About 10,000 types of vacuum components in stock at all times.Business Hours: 9:00-18:00, excluding weekends and holidays
Feedthrough
Isolator
Viewport
Vacuum Component
Vacuum Valve
Motion Feedthroughs
Others
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| RoHS2 corresponding | ○ |
| Flange material | SUS 304 |
|---|---|
| Tubes / Pipes | SUS 304 |
| The inner surface processing | Machined (Ra3.2 equivalent) |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| Tubes / Pipes | SUS 304 |
| RoHS2 corresponding | ○ |
| Fittings | SUS 316 |
|---|---|
| Flange material | SUS 304 |
| Tubes / Pipes | SUS 304 |
| RoHS2 corresponding | ○ |
| Main materials | SUS 304 |
|---|---|
| Leak rate | <5x10<sup>-9</sup>Pa・㎥/sec |
| O-ring | Viton ® |
| RoHS2 corresponding | ○ |
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Leakage when valve is fully clos | <6.7x10<sup>-11</sup>Pa・㎥/sec |
| Orifice diameter | Φ3.5 mm |
| Maximum temperature | 125℃ |
| Seal / gasket material | Viton ® |
| Shaft seal lubricant | Silicone grease for high vacuu |
| Valve body shaft | SUS 304 |
| valve | Brass (Ni plating) |
| handle | phenol resin |
| Flange material | SUS 304 |
|---|---|
| window | Borosilicate glass |
| Maximum temperature | 350℃ |
| Leak rate | <1.0x10<sup>-8</sup>Pa・㎥/sec |
| RoHS2 corresponding | ○ |
| window | Synthetic quartz |
|---|---|
| Maximum temperature | 200℃ |
| The lowest temperature | -100℃ |
| RoHS2 corresponding | ○ |
| window | Magnesium fluoride |
|---|---|
| Maximum temperature | 200℃ |
| The lowest temperature | -100℃ |
| Flange material | SUS 304 |
|---|---|
| window | Calcium fluoride |
| Maximum temperature | 200℃ |
| The lowest temperature | -100℃ |
| RoHS2 corresponding | ○ |
| Flange material | SUS 304 |
|---|---|
| window | germanium |
| Maximum temperature | 200℃ |
| The lowest temperature | -100℃ |
| Lead equivalent (mmPb) | 1.5 |
|---|---|
| Thermal expansion coefficient (/ | 80✕10<sup>-7</sup>(30~380℃) |
| Softening point (℃) | 585 |
| Flexural strength (MPa) | 25 |
| Young's modulus (GPa) | 63 |
| Poisson's ratio | 0.24 |
| Knoop hardness | 370 |
| Refractive index (Na-D line) | 1.71 |