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● SUS304, SUS316L, and aluminum welding flange
● inner, outer center ring Compatible with both
● non-magnetic type also available
● radiation-resistant region, can be used in cryogenic
● corresponds to a pressure range of ultra-high vacuum 10⁻⁹Pa stand-pressure (when the aluminum edge seals used)
● sealing surface precision, high flatness, resistance to bending
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Pressurization | ○ |
| RoHS2 corresponding | ○ |
| NW/KF | 16 |
| A | 30 |
| B | 17.2 |
| C | 16 |
| D | 20 |
| L | 50 |
| Flange material | SUS 304 |
| Maximum temperature | 350℃ |
| The lowest temperature | -270℃ |
● SUS304, SUS316L, and aluminum welding flange
● inner, outer center ring Compatible with both
● non-magnetic type also available
● radiation-resistant region, can be used in cryogenic
● corresponds to a pressure range of ultra-high vacuum 10⁻⁹Pa stand-pressure (when the aluminum edge seals used)
● sealing surface precision, high flatness, resistance to bending
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Pressurization | ○ |
| RoHS2 corresponding | ○ |
| NW/KF | 25 |
| A | 40 |
| B | 26.2 |
| C | 24 |
| D | 28 |
| L | 20 |
| Flange material | SUS 304 |
| Maximum temperature | 350℃ |
| The lowest temperature | -270℃ |
● SUS304, SUS316L, and aluminum welding flange
● inner, outer center ring Compatible with both
● non-magnetic type also available
● radiation-resistant region, can be used in cryogenic
● corresponds to a pressure range of ultra-high vacuum 10⁻⁹Pa stand-pressure (when the aluminum edge seals used)
● sealing surface precision, high flatness, resistance to bending
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Pressurization | ○ |
| RoHS2 corresponding | ○ |
| NW/KF | 40 |
| A | 55 |
| B | 41.2 |
| C | 40 |
| D | 44.5 |
| L | 25 |
| Flange material | SUS 304 |
| Maximum temperature | 350℃ |
| The lowest temperature | -270℃ |
● SUS304, SUS316L, and aluminum welding flange
● inner, outer center ring Compatible with both
● non-magnetic type also available
● radiation-resistant region, can be used in cryogenic
● corresponds to a pressure range of ultra-high vacuum 10⁻⁹Pa stand-pressure (when the aluminum edge seals used)
● sealing surface precision, high flatness, resistance to bending
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Pressurization | ○ |
| RoHS2 corresponding | ○ |
| NW/KF | 10 |
| A | 30 |
| B | 12.2 |
| C | 10 |
| D | 14 |
| L | 20 |
| Flange material | SUS 316L |
| Maximum temperature | 350℃ |
| The lowest temperature | -270℃ |
● SUS304, SUS316L, and aluminum welding flange
● inner, outer center ring Compatible with both
● non-magnetic type also available
● radiation-resistant region, can be used in cryogenic
● corresponds to a pressure range of ultra-high vacuum 10⁻⁹Pa stand-pressure (when the aluminum edge seals used)
● sealing surface precision, high flatness, resistance to bending
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Pressurization | ○ |
| RoHS2 corresponding | ○ |
| NW/KF | 25 |
| A | 40 |
| B | 26.2 |
| C | 24 |
| D | 28 |
| L | 20 |
| Flange material | SUS 316L |
| Maximum temperature | 350℃ |
| The lowest temperature | -270℃ |
● SUS304, SUS316L, and aluminum welding flange
● inner, outer center ring Compatible with both
● non-magnetic type also available
● radiation-resistant region, can be used in cryogenic
● corresponds to a pressure range of ultra-high vacuum 10⁻⁹Pa stand-pressure (when the aluminum edge seals used)
● sealing surface precision, high flatness, resistance to bending
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Pressurization | ○ |
| RoHS2 corresponding | ○ |
| NW/KF | 50 |
| A | 75 |
| B | 52.2 |
| C | 50 |
| D | 57 |
| L | 30 |
| Flange material | SUS 316L |
| Maximum temperature | 350℃ |
| The lowest temperature | -270℃ |
● SUS304, SUS316L, and aluminum welding flange
● inner, outer center ring Compatible with both
● non-magnetic type also available
● radiation-resistant region, can be used in cryogenic
● corresponds to a pressure range of ultra-high vacuum 10⁻⁹Pa stand-pressure (when the aluminum edge seals used)
● sealing surface precision, high flatness, resistance to bending
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Pressurization | ○ |
| RoHS2 corresponding | ○ |
| NW/KF | 63 |
| A | 87 |
| B | 70.2 |
| C | 70 |
| D | 76 |
| L | 30 |
| Flange material | SUS 316L |
| Maximum temperature | 350℃ |
| The lowest temperature | -270℃ |
● SUS304, SUS316L, and aluminum welding flange
● inner, outer center ring Compatible with both
● non-magnetic type also available
● radiation-resistant region, can be used in cryogenic
● corresponds to a pressure range of ultra-high vacuum 10⁻⁹Pa stand-pressure (when the aluminum edge seals used)
● sealing surface precision, high flatness, resistance to bending
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Pressurization | ○ |
| RoHS2 corresponding | ○ |
| NW/KF | 16 |
| A | 30 |
| B | 17.2 |
| C | 16 |
| D | 20 |
| L | 50 |
| Flange material | SUS 316L |
| Maximum temperature | 350℃ |
| The lowest temperature | -270℃ |
● SUS304, SUS316L, and aluminum welding flange
● inner, outer center ring Compatible with both
● non-magnetic type also available
● radiation-resistant region, can be used in cryogenic
