About 8,000 types of vacuum components in stock at all times.Business Hours: 9:00-18:00, excluding weekends and holidays
Available pressure | Atmospheric pressure ~ 10<sup> |
---|---|
Adjustable minimum leakage*1 | <6.7x10<sup>-9</sup>Pa・㎥/sec |
Leakage when valve is fully clos | <6.7x10<sup>-11</sup>Pa・㎥/sec |
Maximum temperature | 450℃ |
body | SUS 304 |
Seal / gasket material | WC Series Superabrasives/Cu Al |
Available pressure | Atmospheric pressure ~ 10<sup> |
---|---|
Adjustable minimum leakage*1 | <6.7x10<sup>-9</sup>Pa・㎥/sec |
Leakage when valve is fully clos | <6.7x10<sup>-11</sup>Pa・㎥/sec |
Maximum temperature | 450℃ |
body | SUS 304 |
Seal / gasket material | WC Series Superabrasives/Cu Al |
ICF | 70 |
Gas INLET side | Φ8 |