Flange
10
15
16
20
25
26
32
40
50
63
65
80
100
125
160
200
250
320
400
-
10 - 50
10-63
25 - 40
25-40
10/16
16/40
20/25
25/16
32/40
複数選択する
候補を閉じる
選択を解除する
34
54
54 (foreign)
70
70 (wide)
86
114
117
152
203
253
256
305
356
406
34 / 70
70 / 34
114 / 34
114 / 86
152 / 34
152 / 70
152 / 203
203 / 34
253 / 70
253 / 114
114~203
-
複数選択する
候補を閉じる
選択を解除する
10
10 - 25
20
20 - 25
20 - 50
25
40
40 - 50
50
65
65 - 150
80 - 150
80
100
125
150
200
200 - 300
250
300
350
400
400 - 450
450
500
500 - 550
550
-
複数選択する
候補を閉じる
選択を解除する
10
10 - 25
20
20 - 25
20 - 50
25
40
40 - 50
50
65
65 - 150
80
80 - 150
100
125
150
200
200 - 300
250
300
350
400
400 - 450
450
500
500 - 550
550
-
複数選択する
候補を閉じる
選択を解除する
63 - 80
63
63 - 100
63 - 160
63 - 250
80
80 - 100
80 - 160
100
100 - 160
160
160 - 250
200
250
320
320-500
400
500
600
630
複数選択する
候補を閉じる
選択を解除する
63
63 - 100
80
100
160
160 - 250
200
250
320
320-630
400
500
600
630
複数選択する
候補を閉じる
選択を解除する
16
25
40
50
63
80
100
160
200
250
複数選択する
候補を閉じる
選択を解除する
1S
1S - 1.5S
1.5S
2S
2.5S
3S
3.5S
複数選択する
候補を閉じる
選択を解除する
□ 64 x 48 / T=8
□ 64 x 92 / T=8
□ 73 x 63
□ 75 x 59 / T=8
□ 75 x 84 / T=8
□ 90 x 57 / T=8
□ 90 x 86 / T=8
□ 110 x 56 / T=8
□ 110 x 91 / T=8
□ 110 x 104 / T=8
複数選択する
候補を閉じる
選択を解除する
JIS10K
15A
20A
25A
32A
40A
50A
65A
type
BNC
D-Sub
BNC/MHV
BNC/SHV
BNC/SMA
SMA
N
LM
MHV
SHV
SHV-B
Thermocouple E type
Thermocouple E/J type
Thermocouple J type
Thermocouple type K
Thermocouple T type
Thermocouple N Type
Thermocouple R/S Type
T thermocouple/current inducti
K Thermocouple / cable termina
USB2.0 Female
USB3.0 Means
USB3.1 female
K thermocouple/High current
T Thermocouple/High current
standard
OMEGA Type
OMEGA ™ thermocouple type K
OMEGA™ Thermocouple C Type
OMEGA™ Thermocouple E Type
OMEGA™ Thermocouple J Type
OMEGA™ Thermocouple N Type
OMEGA™ Thermocouple R/S Type
Low voltage and medium current
High current
high voltage
High voltage and low current
High-voltage and medium curren
High voltage and high current
Insulation flange
Optical fiber
Water-cooled terminal
Micro D-Sub (MIL-DTL-83513)
Coaxial/High voltage
7/16
TRIAXIAL
double-ended
MS
マイクロドット
High Voltage RF
coaxial
Valve O-ring included
LAN
HDMI
Without valve section Viton®.
with panel mount
Without panel mount
高温
超高温
SUS
Tube / Fitting Size
1/16 inch
1/8 inch
3/16 inch
1/4 inch
5/16 inch
3/8 inch
1/2 inch
5/8 inch
3/4 inch
7/8 inch
1 inch
1-1/8 inch
1-1/4 inch
1-3/8 inch
1-1/2 inch
2 inch
2-1/2 inch
2-3/8 inch
2-4/3 inch
2-4/5 inch
3 inch
4 inch
5 inch
6 inch
6.4 inch
12.7 inch
1/16
1/8
1/4
3/8
1/2
3/4
1/1
1-1/8
2-3/4
2 mm
3 mm
4 mm
5 mm
6 mm
8 mm
10 mm
12 mm
12.7 mm
15 mm
16.4 mm
18 mm
19 mm
19.1 mm
21.7 mm
30 mm
31.75 mm
51 mm
59.5 mm
80 mm
103 mm
138 mm
20A
32A
50A
65A
80A
100A
3/8 inch・1/2 inch
1/4 inch・1/2 inch
1/2 inch・1/4 inch
1/8 inch・1/4 inch
1/4 inch・1/8 inch
Base flange / Port flange
ICF70 / ICF34
ICF114 / ICF34
ICF152 / ICF34
ICF203 / ICF34
ICF70 / NW16
ICF70 / TA1/4
ICF70 / SW1/4
ICF70 / FVCR1/4
ICF70 / MVCR1/4
Male/Female
Male Type
Female Type
F/M
One side F, one side M
A
0.36
0.32
0.5
0.52
0.65
1.5
1.59
2
2.5
2.75
3.18
3.2
3.3
4.2
4.57
4.6
4.8
5
5.1
5.2
5.5
6.1
6.35
6.4
6.7
7
7.5
7.7
8
8.2
8.5
9
9.5
9.52
9.6
9.65
10
10.4
11
12
12.2
12.7
12.8
13.6
13.9
14
14.1
14.7
15
15.4
15.5
15.7
15.8
15.875
15.9
16
17
17.3
18
18.5
18.6
19
19.05
19.3
19.5
19.8
20
20.1
20.2
20.3
20.5
21
21.2
21.3
21.4
22
22.1
22.4
22.5
23
23.2
23.6
24
24.01
24.1
24.7
25
25.2
25.4
25.6
26
26.1
26.2
26.5
27.2
27.5
27.7
27.8
27.82
27.9
28
28.6
28.7
29
29.2
30
30.2
30.36
30.4
31
31.1
31.75
31.8
32
32.1
32.2
32.7
32.8
32.9
33
33.2
34
34.1
34.17
34.2
34.8
35
35.2
35.6
35.8
36
36.7
36.71
37.3
37.5
37.7
37.98
38
38.4
38.5
39
39.2
39.4
40
40.5
40.6
41
41.0
41.2
41.7
41.9
42
42.2
42.3
42.7
43
43.7
44
45
44.5
45.5
45.8
46
46.2
46.3
48
48.1
48.2
48.3
48.4
48.5
50
50.5
50.8
51.6
52
52.2
52.23
52.7
53
53.8
54
54.0
54.6
55
55.2
55.5
56
56.8
57
57.2
57.6
59
60
60.3
60.5
61
61.6
62.5
63
63.8
64
65
67.3
69
69.0
69.3
69.6
69.9
70
71
72
72.9
74
74.6
75
76.3
77
77.5
77.8
78
80
81
82
82.3
82.4
82.6
82.8
83
85
85.3
85.7
86
86.4
86.6
87
89.1
90
91
91.4
92
93
94
95
95.2
100
101.6
101.8
101.9
102
104.8
105
106
107
109
110
113.5
114
114.3
115.9
116
117
118
119
120
120.4
120.5
120.6
121
122
123
125.88
127
128
130
133
134
140
141
144.5
145
148
150
152
152.6
152.8
152.9
153
153.1
154
156
158.7
160
161
162
165
165.1
166.5
170
171
171.2
171.3
172
177.8
178
179
180
180.1
183
185
188
190
202.4
203
205
210
211
212.6
212.8
213
217.3
222
222.1
225
235
237
239
240
242
252
253
255
260.4
261
267.4
272
272.9
273.3
277
285
287
290
292
300
301
305
306
310
313
316.5
320
335
344
346.4
350
356
361
369
370
377
377.3
379
398
400
425
428.8
450
450.1
510
520
533
575
625
680
17.05
7/8-20UNEF-2A
l-1/8-18UNEF-2A
1-1/4-18UNEF-2A
l-3/8-18UNEF-2A
1-1/2-18UNEF-2A
1-3/4-18UNS-2A
-
37
2.1
2.2
550
690
610
750
59.5
73
89
112.5
501
651
685
91.2
B
0.4
0.36
0.5
0.52
0.72
0.77
0.9
1
1.0
1.4
1.5
1.6
1.7
1.74
1.8
2
2.2
2.3
2.4
2.62
2.9
3
3.175
3.2
3.4
3.6
4
4.3
4.35
4.5
4.7
4.8
5
5.1
5.3
5.8
6
6.4
6.6
7
7.1
7.4
7.5
7.52
7.6
7.62
8
8.7
8.72
9
9.52~
9.6
9.8
9.83
10
10.2
10.22
10.3
10.7
11
11.1
11.2
11.9
12
12.2
12.5
12.7
12.8
13
13.5
14
14.3
14.7
14.9
15
15.5
15.8
15.88
15.88~
15.9
16
16.3
16.57
17
17.05
17.2
17.3
17.5
17.78
17.8
17.86
