About 10,000 types of vacuum components in stock at all times.Business Hours: 9:00-18:00, excluding weekends and holidays
Feedthrough
Isolator
Viewport
Vacuum Component
Vacuum Valve
Motion Feedthroughs
Others
| Flange material | SUS 304 |
|---|---|
| Flexible / bellows | SUS 316L |
| blade | SUS 304 |
| RoHS2 corresponding | ○ |
| Seal / gasket material | Nitrile |
|---|---|
| Maximum temperature | 100℃ |
| The lowest temperature | -50℃ |
| RoHS2 corresponding | ○ |
| Seal / gasket material | Viton ® |
|---|---|
| Maximum temperature | 150℃ |
| The lowest temperature | -20℃ |
| RoHS2 corresponding | ○ |
| Seal / gasket material | Viton ® |
|---|---|
| Maximum temperature | 150℃ |
| The lowest temperature | -20℃ |
| RoHS2 corresponding | ○ |
| The inner ring | SUS 316L |
|---|---|
| Seal / gasket material | Viton ® |
| Maximum temperature | 200℃ |
| The lowest temperature | -20℃ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Leak rate | <1.3x10<sup>-7</sup>Pa・㎥/sec |
| Non-magnetic | ○ |
| chemical resistance | ○ |
| Clean Room | ○ |
| RoHS2 corresponding | ○ |
| Pressurization | △ |
| The inner ring | Teflon ® |
|---|---|
| Seal / gasket material | Viton ® |
| Maximum temperature | 200℃ |
| The lowest temperature | -20℃ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Leak rate | <1.3x10<sup>-7</sup>Pa・㎥/sec |
| Non-magnetic | ○ |
| chemical resistance | ◎ |
| Clean Room | ○ |
| Insulation | ○ |
| RoHS2 corresponding | ○ |
| Seal / gasket material | Aluminum |
|---|---|
| Maximum temperature | 150℃ |
| The lowest temperature | -270℃ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Leak rate | <1.3x10<sup>-9</sup>Pa・㎥/sec |
| Pressurization | - |
| Non-magnetic | ○ |
| Radiation resistance | ○ |
| chemical resistance | △ |
| Clean Room | ○ |
| RoHS2 corresponding | ○ |
| Link | FRP |
|---|---|
| Knob / nut | FRP |
| Clamping screw | stainless |
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Corresponding seal | Elastomer seal only |
| METHOD tightening | Hand tighten |
| Non-magnetic | ○ |
| chemical resistance | △ |
| Insulation | ○ |
| RoHS2 corresponding | ○ |
| Link | Aluminum |
|---|---|
| strap | SUS 316L |
| Knob / nut | FRP |
| Clamping screw | SUS 316L |
| Clamping bolt | Aluminum |
| Maximum temperature | 100℃ |
| The lowest temperature | -20℃ |
| RoHS2 corresponding | ○ |
| Link | Aluminum |
|---|---|
| Knob / nut | FRP (knob) |
| Clamping bolt | FRP |
| Maximum temperature | 150℃ |
| The lowest temperature | -20℃ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Corresponding seal | Elastomer seal only |
| Pressurization | ○ |
| Non-magnetic | ○ |
| Radiation resistance | ○ |
| chemical resistance | △ |
| Clean Room | ○ |
| Insulation | ○ |
| METHOD tightening | Hand tighten |
| RoHS2 corresponding | ○ |
| Link | Aluminum |
|---|---|
| Knob / nut | Stainless steel (nut) |
| Clamping screw | stainless |
| Clamping bolt | Aluminum |
| Maximum temperature | 100℃ |
| The lowest temperature | -271℃ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Corresponding seal | Elastomer seal only |
| Pressurization | ○ |
| Non-magnetic | ○ |
| Radiation resistance | ○ |
| chemical resistance | ○ |
| Clean Room | △ |
| Insulation | ○ |
| METHOD tightening | Torque Wrench |
| RoHS2 corresponding | ○ |
| Link | stainless |
|---|---|
| strap | stainless |
| Knob / nut | Stainless steel (bolt) |
| Clamping screw | stainless |
| Maximum temperature | 350℃ |
| The lowest temperature | -271℃ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Corresponding seal | Elastomer seal only |
| Pressurization | ○ |
| Radiation resistance | ○ |
| chemical resistance | ○ |
| Clean Room | △ |
| Insulation | ○ |
| METHOD tightening | Torque Wrench |
| RoHS2 corresponding | ○ |
| Knob / nut | stainless |
|---|---|
| Clamping screw | stainless |
| Clamping bolt | Aluminum |
| Maximum temperature | 150℃ |
| The lowest temperature | -270℃ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Corresponding seal | Elastomeric seal / metal seal |
| Non-magnetic | ○ |
| Clean Room | △ |
| METHOD tightening | Torque Wrench |
| RoHS2 corresponding | ○ |
| Link | stainless |
|---|---|
| strap | stainless |
| Knob / nut | stainless |
| Clamping screw | stainless |
| Clamping bolt | stainless |
| Maximum temperature | 315℃ |
| The lowest temperature | -270℃ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
| Corresponding seal | Aluminum / oxygen-free copper |
| Pressurization | ○ |
| Non-magnetic | ○ |
| Radiation resistance | ○ |
| chemical resistance | ○ |
| Clean Room | △ |
| METHOD tightening | Torque Wrench |
| RoHS2 corresponding | ○ |
| Flange material | SUS 304 |
|---|---|
| The inner surface processing | Buff 400 (equivalent to Ra 1.0 |
| RoHS2 corresponding | ○ |
| Material | SUS 304 |
|---|---|
| The inner surface processing | GBB Processing |
| RoHS2 corresponding | ○ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Pressurization | ○ |
| RoHS2 corresponding | ○ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Corresponding seal | Dedicated elastomeric seal |
| Pressurization | ○ |
| Non-magnetic | ○ |
| chemical resistance | ◎ |
| Clean Room | ○ |
| Insulation | ○ |
| RoHS2 corresponding | ○ |