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type | Insulation flange |
---|---|
sleeve | Kovar ® |
Insulator | Alumina ceramic |
Maximum temperature | 300℃ |
The lowest temperature | -196℃ |
Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec |
RoHS2 corresponding | ○ |
Flange material | SUS 304 |
---|---|
window | Borosilicate glass |
Maximum temperature | 350℃ |
Leak rate | <1.0x10<sup>-8</sup>Pa・㎥/sec |
RoHS2 corresponding | ○ |
Flange material | SUS 304 |
---|---|
Available pressure | Atmospheric pressure ~ 10<sup> |
Leak rate | <1.3x10<sup>-7</sup>Pa・ℓ/sec |
RoHS2 corresponding | ○ |
Flange material | SUS(329J3L) |
---|---|
window | Borosilicate glass |
Maximum temperature | 280℃ |
The lowest temperature | -20℃ |
Available pressure | Atmospheric pressure ~ 10<sup> |
Leak rate | <1.3x10<sup>-9</sup>Pa・㎥/sec |
RoHS2 corresponding | ○ |
window | Synthetic quartz |
---|---|
Maximum temperature | 200℃ |
The lowest temperature | -100℃ |
RoHS2 corresponding | ○ |
Flange material | SUS 304 |
---|---|
window | Synthetic quartz |
Maximum temperature | 200℃ |
RoHS2 corresponding | ○ |
Available pressure | Atmospheric pressure ~ 10<sup> |
---|---|
Corresponding seal | Dedicated elastomeric seal |
Pressurization | NW63 following ○, NW80 more ✖︎ |
Non-magnetic | ○ |
chemical resistance | ◎ |
Clean Room | ○ |
Insulation | ○ |
RoHS2 corresponding | ○ |
window | Magnesium fluoride |
---|---|
Maximum temperature | 200℃ |
The lowest temperature | -100℃ |
Flange material | SUS 304 |
---|---|
window | Calcium fluoride |
Maximum temperature | 200℃ |
The lowest temperature | -100℃ |
RoHS2 corresponding | ○ |
Lead equivalent (mmPb) | 1.5 |
---|---|
Thermal expansion coefficient (/ | 80✕10<sup>-7</sup>(30~380℃) |
Softening point (℃) | 585 |
Flexural strength (MPa) | 25 |
Young's modulus (GPa) | 63 |
Poisson's ratio | 0.24 |
Knoop hardness | 370 |
Refractive index (Na-D line) | 1.71 |
Link | Aluminum |
---|---|
strap | SUS 316L |
Knob / nut | FRP |
Clamping screw | SUS 316L |
Clamping bolt | Aluminum |
Maximum temperature | 100℃ |
The lowest temperature | -20℃ |
RoHS2 corresponding | ○ |
Link | FRP |
---|---|
Knob / nut | FRP |
Clamping screw | stainless |
Available pressure | Atmospheric pressure ~ 10<sup> |
Corresponding seal | Elastomer seal only |
METHOD tightening | Hand tighten |
Pressurization | ○ |
Non-magnetic | ○ |
chemical resistance | △ |
Insulation | ○ |
RoHS2 corresponding | ○ |
Link | Aluminum |
---|---|
Knob / nut | FRP (knob) |
Clamping bolt | FRP |
Maximum temperature | 150℃ |
The lowest temperature | -20℃ |
Available pressure | Atmospheric pressure ~ 10<sup> |
Corresponding seal | Elastomer seal only |
Pressurization | ○ |
Non-magnetic | ○ |
Radiation resistance | ○ |
chemical resistance | △ |
Clean Room | ○ |
Insulation | ○ |
METHOD tightening | Hand tighten |
RoHS2 corresponding | ○ |
Link | Aluminum |
---|---|
Knob / nut | Stainless steel (nut) |
Clamping screw | stainless |
Clamping bolt | Aluminum |
Maximum temperature | 100℃ |
The lowest temperature | -271℃ |
Available pressure | Atmospheric pressure ~ 10<sup> |
Corresponding seal | Elastomer seal only |
Pressurization | ○ |
Non-magnetic | ○ |
Radiation resistance | ○ |
chemical resistance | ○ |
Clean Room | △ |
Insulation | ○ |
METHOD tightening | Torque Wrench |
RoHS2 corresponding | ○ |
Link | stainless |
---|---|
strap | stainless |
Knob / nut | Stainless steel (bolt) |
Clamping screw | stainless |
Maximum temperature | 350℃ |
The lowest temperature | -271℃ |
Available pressure | Atmospheric pressure ~ 10<sup> |
Corresponding seal | Elastomer seal only |
Pressurization | ○ |
Radiation resistance | ○ |
chemical resistance | ○ |
Clean Room | △ |
Insulation | ○ |
METHOD tightening | Torque Wrench |
RoHS2 corresponding | ○ |
Knob / nut | stainless |
---|---|
Clamping screw | stainless |
Clamping bolt | Aluminum |
Maximum temperature | 150℃ |
The lowest temperature | -270℃ |
Available pressure | Atmospheric pressure ~ 10<sup> |
Corresponding seal | Elastomeric seal / metal seal |
Non-magnetic | ○ |
Clean Room | △ |
METHOD tightening | Torque Wrench |
RoHS2 corresponding | ○ |