18
18.5
19
19.1
19.8
19.9
20
20.2
20.6
21.1
21.4
21.95
22
22.1
22.2
22.23
22.4
22.5
22.92
23
23.5
23.8
23.9
24
24.2
25
25.2
25.4
25.5
25.7
26
26.2
26.3
27
27.6
27.7
28
28.5
29
29.4
29.5
29.7
29.9
30
30.2
31.6
31.8
32
32.1
32.9
33
33.3
33.5
33.8
34
34.8
34.9
34.93
35
35.2
35.3
35.5
36.2
36.5
36.7
37
37.1
37.3
38
38.4
38.5
38.8
38.9
39
39.1
39.5
39.7
40
41
41.1
41.2
41.28
41.3
41.5
42
42.4
42.7
42.8
42.9
43
43.1
44
46
46.2
46.3
46.5
47
47.5
47.6
47.8
48
48.3
48.5
48.6
49
50
50.3
51
52
52.2
52.3
53.57
53.9
54
54.5
54.9
55
56
56.5
57
58.5
59
59.92
60
60.2
60.5
60.7
61
61.5
61.8
61.9
62
62.3
63
63.6
63.8
64
64.5
65
66.27
66.5
66.6
67
67.3
67.6
68
68.3
69
69.44
70
70.2
70.3
72
72.62
72.4
72.9
73
74
74.3
74.6
75
76.5
77
78
78.4
78.97
80
81
82.5
82.3
82.6
83
83.1
83.2
84
85
85.1
86
87
88
89.5
89.7
90
91.6
92
93
94.84
95
95.5
96
97
98.3
99
99.3
100
101
101.8
101.9
102
102.2
103
104.1
104.37
105
106
107
108.3
110
111
112
113
114
115
116
116.3
119
120
120.6
120.7
121
123
125
127
127.2
128.5
130
135
136
136.8
139.5
140
141
146
147
147.5
148
148.5
149.1
149.2
150
151
151.8
152
152.6
152.7
153
153.2
154
155
161
162.2
165
166
167
170
171
171.3
171.5
173
175
177
183
196
197
197.1
198
198.5
200
202
203
203.2
204
207
208.5
209
210
211
212
213
213.2
213.3
215
215.3
216
217
218
218.1
222.3
222.5
223
231
232
235
236
247.7
250.8
251
254
254.2
254.5
255
256
257.5
269
260
261
261.3
263
264.7
266.1
267
268
270
272
273.2
276
285
289
296.8
300
301.8
305
311.1
314
314.5
318
319.6
320
322
323
350.5
351
371
376
392.9
396.8
401.5
425.5
452
475
494
504
524.5
555
579
3/4
1/2
3/8
1/4
1/8
-
645
C
0
0.5
0.7
1
1.2
1.58
1.7
2
2.3
2.4
2.5
2.6
2.7
2.8
3
3.1
3.175
3.18
3.2
3.3
3.5
3.8
4
4.2
4.57
4.7
4.76
5
5.1
5.5
5.6
5.8
5.9
6
6.1
6.35
6.4
6.5
6.6
6.7
6.9
7
7.1
7.2
7.5
7.6
7.7
7.94
8
8.1
8.2
8.3
8.5
8.8
8.9
9
9.2
9.5
9.52
9.53
9.6
9.7
10
10.16
10.2
10.5
10.7
10.8
11
11.5
11.8
11.7
12
12.1
12.2
12.4
12.5
12.7
12.8
13
13.3
13.4
13.5
13.8
13.9
14
14.2
14.3
15
15.3
15.4
15.5
15.7
15.8
15.9
16
16.2
16.4
16.5
17
17.1
17.2
17.3
17.4
17.5
17.6
17.8
18
18.2
18.3
18.5
18.8
19
19.05
19.1
19.3
19.4
19.5
19.6
20
20.5
20.8
21
21.4
21.5
21.7
22
22.2
22.5
22.88
23
23.3
23.8
24
24.7
24.8
24.9
25
25.4
25.5
26
26.2
27
27.2
27.5
27.7
27.94
28
28.5
28.6
29
30
30.1
31.5
31.8
31.9
32
32.1
32.3
33
34
34.1
34.3
34.9
35
35.58
35.6
36
37
37.3
37.5
38
38.1
38.5
39
40
40.5
40.6
41
41.2
41.4
41.5
42
42.7
43
43.1
43.2
43.5
43.7
44
44.5
44.8
45
45.2
45.7
47
47.4
47.5
48
48.2
48.26
48.6
48.9
49
49.5
49.8
50
50.2
50.3
50.8
51
51.5
52
52.2
52.7
53
53.2
53.5
53.7
54
54.8
55
55.1
55.5
55.6
56
56.4
56.5
57
57.4
57.6
57.9
58
59
59.9
60
60.1
60.5
60.8
61
61.5
61.8
62.5
63
63.1
63.2
63.5
63.8
64
64.5
65
66
66.3
67.3
67.5
68
68.3
69
69.1
69.3
70
70.1
70.2
70.4
70.5
70.6
71
71.1
71.9
72
73
73.6
73.7
73.9
74
75
75.1
75.3
75.5
75.7
76
76.2
76.3
76.5
76.6
77
78.1
78.3
78.7
79
80
80.5
81
81.3
81.5
82
82.6
83
83.1
83.5
83.8
84
85
85.1
85.3
86
86.4
86.5
86.9
87
89
88
88.9
89.1
89.4
90
90.3
91
91.4
91.5
92
94.6
95
95.5
96
96.5
97.5
98
99.5
100
100.5
101.6
101.9
102
102.1
102.2
102.6
104.6
104.7
105.2
105.5
106
107
108
108.2
109
109.5
110
114
114.3
114.6
115
116.5
116.8
117
117.1
118.8
119
119.3
120
122
122.5
125
126
127
128
128.5
128.6
130
130.5
131
134
135
136
137.4
139.8
140.1
141
144
145
148
150
151
151.5
152
152.4
152.9
153
153.5
155
161
165
165.2
165.5
166
170
173
174
175
176
181
190
197.2
200
203
203.2
203.5
203.7
209
213
213.2
215
216.3
216.8
218
220
225
236
250
254
254.5
260
261
267.4
269
285
305.3
305.6
320
324.4
357.5
406.9
409
460
510
560
T
-
23.9
196
195
C1
17
19
19.05
20
25.4
26
27.2
32
34.3
27.5
17.6
18
25
31
37
4.6
6.4
7.9
9.4
12.7
15.8
19.1
2.1
28.5
31.8
34.8
13
7
10
31.2
21.7
16
22
38
38.1
41
42.7
45
48.9
50.8
60.5
51
52
60.8
63.5
64
65
70
75
76.2
76.6
77
81
83
89.4
100
101.6
102
114.6
125
127
140.1
151
153
152.4
211
165.5
216.8
259
267.7
319.3
18.5
39.4
9
6
C2
225
-
175
150
125
100
80
70
60
40
32
20
278
328
35
49
D
0.5
4.25
5.84
7.43
8.64
6.05
9.23
1.6
1.5
2.3
3.4
4.2
1.74
6.5
15.1
9.5
18.6
18.7
12.7
15.65
7.9
5.5
5.35
5.6
1
2
2.5
3
3.3
4
4.35
4.5
5.4
6
7
7.52
8
10
8.53
9.65
10.22
10.7
10.9
11.2
11.8
12.2
12
12.4
12.95
13
13.5
14
14.2
14.5
15
15.3
15.7
15.75
15.8
16
16.1
16.5
16.6
17
17.1
17.3
17.5
17.6
17.7
18
17.8
18.2
18.4
19
18.5
18.8
19.3
19.4
19.5
20
20.9
21
21.3
21.5
21.6
22
22.0
22.1
22.4
22.5
23
23.4
23.6
23.9
24
24.2
24.5
24.8
24.89
25
25.1
25.3
25.4
25.5
25.6
25.65
25.8
26
26.0
26.2
26.5
27
27.5
27.6
27.9
28
28.1
28.4
28.5
29
29.0
29.5
29.8
29.9
30
30.2
30.4
30.5
30.7
30.8
31
31.2
31.8
32
32.3
32.5
32.8
33
33.02
33.2
33.3
33.5
33.8
33.9
34
34.5
34.7
34.8
35
35.6
35.7
35.9
36
36.5
36.6
37
37.1
37.2
37.5
37.8
37.9
38
38.1
39
38.35
39.4
39.6
40
40.2
40.5
40.6
40.7
41
41.1
41.2
41.5
42
42.5
42.7
43
44
44.5
44.7
44.9
45
46
45.3
45.5
45.7
46.1
46.5
46.9
46.99
47
47.2
47.5
47.6
47.8
49
47.9
48
48.5
49.2
49.5
49.7
50
50.1
50.5
50.8
51
51.05
51.1
52
53
54
54.5
54.9
55
55.1
55.2
55.6
55.9
56
56.3
56.8
56.9
57
57.2
57.5
57.7
58
58.8
59
59.2
59.4
59.5
60
60.2
61
61.1
61.5
61.9
62
62.2
63
63.2
63.4
63.5
63.7
64
65
65.5
66.3
66.9
67
67.1
67.5
67.6
67.9
69
70
70.1
71
71.1
72
72.1
72.3
72.9
73
73.5
74
74.6
74.9
75
75.8
76
76.2
77
78
78.2
78.7
79.5
79.6
80
80.8
81.5
82
82.5
82.6
83.1
84.9
