum temperature | 200℃ |
| The lowest temperature | -100℃ |
| RoHS2 corresponding | ○ |
| Lead equivalent (mmPb) | 1.5 |
|---|---|
| Thermal expansion coefficient (/ | 80✕10<sup>-7</sup>(30~380℃) |
| Softening point (℃) | 585 |
| Flexural strength (MPa) | 25 |
| Young's modulus (GPa) | 63 |
| Poisson's ratio | 0.24 |
| Knoop hardness | 370 |
| Refractive index (Na-D line) | 1.71 |
| Link | Aluminum |
|---|---|
| strap | SUS 316L |
| Knob / nut | FRP |
| Clamping screw | SUS 316L |
| Clamping bolt | Aluminum |
| Maximum temperature | 100℃ |
| The lowest temperature | -20℃ |
| RoHS2 corresponding | ○ |
| Link | FRP |
|---|---|
| Knob / nut | FRP |
| Clamping screw | stainless |
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Corresponding seal | Elastomer seal only |
| METHOD tightening | Hand tighten |
| Non-magnetic | ○ |
| chemical resistance | △ |
| Insulation | ○ |
| RoHS2 corresponding | ○ |
| Link | Aluminum |
|---|---|
| Knob / nut | FRP (knob) |
| Clamping bolt | FRP |
| Maximum temperature | 150℃ |
| The lowest temperature | -20℃ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Corresponding seal | Elastomer seal only |
| Pressurization | ○ |
| Non-magnetic | ○ |
| Radiation resistance | ○ |
| chemical resistance | △ |
| Clean Room | ○ |
| Insulation | ○ |
| METHOD tightening | Hand tighten |
| RoHS2 corresponding | ○ |
| Link | Aluminum |
|---|---|
| Knob / nut | Stainless steel (nut) |
| Clamping screw | stainless |
| Clamping bolt | Aluminum |
| Maximum temperature | 100℃ |
| The lowest temperature | -271℃ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Corresponding seal | Elastomer seal only |
| Pressurization | ○ |
| Non-magnetic | ○ |
| Radiation resistance | ○ |
| chemical resistance | ○ |
| Clean Room | △ |
| Insulation | ○ |
| METHOD tightening | Torque Wrench |
| RoHS2 corresponding | ○ |
| Link | stainless |
|---|---|
| strap | stainless |
| Knob / nut | Stainless steel (bolt) |
| Clamping screw | stainless |
| Maximum temperature | 350℃ |
| The lowest temperature | -271℃ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Corresponding seal | Elastomer seal only |
| Pressurization | ○ |
| Radiation resistance | ○ |
| chemical resistance | ○ |
| Clean Room | △ |
| Insulation | ○ |
| METHOD tightening | Torque Wrench |
| RoHS2 corresponding | ○ |
| Knob / nut | stainless |
|---|---|
| Clamping screw | stainless |
| Clamping bolt | Aluminum |
| Maximum temperature | 150℃ |
| The lowest temperature | -270℃ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Corresponding seal | Elastomeric seal / metal seal |
| Non-magnetic | ○ |
| Clean Room | △ |
| METHOD tightening | Torque Wrench |
| RoHS2 corresponding | ○ |
| Link | stainless |
|---|---|
| strap | stainless |
| Knob / nut | stainless |
| Clamping screw | stainless |
| Clamping bolt | stainless |
| Maximum temperature | 315℃ |
| The lowest temperature | -270℃ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Corresponding seal | Aluminum / oxygen-free copper |
| Pressurization | ○ |
| Non-magnetic | ○ |
| Radiation resistance | ○ |
| chemical resistance | ○ |
| Clean Room | △ |
| METHOD tightening | Torque Wrench |
| RoHS2 corresponding | ○ |