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| type | Insulation flange | 
|---|---|
| sleeve | Kovar ® | 
| Insulator | Alumina ceramic | 
| Maximum temperature | 300℃ | 
| The lowest temperature | -196℃ | 
| Leak rate | <1.3x10<sup>-10</sup>Pa・㎥/sec | 
| RoHS2 corresponding | ○ | 
| Flange material | SUS 304 | 
|---|---|
| window | Borosilicate glass | 
| Maximum temperature | 350℃ | 
| Leak rate | <1.0x10<sup>-8</sup>Pa・㎥/sec | 
| RoHS2 corresponding | ○ | 
| Flange material | SUS 304 | 
|---|---|
| Available pressure | Atmospheric pressure ~ 10<sup> | 
| Leak rate | <1.3x10<sup>-7</sup>Pa・ℓ/sec | 
| RoHS2 corresponding | ○ | 
| Flange material | SUS(329J3L) | 
|---|---|
| window | Borosilicate glass | 
| Maximum temperature | 280℃ | 
| The lowest temperature | -20℃ | 
| Available pressure | Atmospheric pressure ~ 10<sup> | 
| Leak rate | <1.3x10<sup>-9</sup>Pa・㎥/sec | 
| RoHS2 corresponding | ○ | 
| window | Synthetic quartz | 
|---|---|
| Maximum temperature | 200℃ | 
| The lowest temperature | -100℃ | 
| RoHS2 corresponding | ○ | 
| Available pressure | Atmospheric pressure ~ 10<sup> | 
|---|---|
| Corresponding seal | Dedicated elastomeric seal | 
| Pressurization | NW63 following ○, NW80 more ✖︎ | 
| Non-magnetic | ○ | 
| chemical resistance | ◎ | 
| Clean Room | ○ | 
| Insulation | ○ | 
| RoHS2 corresponding | ○ | 
| window | Magnesium fluoride | 
|---|---|
| Maximum temperature | 200℃ | 
| The lowest temperature | -100℃ | 
| Flange material | SUS 304 | 
|---|---|
| window | Calcium fluoride | 
| Maximum temperature | 200℃ | 
| The lowest temperature | -100℃ | 
| RoHS2 corresponding | ○ | 
| Lead equivalent (mmPb) | 1.5 | 
|---|---|
| Thermal expansion coefficient (/ | 80✕10<sup>-7</sup>(30~380℃) | 
| Softening point (℃) | 585 | 
| Flexural strength (MPa) | 25 | 
| Young's modulus (GPa) | 63 | 
| Poisson's ratio | 0.24 | 
| Knoop hardness | 370 | 
| Refractive index (Na-D line) | 1.71 | 
| Link | Aluminum | 
|---|---|
| strap | SUS 316L | 
| Knob / nut | FRP | 
| Clamping screw | SUS 316L | 
| Clamping bolt | Aluminum | 
| Maximum temperature | 100℃ | 
| The lowest temperature | -20℃ | 
| RoHS2 corresponding | ○ | 
| Link | FRP | 
|---|---|
| Knob / nut | FRP | 
| Clamping screw | stainless | 
| Available pressure | Atmospheric pressure ~ 10<sup> | 
| Corresponding seal | Elastomer seal only | 
| METHOD tightening | Hand tighten | 
| Non-magnetic | ○ | 
| chemical resistance | △ | 
| Insulation | ○ | 
| RoHS2 corresponding | ○ | 
| Link | Aluminum | 
|---|---|
| Knob / nut | FRP (knob) | 
| Clamping bolt | FRP | 
| Maximum temperature | 150℃ | 
| The lowest temperature | -20℃ | 
| Available pressure | Atmospheric pressure ~ 10<sup> | 
| Corresponding seal | Elastomer seal only | 
| Pressurization | ○ | 
| Non-magnetic | ○ | 
| Radiation resistance | ○ | 
| chemical resistance | △ | 
| Clean Room | ○ | 
| Insulation | ○ | 
| METHOD tightening | Hand tighten | 
| RoHS2 corresponding | ○ | 
| Link | Aluminum | 
|---|---|
| Knob / nut | Stainless steel (nut) | 
| Clamping screw | stainless | 
| Clamping bolt | Aluminum | 
| Maximum temperature | 100℃ | 
| The lowest temperature | -271℃ | 
| Available pressure | Atmospheric pressure ~ 10<sup> | 
| Corresponding seal | Elastomer seal only | 
| Pressurization | ○ | 
| Non-magnetic | ○ | 
| Radiation resistance | ○ | 
| chemical resistance | ○ | 
| Clean Room | △ | 
| Insulation | ○ | 
| METHOD tightening | Torque Wrench | 
| RoHS2 corresponding | ○ | 
| Link | stainless | 
|---|---|
| strap | stainless | 
| Knob / nut | Stainless steel (bolt) | 
| Clamping screw | stainless | 
| Maximum temperature | 350℃ | 
| The lowest temperature | -271℃ | 
| Available pressure | Atmospheric pressure ~ 10<sup> | 
| Corresponding seal | Elastomer seal only | 
| Pressurization | ○ | 
| Radiation resistance | ○ | 
| chemical resistance | ○ | 
| Clean Room | △ | 
| Insulation | ○ | 
| METHOD tightening | Torque Wrench | 
| RoHS2 corresponding | ○ | 
| Knob / nut | stainless | 
|---|---|
| Clamping screw | stainless | 
| Clamping bolt | Aluminum | 
| Maximum temperature | 150℃ | 
| The lowest temperature | -270℃ | 
| Available pressure | Atmospheric pressure ~ 10<sup> | 
| Corresponding seal | Elastomeric seal / metal seal | 
| Non-magnetic | ○ | 
| Clean Room | △ | 
| METHOD tightening | Torque Wrench | 
| RoHS2 corresponding | ○ | 
| Link | stainless | 
|---|---|
| strap | stainless | 
| Knob / nut | stainless | 
| Clamping screw | stainless | 
| Clamping bolt | stainless | 
| Maximum temperature | 315℃ | 
| The lowest temperature | -270℃ | 
| Available pressure | Atmospheric pressure ~ 10<sup> | 
| Corresponding seal | Aluminum / oxygen-free copper | 
| Pressurization | ○ | 
| Non-magnetic | ○ | 
| Radiation resistance | ○ | 
| chemical resistance | ○ | 
| Clean Room | △ | 
| METHOD tightening | Torque Wrench | 
| RoHS2 corresponding | ○ |