87.5
88.9
89
89.5
89.7
90
90.7
92.7
93.2
95.6
97.6
98.3
99.5
100
100.1
100.9
10.1.4
101.6
102
102.6
103.1
103.4
103.6
104.6
104.9
105.1
105.2
105.5
106.1
107.2
107.4
107.7
108
108.3
108.4
110
111
112
113
114
114.3
115
117
118
119
120 ～ 139
120
125
127
129
132
133
133.8
134
135
143
145
146.9
147
150
153
156.5
158.4
159
159.3
160
161 ～ 201
165
165.1
182.6
183
195
197
200.2
201
205
205.3
208.3
217.8
219.1
227 ～ 268
248
254
256
256.3
259.4
262
267
269
273
283
295
T1
66.5
102.5
151.5
105
107
106.5
60.9
130
95.5
130.5
128
97.5
95
23.2
36.7
14.9
66
103
41.6
130.8
155.2
204.7
70.3
14.4
17.2
52.2
97.4
7.5
13.8
15.4
54.3
148.2
148.1
197.2
250
12.5
69.8
62.5
73.2
61.2
34.1
-
9.4
46.8
10.8
29.4
3.9
60.5
15.5
31.5
79
84
16.3
35.8
106
96.8
152
210.3
151.6
76.3
140.8
21.7
122
D1
10.1
5.8
12.6
16.3
2.8
3.8
5.3
1.8
8
14.3
20.7
10.6
16.6
5
18.2
10.7
0
10.4
16.5
17.5
15.75
16.1
4
7
17.6
5.35
8.53
17.1
13.6
19
15.7
15.8
16
21
21.2
22
22.1
23
23.2
25.3
23.4
24
25
28.6
29.2
29.8
30.5
30.6
33.4
33.5
33.9
34
34.8
35
37
37.1
38
39
39.4
40
45
46.1
46.6
47
48
55
55.6
58.9
59.2
59.4
59.5
60.2
68.3
70
70.2
71
71.5
86
89
93.7
95.2
95.6
96.4
97
97.4
117
120.8
144
146.2
147
168
218
230
270
279
D2
21.7
26.5
36.3
39
48.5
-
40
48
47
38
37
Φ D1
95
25.4
41.4
41.9
76.2
41.7
63.5
25
42
70
100
148
190
4.75
79.3
Φ D2
-
19.1
31.8
63.5
50.8
14
27
56
75
122
135
19
Φ D3
15.4
29
58.5
76.5
101.5
136
-
50
16
34.8
35.1
69.9
59.1
0.75
2.36
39
19.1
Φ D4
80
90
58.5
105
120
76.5
145
160
185
210
235
16.4
30
59.5
14
31
34
60.5
70
79.5
104.5
114
140
152
203
253
103
138
77.95
1.57
3.175
3.18
E
0
6
16
1/4
3/8
1/2
1
3/4
2
3
4
5
10
8
1 inch
7.4
1.25
1.5
6.35
9.53
6.4
9.5
11.1
14.3
3.18
4.4
6.7
9.9
13
2.5
3.2
4.5
5.2
6.3
8.3
10.3
12
12.3
13.6
18.6
12.7
15
18
19
19.1
19.05
19.6
20
21.7
22
22.2
24.1
24.6
25.4
25.7
27.2
28.6
29.2
30
30.2
31.75
31.8
32
32.4
34.1
34.9
38
35
38.1
40
42
42.1
42.7
45
46
50.8
55
56.4
57
60
60.5
60.6
70
70.2
74
77
77.2
83
84.6
84.7
85.2
86
88.9
89
89.5
90
96.5
96.6
97
97.3
99.1
100
100.5
101.6
102.7
103.5
103.7
106.7
106.9
108
108.5
109.2
110
110.3
110.5
112
114.4
115.7
116.8
116.9
117
120
130
132
150
153
157
182
213.2
242
261
292
66.5
85
98
135
160
185
210
7/16 inch
9/16 inch
7/8 inch
1-1/8 inch
98.5
165.2
190.7
111.8
6mm
41.5
56
75
5.1
99.3
70.1
218
19.4
25.8
107
9.65
101
102
87
114
111
115
104
116
318
400
76.5
43
52
54
89.8
114.8
140.8
166.5
217.8
269
76
88
E1
40
20
17.5
16
15
14
12.5
12
-
E2
9
10
12
12.5
14
15
16
46.2
-
F
-
14.2
17.4
20.6
23.8
26.9
30.1
36.5
114.3
140
20.2
30
40
5
6
6.5
7
9
9.5
12
12.5
13
13.5
14
15
15.8
17.5
23
35
37.1
54.9
57.25
57.75
65.25
68.45
10
15.1
19.9
55
75
7.2
60
62
G
82.6
114
25.4
108
76.2
10.9
14.1
15
10
12.5
17.2
76
25
75
50
120.7
53
109.7
110.2
99
102.2
121
121.0
165
-
φ4.83
φ6.35
19
25.6
26.2
41.2
44
52.4
80
112
102
G1
34
44
50
65
70
80
83
95
102.7
110
130
153
160
185
213.2
241
261
291
341
396
446
504
554
609
400
318
500.9
651
501.5
651.5
501
502
652
G2
4.5
24
34
40
55
57.2
69.9
70
85
88.9
100
120
139.7
150
175
200.5
201
225
248.5
249
275
325
380
430
480
530
585
305
387.2
488.2
638.2
487.8
637.8
488
638
H
-
17.3
19.8
22.4
10.4
14.2
10.7
14.7
6
7.7
8.4
9
13
17
12.8
16.5
19.2
14
16
15.5
10.5
18.5
8.9
10
12
12.7
15
17.4
17.5
19.9
20
22
22.3
24.6
22.6
25
25.6
29
32
32.2
35
36
37
33
34.2
38
40
41
45.4
44
46
46.9
47
50
50.2
51
60
88
94
95
98
99
100
102
109
110
112
134
139
145
163
164
165
213
246
92
107
130
151
177
185
125
143
18
181
37.2
247
H1
19.9
18.5
10.4
14
15.7
10
18
10.5
16
17.4
17.5
20
8
30
15.5
40
50
55.1
-
55.6
57.6
59.2
65.6
67.6
69.2
70.9
74.7
76
76.3
78
79.5
80
80.9
84.7
85.1
86.3
89.5
91
95
95.1
95.8
97
100
105.8
106
116
12.7
12
22.6
24.6
27.1
33.8
29.3
21.6
H2
38
8
10
12
16
40
43
44
48
48.3
49
49.2
50
50.2
50.6
51
53
53.7
54
55.6
56
-
59
60
61
63
64
66
20.5
19
J
-
1.6
2.4
15.8
22.4
31.8
44.5
21
23
30
33
47
48
59
68
77
80
83
92
98
107
114
118
127
139
144
154
162
167
183
227
245
275
294
K
35
49
61.5
80
90
109
134
160
220
268
-
31.3
32.9
3.96~1.57
5.16~2.39
211
25
Electric capacity (W)
15
17
22
25
30
31
32
35
36
43
50
53
60
62
70
75
87
90
93
97
100
103
105
120
130
137
150
155
175
200
211
217
220
232
309
325
L
2.3
2.5
2.4
3.15
10
12
12.5
13
13.2
15
15.5
16
17
17.8
18
18.2
18.3
18.65
18.8
19
19.05
19.1
19.8
20
20.3
20.5
20.6
21
21.15
21.336
22
23
23.1
23.5
23.836
24.6
24.8
25
25.1
25.4
25.6
25.8
26
26.8
26.9
26.924
27
27.3
27.5
27.6
27.7
28
28.124
28.448
28.5
28.7
29
29.2
29.3
29.4
29.424
30
29.5
30.2
30.8
30.948
31
31.5
31.75
31.8
32
32.7
33
33.3
33.35
33.4
33.5
33.9
34
34.2
34.3
34.8
34.9
35
35.3
35.4
35.5
35.6
35.8
35.9
36
36.1
36.5
36.536
36.6
36.8
37
37.1
37.4
37.5
37.6
37.8
38
38.1
38.2
38.3
38.4
38.5
38.6
38.8
38.9
39
39.1
39.3
39.5
39.6
39.8
39.9
39.036
40
40.1
40.3
40.5
40.6
40.9
41
41.1
41.2
41.28
41.3
41.4
41.6
41.8
41.9
42
42.1
42.2
42.3
42.4
42.5
42.7
42.9
43
43.186
43.2
43.3
43.4
43.5
43.6
43.7
43.8
43.9
44
44.2
44.386
44.5
44.7
45
44.8
45.2
45.3
45.512
45.686
45.7
46
46.2
46.3
46.4
46.7
46.712
46.736
46.8
47
47.2
47.3
47.386
47.5
47.6
47.63
47.7
47.8
48
48.2
48.5
48.7
49
49.2
49.3
49.386
49.5
49.7
49.6
49.8
49.9
50
50.1
50.4
50.6
50.5
50.8
51
51.3
51.5
51.736
51.8
52
52.3
52.5
52.8
53
53.3
54
54.1
54.2
54.3
54.6
54.8
55
55.1
55.2
55.4
55.5
55.8
56
57
58
(58)
58.1
59
60
61
62
62.2
63
64
64.5
