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| Material | SUS 304 |
|---|---|
| The inner surface processing | GBB Processing |
| RoHS2 corresponding | ○ |
| Material | SUS 304 |
|---|---|
| The inner surface processing | GBB Processing |
| RoHS2 corresponding | ○ |
| Material | SUS 304 |
|---|---|
| The inner surface processing | GBB Processing |
| RoHS2 corresponding | ○ |
| Material | SUS 304 |
|---|---|
| The inner surface processing | GBB Processing |
| RoHS2 corresponding | ○ |
| Main materials | SUS 304 |
|---|---|
| Flange material | SUS 304 |
| RoHS2 corresponding | ○ |
| Seal / gasket material | Viton ® |
|---|---|
| body | SUS 304 |
| RoHS2 corresponding | ○ |
| Seal / gasket material | Viton ® |
|---|---|
| body | SUS 304 |
| RoHS2 corresponding | ○ |
| type | Optical fiber |
|---|---|
| Fiber | 石英 |
| Leak rate | <5.5x10<sup>-9</sup>Pa・㎥/sec |
| Reference-voltage value (MPa) | 1 |
| Main materials | SUS 304 |
| Insulator | Epoxy |
| Connection type | FC/PC |
| RoHS2 corresponding | ○ |
| type | High voltage and low current |
|---|---|
| electrode | SUS 316L |
| Flange material | SUS 316L |
| sleeve | Kovar ® |
| Insulator | Alumina ceramic |
| Maximum temperature | 450℃ |
| The lowest temperature | -196℃ |
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
| Withstand voltage: DC | 30 kV |
| Electric current / 1 pc. | 3 A |
| The number of electrode | 1 |
| Feedthrough | 30kV / 3A |