● corresponds to a pressure range of ultra-high vacuum 10⁻⁹Pa stand-pressure (when the aluminum edge seals used)
● sealing surface precision, high flatness, resistance to bending
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Pressurization | ○ |
| RoHS2 corresponding | ○ |
| NW/KF | 50 |
| A | 75 |
| B | 52.2 |
| C | 50 |
| D | 57 |
| L | 60 |
| Flange material | SUS 316L |
| Maximum temperature | 350℃ |
| The lowest temperature | -270℃ |
● SUS304, SUS316L, and aluminum welding flange
● inner, outer center ring Compatible with both
● non-magnetic type also available
● radiation-resistant region, can be used in cryogenic
● corresponds to a pressure range of ultra-high vacuum 10⁻⁹Pa stand-pressure (when the aluminum edge seals used)
● sealing surface precision, high flatness, resistance to bending
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Pressurization | ○ |
| RoHS2 corresponding | ○ |
| NW/KF | 25 |
| A | 40 |
| B | 26.2 |
| C | 24 |
| D | 28 |
| L | 40 |
| Flange material | Aluminum(A5052) |
| Maximum temperature | 150℃ |
| The lowest temperature | -270℃ |
● SUS304, SUS316L, and aluminum welding flange
● inner, outer center ring Compatible with both
● non-magnetic type also available
● radiation-resistant region, can be used in cryogenic
● corresponds to a pressure range of ultra-high vacuum 10⁻⁹Pa stand-pressure (when the aluminum edge seals used)
● sealing surface precision, high flatness, resistance to bending
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Pressurization | ○ |
| RoHS2 corresponding | ○ |
| NW/KF | 63 |
| A | 87 |
| B | 70.2 |
| C | 70 |
| D | 76 |
| L | 60 |
| Flange material | SUS 316L |
| Maximum temperature | 350℃ |
| The lowest temperature | -270℃ |
● SUS304, SUS316L, and aluminum welding flange
● inner, outer center ring Compatible with both
● non-magnetic type also available
● radiation-resistant region, can be used in cryogenic
● corresponds to a pressure range of ultra-high vacuum 10⁻⁹Pa stand-pressure (when the aluminum edge seals used)
● sealing surface precision, high flatness, resistance to bending
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Pressurization | ○ |
| RoHS2 corresponding | ○ |
| NW/KF | 63 |
| A | 87 |
| B | 70.2 |
| C | 70 |
| D | 76 |
| L | 40 |
| Flange material | Aluminum(A5052) |
| Maximum temperature | 150℃ |
| The lowest temperature | -270℃ |
● SUS304, SUS316L, and aluminum welding flange
● inner, outer center ring Compatible with both
● non-magnetic type also available
● radiation-resistant region, can be used in cryogenic
● corresponds to a pressure range of ultra-high vacuum 10⁻⁹Pa stand-pressure (when the aluminum edge seals used)
● sealing surface precision, high flatness, resistance to bending
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Pressurization | ○ |
| RoHS2 corresponding | ○ |
| NW/KF | 125 |
| A | 161 |
| C | 127 |
| D | 133 |
| D1 | 144 |
| Flange material | SUS 304 |
| Maximum temperature | 350℃ |
| The lowest temperature | -270℃ |
● SUS304, SUS316L, and aluminum welding flange
● inner, outer center ring Compatible with both
● non-magnetic type also available
● radiation-resistant region, can be used in cryogenic
● corresponds to a pressure range of ultra-high vacuum 10⁻⁹Pa stand-pressure (when the aluminum edge seals used)
● sealing surface precision, high flatness, resistance to bending
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Pressurization | ○ |
| RoHS2 corresponding | ○ |
| NW/KF | 160 |
| A | 190 |
| C | 153 |
| D | 159 |
| D1 | 168 |
| Flange material | SUS 304 |
| Maximum temperature | 350℃ |
| The lowest temperature | -270℃ |
● SUS304, SUS316L, and aluminum welding flange
● inner, outer center ring Compatible with both
● non-magnetic type also available
● radiation-resistant region, can be used in cryogenic
● corresponds to a pressure range of ultra-high vacuum 10⁻⁹Pa stand-pressure (when the aluminum edge seals used)
● sealing surface precision, high flatness, resistance to bending
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Pressurization | ○ |
| RoHS2 corresponding | ○ |
| NW/KF | 200 |
| A | 252 |
| C | 213 |
| D | 219.1 |
| D1 | 230 |
| Flange material | SUS 304 |
| Maximum temperature | 350℃ |
| The lowest temperature | -270℃ |
● SUS304, SUS316L, and aluminum welding flange
● inner, outer center ring Compatible with both
● non-magnetic type also available
● radiation-resistant region, can be used in cryogenic
● corresponds to a pressure range of ultra-high vacuum 10⁻⁹Pa stand-pressure (when the aluminum edge seals used)
● sealing surface precision, high flatness, resistance to bending
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Pressurization | ○ |
| RoHS2 corresponding | ○ |
| NW/KF | 200 |
| C | 213 |
| D | 219.1 |
| L | 100 |
| Flange material | SUS 304 |
| Maximum temperature | 350℃ |
| The lowest temperature | -270℃ |
● Material lineup two types of Duran® and (borosilicate glass) quartz
● Since the internal readily observable, plasma, suitably controlled in high temperature applications
● Duran®: It is possible to shield the ultraviolet light
● Quartz: is ideal for transmitting ultraviolet light
● corresponds to the vacuum 10⁻⁷Pa table
● pressure corresponding possible
● maximum operating temperature: Duran® 450 ℃ quartz 1000 ℃
● cold area can accommodate up to -50 ° C.