64.8
65
65.8
66
67
67.6
68
68.5
69
69.3
69.5
70
70.7
71
72
73.7
74
75
76
78
80
81
82
82.5
84
85
85.3
85.7
86
88
88.9
90
91
91.4
92
92.5
93
94
95
96
96.4
96.5
98
100
101
101.4
102
102.4
103.2
104.7
104
105
106
106.9
107
108
108.4
109.5
110
110.7
111
112
114
115
118.5
120
121
122
123.7
124
125
126
127
130
131
132
133.3
135
135.6
137
139.7
140
141
142
144
146
147
148
148.8
149
149.9
150
152
153
156
156.2
156.7
157
158
160
162
164
165
166
167
168
170
174.6
175
176
178
180
182
184.7
190
196
199
199.2
200
202
203
205
206
210
216
218
220
221
222
225
229
230
236
240
246
250
252
270
276
280
296
300
304
334
356
400
406
416
420
500
508
600
610
750
900
914
990
1000
1500
2000
2500
3000
4000
4500
5000
10000
~30.25
~49.22
103～111
106～109
111～114
120～139
122〜141
128.4~148.2
128〜147
152 m
161～201
167.5~198.5
167〜198
190.5~235.5
190〜235
227～268
706
23.8
24
44.4
101.6
120.6
158.7
82.3
128.5
165.1
177.8
209.8
273.3
104.9
177.7
51.7
62.5
21.5
76.2
-
75.5~82.5
213
177
145
212
11.5
1.85
45.9
123
103
108～111
100~110
97~107
117~134
143~167
132~146
134~148
164~189
209~243
76.5
119
138
186
134
480
97
56.6
350
108.5
211
274.6
356.6
357
275
99
234.2
186.4
186.5
139
164.2
217.2
131.7
192.7
169.4
116.4
169.5
20m
96.2
109
136
117
185
266
L1
25
36.8
37.5
48
52
54
55
57.8
58.2
60
62
63
64.1
64.5
65
67.3
70
75
80
82
85
86
90
95
74
92
72
4
4.5
91.4
96.5
85.3
41
52.5
40
50
15
45
16
10
20
31
49
14
0.85
21.6
84
98
100
102
103
104.1
105
109.2
107
110
111
113
115
116
117
120
121.9
122
123
124
125
126
130
131
132
133
135
137
138
140
145
147
150
148
149.4
151
153
154
155
156.7
157
159
159.9
160
162.6
165
167
166
170
172
173.4
179.4
180
190
200
204
206
210
220
348
353
357
363
365
367
370
373
380
381
382
383
387
388
390
397
398
400
401
403
407
417
420
423.4
429.4
430
440
450
454
456
460
470
598
603
607
613
615
617
620
623
630
631
632
633
637
638
640
647
648
650
651
653
657
667
670
673.4
679.4
680
690
700
704
706
710
720
848
853
857
863
865
867
870
873
880
881
882
883
887
888
897
890
898
900
901
903
907
917
920
923.4
929.4
930
940
950
954
956
960
970
1348
1353
1357
1363
1365
1367
1370
1373
1380
1381
1382
1383
1387
1388
1390
1397
1398
1400
1401
1403
1407
1420
1423.4
1429.4
1430
1440
1450
1454
1460
1470
1848
1853
1856
1857
1863
1865
1867
1870
1873
1880
1881
1882
1883
1887
1888
1890
1897
1898
1900
1901
1903
1907
1917
1920
1923.4
1929.4
1930
1940
1950
1954
1960
1970
2348
2353
2357
2363
2365
2367
2370
2373
2380
2381
2382
2383
2387
2388
2390
2397
2398
2400
2401
2403
2407
2417
2420
2423.4
2429.4
2430
2440
2450
2454
2460
2470
2848
2857
2853
2863
2865
2867
2870
2873
2880
2881
2882
2883
2887
2888
2890
2897
2898
2900
2901
2903
2907
2917
2920
2923.4
2929
2929.4
293
2940
2950
2954
2960
2970
30～70
50～120
40～62
50～130
50～90
50～170
50～350
50～150
50～250
50～450
50～550
185
50～75
50～100
60～360
80～580
80～780
47.7
54.2
1000
117.6
L2
73.2
69
94
73
56
81
80.9
72
91
87
55
65
10
20
38
40
48
51.4
52
52.4
54
54.2
56.4
56.8
57
57.3
59
59.4
60
61
61.2
63
64
64.1
66
66.5
67
71.1
71.7
73.5
74
75
76.3
78.3
80
50.8
76.2
79.3
80.2
83.4
82
84
85
85.8
88
88.6
86
90.8
88.9
91.6
92.5
92.6
95
95.4
95.7
97.4
97.5
98.4
101
101.6
102.5
103
103.6
105
108
106
110
127
135
140
147
190
-
96
98.3
103.1
103.9
109
114
117.3
193
195
264
50
70
79
89
90
93
100
104
168
198
261
268
284
287
291
160
170
180
200
54.5
77
78
112
102
121
196
202
266
274
210
270
92
186
194
175
253
190.5
447.2
333
625
654
120
115
126
156
206
136
182
138
150
125
184
152
107.5
150.5
300
500
700
861
51
197
53.1
53.5
75.1
113.7
L3
-
100.5 ～ 108.5
105.5 ～ 113.5
108.5 ～ 116.5
117 ～ 125
118 ～ 126
120.5 ～ 128.5
125.5 ～ 133.5
137 ～ 145
138 ～ 147
63 ～ 71
71 ～ 79
88.5 ～ 96.5
M
38
44
-
45
50
64
68
24.2
26.6
29
31.3
33.7
36.9
43.3
14.27
19.05
20.62
M4
M6
M8
M (depth)
6-M4(7.5)
6-M6(12.7)
8-M8(17.5)
16-M8(9)
6-M4(10)
6-M4(6)
6-M4(8)
6-M4(9)
6-M6(10)
6-M6(8)
8-M8(10)
16-M8(10)
16-M8(20)
20-M8(10)
20-M8(22)
6-M5(8)
4-M5(8)
8-M8(11)
16-M8(12)
8-M8(12)
20-M8(12)
24-M8
24-M8(15)
N
23.01
29.36
32.56
35.71
38.91
45.26
55
58
60
66
70
81
85
99
105
111
112
120
128
155
160
165
180
185
192
196
205
210
235
250
256
300
310
350
355
360
-
R
23.01
26.97
29.36
31.75
34.92
39.67
95.3
114.3
152.4
48
56
72.4
73
S
30.18
34.92
38.1
41.28
44.45
50.8
3.5
5
T
15.5
17
3.05
3.73
0.5
0.8
9.2
9.9
9.3
10.3
3.5
3.53
3.9
3.2
5.1
5.3
17.3
11.9
5
9
7
2
3
4
6
7.5
8
10
12
12.7
13
15
16
17.4
17.5
18.5
18
19.1
20
21
22
23.9
24
25
25.9
28
28.5
36
3.6
7.6
22.7
29.5
32
14
-
20.6
19.8
3.1
20.1
2.85
24.7
7.2
2.5
T (glass thickness)
2.2
3.5
1
1.5
1.6
1.7
2
2.5
2.8
3
3.3
4
4.5
5
5.5
6
6.4
6.5
7
8
9.4
11
12
13
15
16
22
25
30
40
45
50
3.2
2.4
3.8
1+7
2.5+7
3+7
4+7
6+7
6.5+7
9.5
8+7
T1
2.5
22
3
7
8.5
4
5
5.3
5.6
6
7.5
8
8.4
9.5
10
11
11.5
12
12.5
12.7
13.5
19
21
24
25
4.45
17.5
20
9
2.2
2.3
6.5
0
10.7
7.6
9.4
12.4
T2
-
8
10
12
21
1.5
2
2.5
3
5.7
6
6.6
7
7.5
7.9
8.7
11
12.7
17.5
20
22
25
3.1
5
12.4
4.8
0
V (effective diameter)
31
62.8
35.6
15.2
22.9
47.8
24.1
10.9
36
15
49
6
6.5
7
9.5
10
12
15.7
16
17
20
24
30
32
33
35
37
38
40
45
50.3
55
60
63
64
65
68
68.3
70
78
83
89
90
91
93
98
98.6
99
100
102
127
130
136
136.7
47.5
137
144.5
145
148
150
152
153
197
197.6
198
152.4
112
34.8
60.2
X
-
20
25
30
38
40
45
50
52
60
63
65
70
80
82
86
88
90
98
105
108
110
118
135
138
167
178
208
210
254
P.C.D
8
10
14
