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Category 8Matter
Subcategory 638Matter (461 ~480 )
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type Optical fiber Fiber 石英 Leak rate <5.5x10<sup>-9</sup>Pa･㎥/sec Reference-voltage value (MPa) 1 Main materials SUS 304 Insulator Epoxy Connection type FC/PC RoHS2 corresponding ○ -
type High voltage and low current electrode SUS 316L Flange material SUS 316L sleeve Kovar ® Insulator Alumina ceramic Maximum temperature 450℃ The lowest temperature -196℃ Leak rate <1.3x10<sup>-10</sup>Pa･㎥/sec Withstand voltage: DC 30 kV Electric current / 1 pc. 3 A The number of electrode 1 Feedthrough 30kV / 3A -
type SMA Connection type Vacuum side and the atmosphere electrode Kovar ® Flange material SUS 304 sleeve Kovar ® Insulator Alumina ceramic Maximum temperature 450℃ The lowest temperature -196℃ Leak rate <1.3x10<sup>-10</sup>Pa･㎥/sec Classification Flanged terminal type Ground shield Impedance 50 Ω frequency 15 GHz (reference value) Insulation resistance value 10⁹ ohm Withstand voltage: DC 1 kV Electric current / 1 pc. 3 A RoHS2 corresponding ○
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The lowest temperature -180℃ Maximum temperature 400℃ -
The lowest temperature -180℃ Maximum temperature 400℃ -
The lowest temperature -180℃ Maximum temperature 400℃ -
Flange material SUS 304 window germanium Maximum temperature 200℃ The lowest temperature -100℃ -
window Zinc selenide Maximum temperature 200℃ The lowest temperature -100℃ AR coating ○
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Tubes / Pipes SUS Glass Borosilicate glass The lowest temperature -180℃ Maximum temperature 400℃ -
Tubes / Pipes SUS Glass Borosilicate glass The lowest temperature -180℃ Maximum temperature 400℃ -
The lowest temperature -180℃ Maximum temperature 450℃ -
Tubes / Pipes SUS Glass Borosilicate glass The lowest temperature -180℃ Maximum temperature 400℃
