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- Cosmotec for Vacuum Components
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Vacuum Component Product List Vacuum Component
Category 17Matter
Subcategory 308Matter (221 ~240 )
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Available pressure Atmospheric pressure ~ 10<sup> Pressurization ○ RoHS2 corresponding ○ -
Available pressure Atmospheric pressure ~ 10<sup> Corresponding seal Dedicated elastomeric seal Pressurization ○ Non-magnetic ○ chemical resistance ◎ Clean Room ○ Insulation ○ RoHS2 corresponding ○ -
Flexible / bellows SUS 316L Tubes / Pipes SUS 316 life cycle 10000 cycle RoHS2 corresponding ○ -
Flange material SUS 316 Flexible / bellows SUS 316L life cycle 10000 cycle RoHS2 corresponding ○ -
Flange material Teflon ® (GRP) Flexible / bellows Teflon ® Maximum temperature 200℃ The lowest temperature -50℃ Leak rate <1.3x10<sup>-4</sup>Pa･㎥/sec Corresponding seal Elastomer seal Non-magnetic ○ chemical resistance ○ Clean Room ○ Insulation ○ RoHS2 corresponding ○
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Flange material SUS 304 Flexible / bellows SUS 316L life cycle 10000 cycle RoHS2 corresponding ○ -
Flange material SUS 304 Flexible / bellows SUS 316L life cycle 10000 cycle RoHS2 corresponding ○ -
Flange material SUS304（NW only SUS316) Flexible / bellows SUS 316L life cycle 10000 cycle Bellows plate thickness 0.15 Maximum temperature 450℃ The lowest temperature -196℃ RoHS2 corresponding ○ -
Seal / gasket material Viton ® Maximum temperature 200℃ The lowest temperature -20℃ Available pressure Atmospheric pressure ~ 10<sup> Leak rate <1.3x10<sup>-7</sup>Pa･㎥/sec Pressurization ○ Non-magnetic ○ Clean Room ○ RoHS2 corresponding ○ -
Seal / gasket material Aluminum Maximum temperature 200℃ The lowest temperature -50℃ Pressurization ○ Non-magnetic ○ Clean Room ○ RoHS2 corresponding ○ -
The outer ring Teflon ® The inner ring Teflon ® Non-magnetic ○ chemical resistance ◎ Clean Room ○ Insulation ○ RoHS2 corresponding ○
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Available pressure Atmospheric pressure ~ 10<sup> Pressurization ○ Non-magnetic ○ Radiation resistance ○ chemical resistance ○ Clean Room ○ RoHS2 corresponding ○ -
Maximum temperature 450℃ The lowest temperature -270℃ Available pressure 10<sup>-9</sup> Pa Pressurization ○ Non-magnetic ○ Radiation resistance ○ chemical resistance ○ Clean Room ○ RoHS2 corresponding ○ -
Maximum temperature 450℃ The lowest temperature -270℃ Available pressure 10<sup>-9</sup> Pa Pressurization ○ Non-magnetic ○ Radiation resistance ○ chemical resistance ○ Clean Room ○ RoHS2 corresponding ○
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Flange material SUS 304 The inner surface processing Buff 400 (equivalent to Ra 1.0 RoHS2 corresponding ○