15
16
18
20
21
22
23
24
25
26
27
29
31
35
37
43
36
33.4
19
30
26.1
29.1
33.1
35.8
39.4
38.1
22.4
19.1
28
32
13
42.3
43.7
48
48.9
50
58.7
50.3
60
70
62
72.4
82.55
85
92.1
92.2
100
102.4
110
120
125
130.2
130.3
135
145
160
181
185
200
210
231.8
260
270
310
284
320
325.4
370
420
480
535
585
640
VF:85＿ICF:58.7
VF:100＿ICF:58.7
VG:85＿ICF:58.7
VG:100＿ICF:58.7
Large-diameter: 70_ small diam
Large-diameter: 85_ small diam
Large-diameter: 85_ small diam
Large-diameter: 100_ small dia
Large-diameter: 100_ small dia
Large-diameter: 100_ small dia
-
90
96
75
105
41.3
Large caliber:120 ___Small cal
Large caliber:120 ___Small cal
Large caliber:120 ___Small cal
Large caliber:120 ___Small cal
Large caliber:135 ___Small cal
Large caliber:135 ___Small cal
Large caliber:135 ___Small cal
Large caliber:135 ___Small cal
Large caliber:135 ___Small cal
Large caliber:160 ___Small cal
Large caliber:160___Small cali
Large caliber:160 ___Small cal
Large caliber:160 ___Small cal
Large caliber:160 ___Small cal
Large caliber:185 ___Small cal
Large caliber:185 ___Small cal
Large caliber:185 ___Small cal
Large caliber:185 ___Small cal
Large caliber:185 ___Small cal
Large caliber:185 ___Small cal
Large caliber:210 ___Small cal
Large caliber:210 ___Small cal
Large caliber:210 ___ Small ca
Large caliber:210 ___Small cal
Large caliber:210 ___Small cal
Large caliber:210_Small calibe
Large caliber:210_Small calibe
14.2
395
480.1
53
40
45
57
63
58
39
55
73
33
44
720.1
579.9
580
720
Air hole
Without air holes
Yes side groove
There is a center hole
Yes (Washer)
None (Washer)
Hole diameter(depth)
φ8
φ8.4
φ4.4
VF bolt: Φ10_ICF bolt: M6 (10)
VG bolt:Φ10_ICF bolt: M6 (10)
φ5.5
φ2.2
VF bolt:M8_ICF bolt:M6(depth 8
VG bolt:M8_ICF bolt:M6(depth:8
φ4.3
φ5.3
φ10.5
φ6.73
φ4.5
φ6
φ6.8
φ7
φ8.5
φ9
φ10
φ11
φ12
φ15
φ19
M4
M6
M8
Large-diameter bolt: M8 (10) _
Large-diameter bolt: Φ10 Kiri
M5
M10
Large diameter bolt: M10(12)_
Large diameter bolt: M12(12)_
大口径ボルト:M10(10)＿小口径ボルト:M8(10)
φ8.43
-
φ14
８
Connection type
SHV Connectors
BNC connector
MHV Connectors
BNC Connector/Plug
SHV Connector/Plug
SMA plug
The atmosphere-side plug-fitti
For the air-side plug-fitting
For the vacuum side plug fitti
Vacuum side and the atmosphere
MHV Connector/Plug
SHV plug
N plug
MHV plug
BNC plug
LM plug
BNC/SHV Plug
BNC/MHV plug
BNC/SMA plug
LAN
HDMI
USB
microdot plug
RH18/PVC19
BURNDY
QD1KJBA
MS
OMEGA™
MS（MIL-C5015）
MS (Mil-C-26482)
Micro D-Sub (MIL-DTL-83513)
D-Sub(MIL-C-24308)
5 kV - 3 A5 kV - 22 A
3 kV - 35 A silicon plug conne
5 kV - 110 A oxygen-free coppe
5 kV - 110 A silicon plug conn
3 kV - 35 A free copper (+ Ni
RH25/PVC25
RH38/PVC38
SMA905
FC/PC
USB2.0
USB3.0
USB3.1
Metal - Metal
Glass - Glass
BNC plug/SHV connector
BNC connector/SHV plug
BNC connector/SHV connector
BNC plug/SMA plug
BNC connector/SMA connector
BNC connector/SMA plug
BNC plug/SMA connector
コンセント
untouched
type
BNC cable
MHV cable
N cable
SHV cable
SMA cable
Ground shield
Spring washer
ﾌﾗﾝｼﾞ12ﾎﾟｲﾝﾄ頭ﾎﾞﾙﾄ
Floating shield
Grooved Low Head bolt
Grooved Nabeatama bolt
Grooved cheese head bolt
Grooved fill Stars head bolt
Set screw
Cross hole with low head bolt
Cross hole with Nabeatama bolt
Flat washer
Hexagon nut
Hexagon socket head shoulder b
Hexagon socket low head bolt
Hexagon socket head button bol
Hexagon socket head bolt
Rokkakuatama bolt
LM cable
Crimp
push-on
barrel
Classification
100
O-ring
Peripheral components
nut
Flanged terminal
bolt
Washer
For glass-to-glass connection
For glass-to-metal connection
For metal-to-metal connection
For both glass and metal
pin
Socket
Manual
Pneumatic (single-acting)
Pneumatic (double-acting)
in general
one touch
toggle
motor
both side VF
both side VG
one side VF/VG
plug
cap
The contents of goods
Assembled set
Only flanged terminal
Plug and socket contacts inclu
O-ring only
With center ring
white
Colors: white, black, gray, gr
thermostat
Heat-resistant adhesive tape
glass mat
ICF70x4,Height 300mm, width 30
Clamp cover
O-ring
window
body
The number of terminals
14
15
-
1
2
3
4
5
6
7
8
9
10
11
12
13
The number of electrode
1
1(Coax)+4
2
3
4
5
6
7
8
8(4+4)
9
10
11
12
12(8+4)
13
14
15
16(8+8)
16
17
18
18(9+9)
19
20
21
22
24
24(9+15)
25
30
30(15+15)
31
32
37
40
40(15+25)
41
48
50
50(25+25)
51
72(9x8)
74
74(37+37)
100
100(50+50)
Total number of electrodes
18
24
30
40
27
16
8
12
50
72
74
100
Pairs of Thermocouple
1
2
3
4
5
6
7
10
11
15
24
12
Electric current / 1 pc.
2 A
Milli
4.8 A
6.5 A
3.6 A
1 A
3 A
6.7 A
5 A
7 A
7.5 A
8 A
9 A
10 A
11 A
12A
13 A
14.2 A
15 A
14.7 A
16.5 A
20 A
22 A
23 A
25 A
26 A
28 A
30 A
33 A
35 A
40 A
50 A
55 A
56 A
60 A
70 A
73 A
75 A
92 A
100 A
110 A
124 A
145 A
150 A
476 A
600 A
800 A
808 A
1000 A
N/A
Total current/1 terminal
14.6
9A
15A
30A
9.9 A
10.7 A
11.4 A
12.8 A
13.2 A
13.3 A
14.4 A
14.5 A
18 A
22.2 A
28.8 A
33.1 A
38 A
44 A
44.5 A
48 A
60 A
96 A
Milli
Withstand voltage: DC
13 V
Milli
25 V
20 V
15 V
30 V
150 V
300 V
500 V
600 V
700 V
1 kV
750 V
1.5 kV
1.8 kV
2 kV
2.3 kV
3 kV
2.5 kV
5 kV
2.7 kV
2.8 kV
2.8 kV (reference)
6 kV
7.5 kV
8 kV
10 kV
12 kV
13 kV
14 kV
20 kV
24 kV
25 kV
30 kV
35 kV
40 kV
60 kV
65 kV
100kV
Insulation resistance value
frequency
10 MHz
100 MHz
200 MHz
1300 MHz
4000 MHz
6500 MHz
-
15 GHz (reference value)
7.5 GHz
Core diameter (μm)
