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- Cosmotec for Vacuum Components
- Vacuum Component
- Vacuum Components ICF standards
Vacuum Components ICF standards Product List Vacuum Component
Category 20Matter
Subcategory 101Matter (61 ~80 )
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Fittings SUS 316 Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○ -
Flange material SUS 304 Tubes / Pipes SUS 304 RoHS2 corresponding ○ -
Flange material SUS 304 Tubes / Pipes SUS 304 Fittings SUS 316 RoHS2 corresponding ○ -
Main materials SUS304(L type), SUS304L(Y,Z ty Flexible / bellows AM-350 Leakage rate (hood section) <1.0x10<sup>-10</sup>Pa･㎥/sec Leak rate (sheet leakage) <1.0x10<sup>-10</sup>Pa･㎥/sec RoHS2 corresponding ○ -
Flange material SUS 304 body SUS 316 Flexible / bellows SUS 321 handle Aluminum 2024-T4 Maximum temperature 150℃ Available pressure Atmospheric pressure ~ 10<sup> Leak rate <1.3x10<sup>-7</sup>Pa･㎥/sec RoHS2 corresponding ○ -
Available pressure Atmospheric pressure ~ 10<sup> Adjustable minimum leakage*1 <6.7x10<sup>-9</sup>Pa･㎥/sec Leakage when valve is fully clos <6.7x10<sup>-11</sup>Pa･㎥/sec Maximum temperature 450℃ body SUS 304 Seal / gasket material WC Series Superabrasives/Cu Al
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Main materials SUS 304 Leak rate <5x10<sup>-9</sup>Pa･㎥/sec O-ring Viton ® RoHS2 corresponding ○ -
Available pressure Atmospheric pressure ~ 10<sup> Leakage when valve is fully clos <6.7x10<sup>-11</sup>Pa･㎥/sec Orifice diameter Φ3.5 mm Maximum temperature 125℃ Seal / gasket material Viton ® Shaft seal lubricant Silicone grease for high vacuu Valve body shaft SUS 304 valve Brass (Ni plating) handle phenol resin -
Flange material SUS 304 The inner surface processing Buff 400 (equivalent to Ra 1.0 RoHS2 corresponding ○ -
Flange material SUS 304 The inner surface processing Buff 400 (equivalent to Ra 1.0 RoHS2 corresponding ○ -
Flange material SUS 304 The inner surface processing Buff 400 (equivalent to Ra 1.0 RoHS2 corresponding ○
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Flange material SUS 304 The inner surface processing Machined (Ra3.2 equivalent) RoHS2 corresponding ○ -
Flange material SUS 304 The inner surface processing Buff 400 (equivalent to Ra 1.0 RoHS2 corresponding ○ -
Flange material SUS 304 The inner surface processing Buff 400 (equivalent to Ra 1.0 RoHS2 corresponding ○ -
Flange material SUS 304 The inner surface processing Buff 400 (equivalent to Ra 1.0 RoHS2 corresponding ○
