About 8,000 types of vacuum components in stock at all times.Business Hours： 9:00-18:00, excluding weekends and holidays

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  • Feedthrough Feedthrough
    Feedthrough
  • Isolator Isolator
    Isolator
  • Viewport Viewport
    Viewport
  • Vacuum Component Vacuum Component
    Vacuum Component
  • Vacuum Valve Vacuum Valve
    Vacuum Valve
  • Vented Screw Vented Screw
    Vented Screw
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Shipping accepted on the day on orders until 17:00
(Hours 9:00 to 18:00 except Saturdays, Sundays, and holidays)
  1. Cosmotec for Vacuum Components
  2. Viewport
  3. Borosilicate
  4. Quick entry door
  1. Cosmotec for Vacuum Components
  2. Vacuum Component
  3. ICF standards
  4. Quick entry door
  5. Quick entry door
  1. Cosmotec for Vacuum Components
  2. Vacuum Component
  3. JIS VF / VG standards
  4. Vacuum piping parts Quick Entry Door
  5. Quick entry door

Quick entry door

Quick entry door

▼Quick Entry Door
Convenient open/close door for introducing samples and equipment when the vacuum chamber is released to atmosphere
Quick access from the conflat flange that takes time and effort to open and close
Allows observation of the inside through a visual glass window in the center of the door (except blank type)
Window material: ICF → tempered glass, JIS → borosilicate glass
Door part seal: O-ring sealing
Bolts, nuts, and washers for mounting included

▼The following types are standardized (List)
Flange: ICF, JIS-VF, JIS-VG
ICF Blank Type

▼Options
Please consult us about different window materials, flange change, etc. Please contact us by clicking the "Inquiry" button on the right side of this page.

For precision cleaning requests, please click here.

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Basic Information
Flange material SUS 304
Available pressure Atmospheric pressure ~ 10
Leak rate <1.3x10-7Pa･ℓ/sec
RoHS2 corresponding ○
Inquiry for this subcategory

We have 12 type candidate

※ Please click on the product code or model for more information.

front.product.product_code
Model
 ICF VF VG A B C H window T (glass thickness) V (effective diameter) Maximum temperature The lowest temperature
Stock & Delivery
front.product.price
front.product.tax_included2
21648
ICF114QED
114 - - 114 170 - 32 Tempered glass 5 64 150℃ -20℃
24782
ICF114QEDBK
114 - - 178 63 - 32.2 SUS（Blank - - 150℃ -20℃
21649
ICF152QED
152 - - 152 215 - 35 Tempered glass 5 102 150℃ -20℃
24783
ICF152QEDBK
152 - - - - - - SUS（Blank - - 150℃ -20℃
21650
ICF203QED
203 - - 203 276 - 37 Tempered glass 5 152 150℃ -20℃
24784
ICF203QEDBK
203 - - 277 153 - 38 SUS（Blank - - 150℃ -20℃
21651
ICF253QED
253 - - 253 289 - 40 Tempered glass 5 152 150℃ -20℃
24785
ICF253QEDBK
253 - - - - - - SUS（Blank - - 150℃ -20℃
20988
ICF305QED
305 - - 305 371 - 50 Tempered glass 9.5 152 150℃ -20℃
20989
ICF305QEDBK
305 - - 379 254 - 47 SUS（Blank - - 150℃ -20℃
24119
VF100QED
- 100 - 211 87 64 36 Borosilicate glass - 112 130℃ -
24123
VG100QED
- - 100 211 87 64 36 Borosilicate glass - 112 130℃ -
ICF VF VG A B C H window T (glass thickness) V (effective diameter) Maximum temperature The lowest temperature
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Shipping accepted on the day on orders until 17:00 Hours 9:00 to 18:00 except Saturdays, Sundays, and holidays
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