62.5
65
100
200
400
600
1000
-
125/9
125/50
125
Wavelength: nm
200 ～ 800
400 ～ 2200
850 & 1300
1300
Applicable wire size
2.2 MAX
1.7 MAX.
3.5 MAX.
0.8 MAX.
0.8 MAX.(#20)
0.9 MAX.
1.0 MAX.
1.1 MAX.
1.3 MAX.
1.4 MAX.
1.5 MAX.
1.6 MAX.
1.8 MAX.
2.4 MAX.
3 MAX.
3.4 MAX.
6.6 MAX.
AWG #
14
20
22
21
22 / 24
24
26
28
32
Wire / cable diameter
(K type) 0.5sq (current introd
(K type) φ0.32 (current introd
0.5sq
(K type) φ0.32 (current induct
φ 0.32
φ 0.36
φ 0.65
NA (Numerical Aperture)
0.22±0.02 or 24.8°
0.27±0.02
0.22 ± 0.02
Connection diameter (φ)
1/4 inch
3/8 inch
1/2 inch
1/8 inch
3/4 inch
1/1 inch
1-1/4inch
1-1/2inch
2inch
2 mm
3 mm
4 mm
5 mm
6 mm
8 mm
10 mm
12 mm
15 mm
18 mm
14～27
11～23
17～32
19～38
21～38
21～45
27～51
33～57
40～64
50～66
68～86
87～113
Fixed bending radius (R)
10
15
25
30
35
60
90
50
70
80
40
100
120
170
220
240
300
350
Apply pipe outer diameter
6.35
9.5
12.7
17.3
19.1
27.2
34
38
41
42.7
48.6
60.5
63.5
76.3
89.1
101.6
114.3
139.8
153
165.2
203
216.3
267.4
318.5
355.6
406.4
457.2
508
558.8
15.8
254
69.9
305
Applicable Bolt
M8X25L
M4X12L
M4X15L
M6X22L
M8X30L
M8X35L
M5X18L
O-ring standard
V100
V120
V150
V175
V225
V24
V275
V325
V34
V380
V40
V430
V480
V530
V55
V585
V70
V85
-
Operating range
56-64
59-70
-
51.7～54.3
52.4～55.6
52.2～57.8
53.4～56.6
53.7～56.3
54.4～57.6
53.3～58.7
54.2～59.8
55.2～60.8
55.3～60.7
55.4～58.6
56.2～61.8
58.2～63.8
58.3～63.7
58.4～61.6
59.2～64.8
59.3～64.7
53.2～58.8
59.4～62.6
60.2～65.8
61.7～64.3
63.3～68.7
62.3～67.7
63.7～66.3
67-73
62.2～67.8
66.3～71.7
74-90
78-100
85-100
85-109
88-112
89-111
90-120
91-118
92-128
95-124
95-125
96-111
96-124
100-130
110-150
110-140
101-129
119.5～126.5
51.7~54.3
52.4~55.6
53.4~56.6
52.2~57.8
63.7~66.3
60.2~65.8
62.2~67.8
66.3~71.7
61.7~64.3
53.7~56.3
54.4~57.6
54.2~59.8
58.4~61.6
58.2~63.8
58.3~63.7
59.4~62.6
59.2~64.8
59.3~64.7
53.2~58.8
53.3~58.7
55.4~58.6
56.2~61.8
55.2~60.8
55.3~60.7
62.3~67.7
63.3~68.7
119.5~126.5
Spring constant (N / mm)
2.4
2.6
3.5
3.6
3.8
3.9
4
4.7
4.8
5.2
5.3
6
6.2
6.9
9.2
9.8
11.9
-
26.2
31.8
41.1
47.8
60.5
Fixed/Rotatable
blank
Blank tap
pierced
Perforated tap
Fixed/rotating
rotation
fix
Double-sided fixation
one-sided rotation
Main materials
SUS 304L
nylon
stainless steel
glass-ceramic
MoS2 + mineral oil
PTFE
SUS 304
SUS 316L
Aluminum
Alumina ceramic
Gum
Steatite ceramic
Nitrile
Polyurethane
Soft vinyl chloride
Thermoplastic elastomer (TPE)
Aluminum/polycarbonate
SUS 316 (double-acting), SUS31
SUS304(L type), SUS304L(Y,Z ty
NW:SUS304, JIS10K:SUS304F
polyethylene
BeCu
PEEK
Aluminum 5052
electrode
SUS 304
Alumel ®
Chromel ® / alumel ®
Chromel ® / alumel ® / oxygen-
Kovar ®
Copper / constantan ®
Beryllium copper alloy
Oxygen-free copper
Oxygen-free copper + Ni platin
SUS 316L
beryllium copper
molybdenum (Mo)
Stainless steel (gold plated)
Tungsten-rhenium alloys
Clomel® / Constantan®
Iron / Constantan®
Platinum Rhodium Alloy
Platinum Rhodium Alloy / Plati
Nike Rosil / Nike Rosil
stainless steel
contact
Copper Alloy + Silver Plating
beryllium copper
(K type) Chromel ®, alumel ® (
Alumel ®
Chromel ®
Chromel ®, alumel ®
Constantin ®
銅
Beryllium copper + gold-plated
Phosphor bronze + nickel-plate
Copper, constantan ®
Copper alloy + gold-plated
brass
Iron
Beryllium copper + rhodium pla
conductor
-
Ag
Silver-plated soft copper wire
stainless steel wire
Silver wire
(K type) Chromel ®, alumel ® (
(K type) Chromel ®, alumel ®Ag
Ag-plated copper wire
Ni plating annealed copper wir
Chromel ®, alumel ®
Tin-plated copper wire
Copper, constantan ®
Copper wire
Copper covered steel wire
Soft copper wire
copper wire
Alumel
The outer ring
SUS 304
SUS 316L
Aluminum
Teflon ®
The inner ring
SUS 304
SUS 316L
Aluminum
Teflon ®
Seal / gasket material
Aluminum
Oxygen-free copper
Oxygen-free copper + gold-plat
Oxygen-free copper + silver-pl
Oxygen-free copper + annealed
nickel
CALREZ® 1050
Aluminum A1050
Viton ®
Kalrez ®4079
Aluminum A5052
SUS
SUS + Viton
SUS + Nitrile
FEP
Nitrile
SUS + Carlez®4079
PTFE
WC Series Superabrasives/Cu Al
FKM
Mesh size
#8 (Wire diameter: 0.57, Clear
#8 (Wire diameter: 0.6, Cleara
#10 (Wire diameter: 0.5, Clear
#20(wire:0.2、Opening:1.07)
#50 (Wire diameter: 0.18, Clea
#70(Wire diameter:0.14, Cleara
#100(Wire diameter:0.1, Cleara
#150 (Wire diameter:0.06, Clea
Flange material
Duran® borosilicate glass
SUS 304
SUS 304L
SUS 316
SUS 316L
SUS 329
SUS（1.4462）
SUS（329J3L）
SUS316L/SUS304(CeFlX®/ICF)
acrylic
Aluminum（A5052)
SUS316LN
aluminum (Al)
Duran® (borosilicate glass)
Teflon ® (GRP)
Titanium
Quartz
Hastelloy C22
SUS304（NW only SUS316)
SUS304(L type), SUS314L(Others
BeCu
shell
Aluminum Alloy + Zinc Plating
Brass + Silver Plating
ABS resin + nickel-plated / st
ABS resin + nickel base chromi
SUS 303
SUS 304
SUS 304+ gold-plated
Aluminum alloy
Glass fiber filled nylon
Brass + chrome plating
Brass + nickel-plated
SUS 304+Gold plating / SUS 304
A5052 + Ni plating
brass
body
SUS 304
SUS 304L
SUS 316
aluminum (Al)
Flexible / bellows
SUS
AM-350
SUS 316L
SUS 321
Teflon ®
Hastelloy C22
YES
NO
blade
-
PEEK®
SUS 304
PVC
Hastelloy C22 equivalent
Bonnet seal
Viton ®
FKM(Viton®)
FKM
oxygen-free copper
handle
Aluminum 2024-T4
phenol resin
Tubes / Pipes
SUS
SUS 304
SUS 316
SUS 316L
Oxygen-free copper
Hastelloy C22
strap
SUS 316L
stainless
Steel nickel plate
sleeve
SUS 304
SUS 430
Aluminum
Kovar ®
Polyimide
SUS304L
SUS 329
70-30 CuNi
SUS04
Insulator
Epoxy
FEP
PBT resin UL (94V-0)
PE
PEEK®
PTFE
TFE
XLPE
Alumina ceramic
Glass
Glass filled phenolic resin (U
Glass filled phenolic resin (U
Glass filled phenolic resin (U
Glass filled phenolic resin (U
Glass filled phenolic resin (U
Glass filled phenolic resin (U
ceramic
Borosilicate glass
Synthetic resins
Molded silicon
Plug: PTFE, Cable: XPE
The inner surface processing
Electro-polished
Buff 400 (equivalent to Ra 1.0
Machined (Ra3.2 equivalent)
GBB Processing
Ra ≤ 0.8μm
Ra0.3~0.4μm
nashi (Pyrus pyrifolia, esp. v
Ra 3.0-1.6μm (double acting),
mass
78
120
159
170
175
220
330
430
590
850
1000
-
3.0 Kg
The lowest temperature
-269℃
-196℃
-180℃
-271℃
-270℃
-100℃
-250℃
-200℃
-195℃
-75℃
-65℃
-55℃
-50℃
-45℃
-40℃
-30℃
-20℃
-10℃
10℃
-5℃
5℃
60℃
65℃
100℃
105℃
125℃
150℃
200℃
250℃
260℃
280℃
300℃
315℃
350℃
450℃
1000℃
-
-15℃
Maximum temperature
-271℃
-55℃
-50℃
-45℃
-40℃
-30℃
-20℃
-10℃
0℃
60℃
65℃
80℃
