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Category 8Matter
Subcategory 659Matter (561 ~580 )
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Seal / gasket material Viton ® body SUS 304 RoHS2 corresponding ○ -
Fittings SUS 316 Flange material SUS 304 RoHS2 corresponding ○ -
type SHV Connection type The atmosphere-side plug-fitti Flange material SUS 304 Maximum temperature 450℃ The lowest temperature -200℃ Leak rate <1.3x10<sup>-10</sup>Pa･㎥/sec Classification Flanged terminal type Ground shield Withstand voltage: DC 20 kV Electric current / 1 pc. 15 A RoHS2 corresponding ○
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Flange material SUS 304 Tubes / Pipes SUS 304 The inner surface processing Machined (Ra3.2 equivalent) RoHS2 corresponding ○
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Maximum temperature 200°C (body), 80°C (overall) Available pressure 600 kpa~ 1.33x10-5 kpa Leak rate <1.0x10<sup>-9</sup>Pa･㎥/sec Main materials SUS 316 (double-acting), SUS31 Surface Material SUS 316 (double-acting), SUS31 Seal / gasket material PTFE The inner surface processing Ra ≤ 0.8μm