● ion implantation apparatus, etc., is the best quartz is very clean applications
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Corresponding seal | Dedicated elastomeric seal |
| Pressurization | ○ |
| Non-magnetic | ○ |
| chemical resistance | ◎ |
| Clean Room | ○ |
| Insulation | ○ |
| RoHS2 corresponding | ○ |
| NW/KF | 10 |
| A | 30 |
| C | 12.4 |
| D | 16 |
| Flange material | Duran® (borosilicate glass) |
| Maximum temperature | 450℃ |
| The lowest temperature | -50℃ |
● Material lineup two types of Duran® and (borosilicate glass) quartz
● Since the internal readily observable, plasma, suitably controlled in high temperature applications
● Duran®: It is possible to shield the ultraviolet light
● Quartz: is ideal for transmitting ultraviolet light
● corresponds to the vacuum 10⁻⁷Pa table
● pressure corresponding possible
● maximum operating temperature: Duran® 450 ℃ quartz 1000 ℃
● cold area can accommodate up to -50 ° C.
● ion implantation apparatus, etc., is the best quartz is very clean applications
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Corresponding seal | Dedicated elastomeric seal |
| Pressurization | ○ |
| Non-magnetic | ○ |
| chemical resistance | ◎ |
| Clean Room | ○ |
| Insulation | ○ |
| RoHS2 corresponding | ○ |
| NW/KF | 10 |
| A | 30 |
| C | 13 |
| D | 16 |
| Flange material | Quartz |
| Maximum temperature | 1000℃ |
| The lowest temperature | -50℃ |
● Material lineup two types of Duran® and (borosilicate glass) quartz
● Since the internal readily observable, plasma, suitably controlled in high temperature applications
● Duran®: It is possible to shield the ultraviolet light
● Quartz: is ideal for transmitting ultraviolet light
● corresponds to the vacuum 10⁻⁷Pa table
● pressure corresponding possible
● maximum operating temperature: Duran® 450 ℃ quartz 1000 ℃
● cold area can accommodate up to -50 ° C.
● ion implantation apparatus, etc., is the best quartz is very clean applications
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Corresponding seal | Dedicated elastomeric seal |
| Pressurization | ○ |
| Non-magnetic | ○ |
| chemical resistance | ◎ |
| Clean Room | ○ |
| Insulation | ○ |
| RoHS2 corresponding | ○ |
| NW/KF | 16 |
| A | 30 |
| C | 16.4 |
| D | 20 |
| Flange material | Duran® (borosilicate glass) |
| Maximum temperature | 450℃ |
| The lowest temperature | -50℃ |
● Material lineup two types of Duran® and (borosilicate glass) quartz
● Since the internal readily observable, plasma, suitably controlled in high temperature applications
● Duran®: It is possible to shield the ultraviolet light
● Quartz: is ideal for transmitting ultraviolet light
● corresponds to the vacuum 10⁻⁷Pa table
● pressure corresponding possible
● maximum operating temperature: Duran® 450 ℃ quartz 1000 ℃
● cold area can accommodate up to -50 ° C.
● ion implantation apparatus, etc., is the best quartz is very clean applications
| Available pressure | Atmospheric pressure ~ 10<sup> |
|---|---|
| Corresponding seal | Dedicated elastomeric seal |
| Pressurization | ○ |
| Non-magnetic | ○ |
| chemical resistance | ◎ |
| Clean Room | ○ |
| Insulation | ○ |
| RoHS2 corresponding | ○ |
| NW/KF | 16 |
| A | 30 |
| C | 17 |
| D | 20 |
| Flange material | Quartz |
| Maximum temperature | 1000℃ |
| The lowest temperature | -50℃ |