85℃
100℃
-65℃
-75℃
-196℃
-200℃
-270℃
105℃
125℃
130℃
140℃
150℃
150°C (body), 80°C (overall)
165℃
180℃
200℃
200°C (body), 80°C (overall)
250℃
300℃
260℃
280℃
315℃
350℃
400℃
450℃
600℃
1000℃
70℃
120℃
40℃
55℃
Use temperature (Supplement)
80
(Guaranteed value) 150 ℃ (desi
It is within 12 hours allowed
To within 5 hours allowed up t
Reference-voltage value (MPa)
1.5
2.3
2.7
3.4
5.3
6.1
8.2
1
0.4
-0.1～0.4
-0.1～0.3
-0.1～0.2
Available pressure
10^-2 Pa～10^-6 Pa
10<sup>-9</sup> Pa
Atmospheric pressure ~ 10<sup>
Atmospheric pressure ~ 10<sup>
Atmospheric pressure ~ 10<sup>
Atmospheric pressure ~ 10<sup>
Atmospheric pressure ~ 10<sup>
Atmospheric pressure ~ 10<sup>
Atmospheric pressure ~ 10<sup>
600 kpa~ 1.33x10-5 kpa
0.12MPa ～10<sup>-6</sup> Pa
10<sup>-6</sup> Pa ～0.5Mpa
13.3 Pa
Vacuum～0.9MPa(G)
13 Pa～10<sup>-6</sup> Pa
13 Pa～10<sup>-7</sup> Pa
Leak rate
<1.3x10<sup>-10</sup>Pa･㎥/sec
<1.3x10<sup>-4</sup>Pa･㎥/sec
<1.3x10<sup>-7</sup>Pa･ℓ/sec
<1.3x10<sup>-7</sup>Pa･㎥/sec
<1.3x10<sup>-9</sup>Pa･㎥/sec
<5.5x10<sup>-9</sup>Pa･㎥/sec
<1.0x10<sup>-8</sup>Pa･㎥/sec
<2x10<sup>-9</sup>Pa･㎥/sec
<1x10<sup>-8</sup>Pa･㎥/sec
<5x10<sup>-7</sup>Pa･㎥/sec
<5x10<sup>-9</sup>Pa･㎥/sec
<1x10<sup>-7</sup>Pa･ℓ/sec
<1x10-8Pa･㎥/sec
<1.3x10<sup>-8</sup>mbar･l/sec
<1.3x10<sup>-11</sup>Pa･㎥/sec
<1.0x10<sup>-9</sup>Pa･㎥/sec
Recommended plate thickness
Recommended hole diameter
Corresponding seal
Aluminum / oxygen-free copper
Elastomer seal
Elastomeric seal / metal seal
Elastomer seal only
Dedicated elastomeric seal
Expansion and contraction of the
Tightening torque
1 Nm±20%
1.5 Nm±20%
2 Nm±20%
2.5 Nm±20%
3.5 Nm±20%
4 Nm±20%
5 Nm±20%
7 Nm±20%
9.5 Nm±20%
12 Nm±20%
Tightening torque - elastomer
1 Nm±20%
1.5 Nm±20%
2 Nm±20%
2.5 Nm±20%
3.5 Nm±20%
4 Nm±20%
5 Nm±20%
7 Nm±20%
9.5 Nm±20%
12 Nm±20%
-
Tightening torque - Aluminum
-
6 Nm±20%
2 Nm±20%
2.5 Nm±20%
3 Nm±20%
4.5 Nm±20%
9 Nm±20%
18 Nm±20%
27 Nm±20%
36 Nm±20%
Tightening torque - metal
2.5 Nm±20%
3 Nm±20%
4.5 Nm±20%
5 Nm±20%
8.5 Nm±20%
10 Nm±20%
12.5 Nm±20%
18 Nm±20%
24 Nm±20%
30 Nm±20%
-
Tightening torque - oxygen-free
-
10 Nm±20%
3.5 Nm±20%
5 Nm±20%
6 Nm±20%
8.5 Nm±20%
18 Nm±20%
36 Nm±20%
54 Nm±20%
72 Nm±20%
84 Nm±20%
Tightening torque - nickel
6 Nm±20%
8 Nm±20%
10 Nm±20%
14 Nm±20%
30 Nm±20%
60 Nm±20%
90 Nm±20%
120 Nm±20%
140 Nm±20%
-
18 Nm±20%
Bolt size
M6
# 8-32 (ICF34 tap hole)
M10
M14
M8
Expansion and contraction of the
METHOD tightening
NW80 ~ 125 fingertight NW160 ~
Torque Wrench
Torque wrench (for a nominal 1
Hand tighten
Hand tightening / torque wrenc
chemical resistance
△
○
◎
NW80～125△/NW160～250○
Clean Room
△
○
◎
NW80～125○/NW160～250△
Classification (ion pump)
AC adapter
Ion pump
set
mobile battery
One-touch cable
Power / display unit
-
Exhaust rate (L / sec)
0.5(窒素)
1(窒素)
2(窒素)
3(窒素)
4(窒素)
5(窒素)
0.5
1
2
3
4
5
6(窒素)
Ion pump body
12E5LTR
4E3L
4E3LT
9E4L
B-0861T
B-0862M
B-0862T
C-1625M
C-1765M
12E6LKASN
-
Power / display unit
-
C-1766D
C-1766Q
D-0585
HVPS-625N
R-1800
Baking possible temperature (the
Baking possible temperature (pow
The input power current
-
250～700 mA
45～200 mA
450 mA
500 mA
Battery backup for the input pow
Battery backup for input power c
Battery backup for the input pow
Output power voltage
+3500±20%
12 V DC
15 V DC
-
Output power voltage (short circ
Output power current (short circ
Environmental Operating temperat
Environmental humidity range (no
Analog output signal recommended
Minimum order
30
25
35
37
40
45
50
55
60
65
70
70
80
85
90
95
100 pcs.
105
110
115
120
125
130
135
140
150
160
170
180
195
200
210
230
250
280
315
360個
420
size
1/2-13
1/4-20
1/4-28
3/8-16
3/8-24
1/2
1/4
3/8
5/16
#10
#10-24
#10-32
#2
#2-56
#4
#4-40
#5
#5-40
#6
#6-32
#8
#8-32
5/16-18
5/16-24
M10
M12
M16
M2
M2.5
M3
M4
M5
M6
M8
-
Inside diameter (mm)
0.7366
1.0668
1.2446
1.4224
1.778
2.0574
2.1
2.2
2.2606
2.3876
2.5654
2.6
2.7
2.8448
2.8956
2.921
3.0734
3.1
3.2
3.2512
3.6322
3.683
3.7592
4.1
4.2926
4.3
4.3434
4.4196
4.445
4.4704
4.953
5.1
5.1308
5.2324
5.2832
5.3
5.9436
6.0198
6.0706
6.1
6.4
6.477
6.6802
7.5184
7.5946
7.6454
8.1
8.3312
8.4
8.4
8.5
9.1186
9.1948
9.2456
9.906
9.9822
10.2
10.4648
10.5
10.6934
10.7696
10.8204
12.065
12.2
12.2936
12.3698
12.4206
13.0
13.081
13.2842
13.6398
13.8684
13.9446
13.9954
15.24
15.4686
15.5448
15.8
15.5956
16.8148
17.0434
17.1196
17.1704
18.415
18.6436
18.7198
18.7706
19.9898
20.2184
20.2946
20.3454
21.59
21.8186
21.8948
21.9456
23.1648
23.3934
23.4696
23.5204
24.765
24.9936
25.0698
25.1206
26.3398
26.5684
26.6446
26.6954
27.94
28.1686
28.2448
28.2956
29.5148
29.7434
29.8196
29.8704
31.115
31.3436
31.4198
31.4706
32.6898
32.9184
32.9946
33.0454
34.29
34.5186
34.5948
34.6456
36.0934
36.1696
37.465
37.6936
37.7698
37.8206
39.3446
40.64
40.8686
40.9448
40.9956
42.5196
43.815
44.0436
44.1198
44.1706
45.6946
46.99
47.2186
47.2948
47.3456
48.895
50.165
50.3936
50.4698
50.5206
52.07
53.34
53.5686
53.6448
53.6956
55.245
56.515
56.7436
56.8198
56.8706
58.42
59.69
59.9186
59.9948
60.0456
61.595
62.865
63.0936
63.1698
63.2206
64.77
66.04
66.2686
66.3448
66.3956
67.945
69.215
69.4436
69.5198
69.5706
71.12
72.39
72.6186
72.6948
72.7456
75.565
75.7936
75.8698
75.9206
78.74
78.9686
81.915
82.1436
82.2198
82.2706
85.09
85.3186
88.265
88.4936
88.5698
88.6206
91.44
91.6686
94.615
94.8436
94.9198
94.9706
97.79
98.0186
100.965
101.1936
101.2698
101.3206
104.14
104.3686
107.315
107.5436
107.6198
107.6706
110.49
110.7186
113.665
113.8936
113.9698
114.0206
116.84
117.0686
120.015
120.2436
120.3198
120.3706
123.19
123.4186
126.365
126.5936
126.6698
126.7206
129.54
129.7686
132.715
132.9436
133.0198
133.0706
135.89
136.1186
139.065
139.2936
139.3698
142.24
142.4686
145.415
145.6436
145.7198
148.59
148.8186
151.765
151.9936
152.0698
158.115
158.3436
158.4198
164.465
164.6936
164.7698
170.815
171.0436
171.1198
177.165
177.3936
177.4698
183.515
183.7436
183.8198
189.865
190.0936
190.1698
196.215
196.4436
196.5198
202.565
202.7936
202.8698
208.915
209.1436
209.2198
215.265
215.4936
215.5698
221.615
221.8436
221.9198
227.965
228.1936
228.2698
234.315
234.5436
234.6198
240.665
240.8936
240.9698
247.015
247.2436
247.3198
253.365
253.5936
266.065
266.2936
278.765
278.9936
291.465
291.6936
304.165
304.3936
316.865
329.565
329.7936
342.265
354.965
355.1936
367.665
380.365
