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(Hours 9:00 to 18:00 except Saturdays, Sundays, and holidays)
- Cosmotec for Vacuum Components
- Vacuum Component
Vacuum Component Product List Vacuum Component
Category 17Matter
Subcategory 308Matter (281 ~300 )
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Leak rate <1.3x10<sup>-10</sup>Pa･㎥/sec Maximum temperature 150°C (body), 80°C (overall) type Valve O-ring included body SUS 304 -
Available pressure 0.12MPa ～10<sup>-6</sup> Pa Leak rate <1x10<sup>-7</sup>Pa･ℓ/sec The lowest temperature 10℃ Maximum temperature 150℃ Cycles until first service 2,000,000 (unheated and under The input power voltage 24 VDC (±10%) @0.5V pk-pk max. The input power power 80 W max. (operation of valve -
Maximum temperature 200°C (body), 80°C (overall) Available pressure 600 kpa~ 1.33x10-5 kpa Leak rate <1.0x10<sup>-9</sup>Pa･㎥/sec Main materials SUS 316 (double-acting), SUS31 Surface Material SUS 316 (double-acting), SUS31 Seal / gasket material PTFE The inner surface processing Ra ≤ 0.8μm
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Available pressure Atmospheric pressure ~ 10<sup> Adjustable minimum leakage*1 <6.7x10<sup>-9</sup>Pa･㎥/sec Leakage when valve is fully clos <6.7x10<sup>-11</sup>Pa･㎥/sec Maximum temperature 450℃ body SUS 304 Seal / gasket material WC Series Superabrasives/Cu Al -
Flange material SUS 304 Available pressure Atmospheric pressure ~ 10<sup> Leak rate <1.3x10<sup>-7</sup>Pa･ℓ/sec RoHS2 corresponding ○
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The lowest temperature -180℃ Maximum temperature 400℃ -
The lowest temperature -180℃ Maximum temperature 400℃
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The lowest temperature -180℃ Maximum temperature 400℃