380.5936
393.065
405.257
417.957
430.657
443.357
456.057
468.757
481.457
494.157
506.857
532.257
557.657
582.676
608.076
633.476
658.876
-
34.8
22.1
47.5
15
23
36
50
42.7
48.6
60.5
The outer diameter (mm)
2.3876
3.5814
3.7846
4.3688
4.4
4.7752
5.0
5.1
5.1562
5.3086
5.5626
6.0
6.0452
6.2
6.35
6.7818
7.0
7.1374
7.4422
7.6
7.7216
7.9502
8.4836
8.7376
8.9916
9.0
9.2
9.5
9.525
10.0
10.3124
11.0
11.1252
11.8
11.8872
12.0
12.4206
12.7
14.2748
14.3002
14.8
14.8844
15.875
16.0
17.3482
17.4752
18.1
19.05
20.0
20.6502
21.1
22.1742
22.225
23.8252
24.0
25.4
27.0002
28.575
30.1752
31.75
33.3502
34.925
36.5252
38.1
39.7002
41.275
42.8752
44.45
46.0502
47.625
49.2252
50.8
52.4002
53.975
55.5752
57.15
58.7502
60.325
61.9252
63.5
65.1002
66.675
68.2752
69.85
70
71.4502
73.025
74.6252
76.2
77.8002
79.375
80.9752
82.55
85.725
87.3252
88.9
92.075
93.6752
95.25
98.425
100.0252
101.6
104.775
106.3752
107.95
111.125
112.7252
114.3
117.475
119.0752
120.65
123.825
125.4252
127
130.175
131.7752
133.35
136.525
138.1252
139.7
142.875
144.4752
146.05
149.225
150.8252
152.4
155.575
157.1752
158.75
161.925
163.5252
165.1
168.275
169.8752
171.45
174.625
176.2252
177.8
180.975
182.5752
184.15
187.325
188.9252
190.5
193.675
195.2752
196.85
200.025
201.6252
203.2
206.375
207.9752
209.55
212.725
214.3252
215.9
219.075
220.6752
222.25
225.425
227.0252
228.6
231.775
233.3752
234.95
238.125
239.7252
241.3
244.475
246.0752
247.65
250.825
252.4252
254
257.175
260.35
263.525
266.7
273.05
276.225
279.4
285.75
288.925
292.1
298.45
301.625
304.8
311.15
314.325
317.5
330.2
336.55
339.725
342.9
355.6
361.95
365.125
368.3
381
387.35
390.525
393.7
406.4
412.75
415.925
419.1
431.8
438.15
441.325
444.5
457.2
463.55
466.725
469.9
482.6
492.125
495.3
508
517.525
520.7
542.925
546.1
568.325
571.5
593.725
596.9
619.125
622.3
644.525
647.7
669.925
673.1
-
50 x 50
75 x 75
100 x 100
Length (mm)
2.1167
3.175
4
4.7625
5
6
6.35
7.9375
8
9.525
10
11.1125
12
12.7
14
14.2875
15.875
16
17.4625
18
19.05
20
22
22.225
25
25.4
26.9875
28
28.575
30
31.75
32
34.925
35
38.1
40
41.275
44.45
45
50
50.8
53
57.15
58
60
63.5
64
65
69.85
1000
-
100
200
300
500
LEAD
8
16
18
20
22
24
28
32
44
-
size
□10mm
□25mm
13mm×5m
250mm×250mm
L size
M10用
M12用
M16用
M6用
M8用
M size
S size
Φ50.8mm
-
8mm×5m
The thickness
0.3mm
0.43mm
0.5mm
1mm
-
12.7mm
0.038 mm
0.025 mm
0.035mm
0.05mm
0.08mm
Name
真空用
Ceramic paste
For the atmosphere
Contents: 2.2g
Contents: 25g
Contents: 50g
Wire stripper
Crimp tool
Drawing tool
-
CeFiX® flange
Usable
Usage prohibited
-
NW flange
Usable
Usage prohibited
-
VFVG
VF/VG 20
VF/VG 25
VF/VG 40
VF/VG 50
VF/VG 80
VF/VG 100
VF/VG 125
VF/VG 150
VF/VG 200
VF/VG 250
Thermal expansion coefficient (/
Refractive index (Na-D line)
Bolt hole spacing
□ 53.6 x 37.6
□ 53.6 x 82.1
□ 64.6 x 49.1
□ 64.6 x 74.1
□ 79.6 x 46.6
□ 79.6 x 75.6
□ 99.6 x 45.6
□ 99.6 x 80.6
□ 99.6 x 93.6
Corresponding laser
UV
DUV
EUV (excimer)
UV/VIS
VIS/NIR
AR coated:365～780nm
Withstand voltage
3 kV
3 kVAC / 10 kVDC
150V
6 kV
10 kVAC / 30kVDC
8 kV
Repeated bending radius (R)
75
45
-
130
190
200
240
250
330
390
Conductor resistance (20 ° C. ·
37.2Ω/km～500MΩ/km
58.6 Ω/km
49.8Ω/km
38.3Ω/km
Vacuum and Air
For the atmosphere
For vacuum
A (O.D)
33
48
26
18
21
24
30
36
42
50
60
75
100
B (I.D)
19
25
38
6
7.5
9
12
15
18
32
50
shape
A
B
Staight
Angled
single
double
45°
90°
standard
nipple type
Pin
socket
There is a step
"No.
outer
inner
L type
Y type
Z type
S
flat
dome
conical
Elbo
Color
navy blue:For SVC16,SVC16-A14,
wine red:For PVC16,PVC16CH,PVC
light blue:For SVC16CHA/ALA,SV
Brown: for SVC10D
silver:For SVC24CU
White, black, gray, green, bro
white
purpose
SVC16,SVC16-A14,SVC16-L18用
PVC16,PVC16CH,PVC16AL
SVC16CHA/ALA,SVC16CU/CT
SVC10D
SVC24CU
base plate
gauge port
Gage Port/Wilson Seal
Socket Contact Crimping Tool
Tool for inserting socket cont
Tool for crimping socket conta
Tool for removing socket conta
Socket contact fixing jig incl
ISO
63
80
100
160
200
250
320
400
terminal processing
One side: Y-Terminal On
One side: Socket Contact
One side: Plug
One side: socket contact
None
One side: insert One side: lef
One side: Crimp terminal One s
One side: M2 crimp terminal On
One side: M3 crimp terminal On
片側：M4圧着端子 片側：なし
pin diameter
1.4 mm
2.4 mm
2.3 mm
1.3 mm
1.33 mm
3.5 mm
1.6 mm
3.9 mm
4 mm
6.4 mm
19.1 mm
1/4 inch
M16
M24
Shape of Fittings
90° elbow
45° elbow
Tee
3way elbow
Cycles until first service
2,000,000 (unheated and under
50,000
200,000 (unheated and under
30,000 or 1 year
M1
M4
M6
M8
M10
6-M4(6)
6-M6(10)
8-M8(12)
16-M8(12)
S1
6-M4(6)
6-M4(10)
6-M6(10)
8-M8(12)
16-M8(12)
Inner diameter
1/4inch
3/8inch
1/2inch
3/4inch
1/1inch
1-1/2inch
2 inch
15
35
36
38.5
49.5
60
70
95
50
Leakage rate (hood section)
<2x10<sup>-9</sup>Pa･㎥/sec
<2x10<sup>-9</sup>mbar-L/sec
<2.7x10<sup>-7</sup>Pa･l/sec
<1.0x10<sup>-10</sup>Pa･㎥/sec
Leak rate (sheet leakage)
<2x10<sup>-9</sup>Pa･㎥/sec
<2x10<sup>-9</sup>mbar-L/sec
<2.7x10<sup>-6</sup>Pa･l/sec
<1.0x10<sup>-10</sup>Pa･㎥/sec
Differential pressure at opening
Interface
RS232+Analog Output
Logic
RS485
Adjustable minimum leakage*1
Leakage when valve is fully clos
Conductance [L/S].
4
26
29
12.8
41.8
71.9
5
12
33
54
Bolt type
cap bolt
Hexagon Head Bolts
Hex Bolt/Cap Bolt
チューブ外径：チューブ内径
1/2 inch
3/8 inch
1/4 inch
1/8 inch
-
継手サイズ
1/2 inch
3/8 inch
1/4 inch
1/8 inch
-
end
M2
M3
M4
M5
Double-Ended Tubes
One side tube
bilateral fitting
Softness (degree of softness)
life cycle
10000 cycle
100 times
5000 times
stroke
25 ｍｍ
40 ｍｍ
70 ｍｍ
22 mm
50 mm
80 ｍｍ
100 ｍｍ
200 mm
300mm
400mm
500 mm
700 mm
Feed rate
1mm/Rev(0.02μm/pulse)
1mm/Rev
2mm/Rev
Maximum permissible thrust
Straight travel 2kg / Rotation
3kg
直進/回転5kg
Straight travel 7kg / Rotation
7.5kg (12kg for deconditioning
Straight line/rotation 10kg
12kg
15kg
20kg
30kg (35kg for deconditioning)
60kg (70kg de-tuning)
operation
Straight line only
Rotation only
Straight line, rotation
Fixed voltage/temp
150 V / 125 ℃
100 V
200 V
Amount of movement
X・Y±5mm
X・Y±12.5mm
X・Y±7.5mm、Z±5mm
external material
glass cloth
PTFE100%
PTFE coated cloth
Dimensions of heating element
Min. Scale
-
0.01mm
0.05mm
0.00002mm/pulse
0.5°
5°
Tolerance of hole diameter
Feedthrough
Isolator
Viewport
Vacuum Component
Vacuum Valve
Motion Feedthroughs
Others
